{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,2]],"date-time":"2026-06-02T07:41:29Z","timestamp":1780386089391,"version":"3.54.1"},"reference-count":30,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2020,3,3]],"date-time":"2020-03-03T00:00:00Z","timestamp":1583193600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The propagation of surface acoustic waves (SAWs) along a ZnO\/SiO2\/Si piezoelectric structure is experimentally and theoretically studied. Six surface acoustic modes were experimentally detected in the 134 to 570 MHz frequency range, for acoustic wavelength \u03bb = 30 \u03bcm, and for SiO2 and ZnO layers with a thickness of 1 and 2.4 \u03bcm. The numerical and three-dimensional (3D) finite element method analysis revealed that the multilayered substrate supports the propagation of Rayleigh and Sezawa modes (Rm and Sm), their third and fifth harmonics at \u03bb\/3 and \u03bb\/5. The velocity of all the modes was found in good agreement with the theoretically predicted values. Eigenfrequency, frequency domain, and time domain studies were performed to calculate the velocity, the electroacoustic coupling coefficient, the shape of the modes, the propagation loss, and the scattering parameter S21 of the SAW delay lines based on the propagation of these modes. The sensitivity to five different gases (dichloromethane, trichloromethane, carbontetrachloride, tetrachloroethylene, and trichloroethylene) was calculated under the hypothesis that the ZnO surface is covered by a polyisobutylene (PIB) layer 0.8 \u00b5m thick. The results show that the modes resonating at different frequencies exhibit different sensitivities toward the same gas. The multi-frequency ZnO\/SiO2\/Si single device structure is a promising solution for the development of a multiparameters sensing platform; multiple excitation frequencies with different sensing properties can allow the parallel analysis of the same gas with improved accuracy.<\/jats:p>","DOI":"10.3390\/s20051380","type":"journal-article","created":{"date-parts":[[2020,3,3]],"date-time":"2020-03-03T13:06:23Z","timestamp":1583240783000},"page":"1380","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":24,"title":["Experimental and Theoretical Study of Multifrequency Surface Acoustic Wave Devices in a Single Si\/SiO2\/ZnO Piezoelectric Structure"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8363-2972","authenticated-orcid":false,"given":"Cinzia","family":"Caliendo","sequence":"first","affiliation":[{"name":"Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4602-7965","authenticated-orcid":false,"given":"Farouk","family":"Laidoudi","sequence":"additional","affiliation":[{"name":"Research Center in Industrial Technologies CRTI, P.O. Box 64 Cheraga, Algiers 16014, Algeria"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2020,3,3]]},"reference":[{"key":"ref_1","unstructured":"Ruppel, C.C., and Fjeldly, T.A. (2001). Selected Topics in Electronics and Systems: Volume 20, World Scientific."},{"key":"ref_2","unstructured":"Mason, W.P. (1972). Physical Acoustics: Principles and Methods, Academic Press."},{"key":"ref_3","unstructured":"Emanetoglu, N.W., Patounakis, G., Muthukumar, S., and Lu, Y. (2000, January 22\u201325). Analysis of Temperature Compensated SAW Modes in ZnO\/SiO2\/Si Multilayer Structures. Proceedings of the IEEE Ultrasonics, San Juan, Puerto Rico, USA."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"561","DOI":"10.1063\/1.332060","article-title":"Surface Acoustic Wave Resonators on A Zno-On-Si Layered Medium","volume":"54","author":"Martin","year":"1983","journal-title":"J. Appl. 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