{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T18:22:31Z","timestamp":1777918951239,"version":"3.51.4"},"reference-count":41,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2020,2,20]],"date-time":"2020-02-20T00:00:00Z","timestamp":1582156800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Nature Science Foundation of China","award":["61905034"],"award-info":[{"award-number":["61905034"]}]},{"DOI":"10.13039\/501100005047","name":"Natural Science Foundation of Liaoning Province","doi-asserted-by":"publisher","award":["2019-MS-054"],"award-info":[{"award-number":["2019-MS-054"]}],"id":[{"id":"10.13039\/501100005047","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","award":["DUT18RC(4)040"],"award-info":[{"award-number":["DUT18RC(4)040"]}],"id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100013096","name":"Science and Technology Project of State Grid","doi-asserted-by":"publisher","award":["521205190014"],"award-info":[{"award-number":["521205190014"]}],"id":[{"id":"10.13039\/501100013096","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed. The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall. Different from traditional PA sensors, the designed low-power sensor had no gas valves and pumps. Gas could diffuse into the stainless-steel PA microcavity from two holes. The volume of the cavity in the sensor was only 7.9 \u03bcL. We use a 1650.96 nm distributed feedback (DFB) laser and the second-harmonic wavelength modulation spectroscopy (2f-WMS) method to measure PA signals. The measurement result of diffused methane (CH4) gas shows a response time of 5.8 s and a recovery time of 5.2 s. The detection limit was achieved at 1.7 ppm with a 1-s lock-in integral time. In addition, the calculated normalized noise equivalent absorption (NNEA) coefficient was 1.2 \u00d7 10\u22128 W\u00b7cm\u22121\u00b7Hz\u22121\/2. The designed PA microcavity sensor can be used for the early warning of gas leakage.<\/jats:p>","DOI":"10.3390\/s20041164","type":"journal-article","created":{"date-parts":[[2020,2,21]],"date-time":"2020-02-21T10:49:16Z","timestamp":1582282156000},"page":"1164","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":32,"title":["Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0495-2549","authenticated-orcid":false,"given":"Ke","family":"Chen","sequence":"first","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Yewei","family":"Chen","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Bo","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1000-4497","authenticated-orcid":false,"given":"Liang","family":"Mei","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Min","family":"Guo","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Hong","family":"Deng","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Shuai","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Fengxiang","family":"Ma","sequence":"additional","affiliation":[{"name":"Electric Power Research Institute of State Grid Anhui Electric Power Co., Ltd., Hefei 230601, China"}]},{"given":"Zhenfeng","family":"Gong","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Qingxu","family":"Yu","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]}],"member":"1968","published-online":{"date-parts":[[2020,2,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1153","DOI":"10.1109\/JSEN.2018.2879248","article-title":"An in-Pipe leak detection robot with a neural-network-based leak verification system","volume":"19","author":"Waleed","year":"2018","journal-title":"IEEE Sens. 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