{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T18:56:50Z","timestamp":1774378610810,"version":"3.50.1"},"reference-count":41,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2020,3,20]],"date-time":"2020-03-20T00:00:00Z","timestamp":1584662400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-arc oxidation (MAO) technology was designed to solve these problems by simultaneously using impedance and capacitance as the response signals, as well as by normalizing the output of the two signals. The experimental results showed that the average output of the micro-arc MgO ceramic film, with impedance as the response signal, could reach 150 in the low relative humidity(RH) range (11.3\u201367% RH), which was much higher than its sensitivity in the high humidity range (&lt; 1), and the film showed fast response (13 s) and recovery (61 s). Under high humidity conditions (67\u201397.3% RH), with capacitance as the response signal, the output of the micro-arc MgO was as high as 120. Therefore, the micro-arc MgO humidity sensor with impedance, and the sensor with capacitance as the response signal, demonstrated good stability in low humidity and in high humidity environments, respectively, indicating that the method of selecting appropriate response signals for different humidity environments can be applied to extend the humidity detection range of sensing material, and to improve the humidity detection capability of a sensor.<\/jats:p>","DOI":"10.3390\/s20061736","type":"journal-article","created":{"date-parts":[[2020,3,20]],"date-time":"2020-03-20T11:42:11Z","timestamp":1584704531000},"page":"1736","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers"],"prefix":"10.3390","volume":"20","author":[{"given":"Mingqiang","family":"Pan","sequence":"first","affiliation":[{"name":"School of Mechanical and Electric Engineering, Soochow University, Suzhou 215123, China"},{"name":"Jiangsu Provincial Key Labor Atory of Advanced Robotics, Soochow University, Suzhou 215123, China"},{"name":"Robotics and Microsystems Center, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jun","family":"Sheng","sequence":"additional","affiliation":[{"name":"School of Mechanical and Electric Engineering, Soochow University, Suzhou 215123, China"},{"name":"Jiangsu Provincial Key Labor Atory of Advanced Robotics, Soochow University, Suzhou 215123, China"},{"name":"Robotics and Microsystems Center, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jizhu","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Mechanical and Electric Engineering, Soochow University, Suzhou 215123, China"},{"name":"Jiangsu Provincial Key Labor Atory of Advanced Robotics, Soochow University, Suzhou 215123, China"},{"name":"Robotics and Microsystems Center, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zeming","family":"Shi","sequence":"additional","affiliation":[{"name":"School of Mechanical and Electric Engineering, Soochow University, Suzhou 215123, China"},{"name":"Jiangsu Provincial Key Labor Atory of Advanced Robotics, Soochow University, Suzhou 215123, China"},{"name":"Robotics and Microsystems Center, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lei","family":"Jiu","sequence":"additional","affiliation":[{"name":"School of Mechanical and Electric Engineering, Soochow University, Suzhou 215123, China"},{"name":"Jiangsu Provincial Key Labor Atory of Advanced Robotics, Soochow University, Suzhou 215123, China"},{"name":"Robotics and Microsystems Center, Soochow University, Suzhou 215123, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,3,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"211","DOI":"10.1016\/S0925-4005(03)00090-X","article-title":"Fast response humidity sensors for a medical microsystem","volume":"91","author":"Pellet","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"196","DOI":"10.1016\/S0924-4247(01)00788-9","article-title":"Recent achievements in miniaturised humidity sensors\u2014A review of transduction techniques","volume":"96","author":"Rittersma","year":"2002","journal-title":"Sens. Actuators A Phys."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Benabdellah, N., Bourhaleb, M., Nasri, M., Benazzi, N., and Dahbi, S. (2016, January 4\u20137). Design of temperature and humidity sensors for an electronic nose used in rotten food. Proceedings of the 2016 2nd International Conference on Electrical and Information Technologies (ICEIT), Piscataway, NJ, USA.","DOI":"10.1109\/EITech.2016.7519652"},{"key":"ref_4","unstructured":"Lennon, J.A., O\u2019Brien, D., and Akkari, F. (2000, January 16\u201317). Fibre optic humidity sensors for the mushroom industry and for the curing of meats. Proceedings of the Conference for Sensors, Measurement and Control, Tavistock, UK."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Dubey, C., and Kumar, B. (2018, January 2\u20134). Organic humidity sensors with different materials and its application in environment monitoring. Proceedings of the 2018 5th IEEE Uttar Pradesh Section International Conference on Electrical, Electronics and Computer Engineering (UPCON), Piscataway, NJ, USA.","DOI":"10.1109\/UPCON.2018.8597009"},{"key":"ref_6","first-page":"5000304","article-title":"Smartphone integrated polymer optical fiber humidity sensor: Towards a fully portable solution for healthcare","volume":"3","author":"Prado","year":"2019","journal-title":"IEEE Sens. Lett."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1016\/j.inoche.2018.09.014","article-title":"A 3D pillared-layer cadmium (II) metal-organic framework for chemiresistive humidity sensing with high performance","volume":"97","author":"Yin","year":"2018","journal-title":"Inorg. Chem. Commun."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"6198","DOI":"10.1016\/j.tsf.2009.04.010","article-title":"Humidity sensor structures with thin film porous alumina for on-chip integration","volume":"517","author":"Juhasz","year":"2009","journal-title":"Thin Solid Film."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"408","DOI":"10.1016\/j.snb.2019.03.034","article-title":"Improvement of humidity sensing properties of PVDF-TiO2 nanocomposite films using acetone etching","volume":"288","author":"Mallick","year":"2019","journal-title":"Sens. Actuators B-Chem."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"9166","DOI":"10.1109\/JSEN.2019.2926318","article-title":"Polypyrrole-Modified Tin Disulfide Nanoflower-Based Quartz Crystal Microbalance Sensor for Humidity Sensing","volume":"19","author":"Zhang","year":"2019","journal-title":"IEEE Sens. J."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Arunachalam, S., Izquierdo, R., and Nabki, F. (2019). Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes. Sensors, 19.","DOI":"10.3390\/s19030680"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"126744","DOI":"10.1016\/j.snb.2019.126744","article-title":"Morphology controllable Fe2O3 nanostructures derived from Fe-based metal-organic frameworks for enhanced humidity sensing performances","volume":"297","author":"Yu","year":"2019","journal-title":"Sens. Actuators B Chem."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"127270","DOI":"10.1016\/j.snb.2019.127270","article-title":"Design strategy for ultrafast-response humidity sensors based on gel polymer electrolytes and application for detecting respiration","volume":"304","author":"Dai","year":"2020","journal-title":"Sens. Actuators B Chem."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Wang, Q., Pan, Y.Z., Huang, S.S., Ren, S.T., Li, P., and Li, J.J. (2011). Resistive and capacitive response of nitrogen-doped TiO2 nanotubes film humidity sensor. Nanotechnology, 22.","DOI":"10.1088\/0957-4484\/22\/2\/025501"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"2382","DOI":"10.1007\/s10854-018-0511-1","article-title":"Organic nanostructure sensing layer developed by AAO template for the application in humidity sensors","volume":"30","author":"Andika","year":"2019","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_16","first-page":"1016","article-title":"Research progress of micro-arc oxidation surface treatment of magnesium alloy","volume":"33","author":"Lu","year":"2016","journal-title":"J. Biomed. Eng."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"7","DOI":"10.1016\/j.corsci.2014.11.001","article-title":"Advances in microarc oxidation coated AZ31 Mg alloys for biomedical applications","volume":"91","author":"Zhang","year":"2015","journal-title":"Corros. Sci."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"3468","DOI":"10.1007\/s11664-018-6185-x","article-title":"A Comparative Study of Chemically and Biologically Synthesized MgO Nanomaterial for Liquefied Petroleum Gas Detection","volume":"47","author":"Thirupathi","year":"2018","journal-title":"J. Electron. Mater."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"11679","DOI":"10.1007\/s10854-018-9266-y","article-title":"A smart LPG sensor based on chemo-bio synthesized MgO nanostructure","volume":"29","author":"Kaur","year":"2018","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"68","DOI":"10.1016\/j.inoche.2018.10.007","article-title":"Role of molybdenum trioxide in enhancing the humidity sensing performance of magnesium ferrite\/molybdenum trioxide composite","volume":"98","author":"Reddy","year":"2018","journal-title":"Inorg. Chem. Commun."},{"key":"ref_21","first-page":"63","article-title":"Design of the Sensor Signal Display and Switching System for Nano Measuring Machine","volume":"33","author":"Lu","year":"2012","journal-title":"Process Autom. Instrum."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"127234","DOI":"10.1016\/j.snb.2019.127234","article-title":"Flexible humidity sensing and portable applications based on MoSe2 nanoflowers\/copper tungstate nanoparticles","volume":"304","author":"Zhang","year":"2020","journal-title":"Sens. Actuators B Chem."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"3993","DOI":"10.1109\/JSEN.2019.2896208","article-title":"ZnO\/MoS2-Based Enhanced Humidity Sensor Prototype with Android App Interface for Mobile Platform","volume":"19","author":"Burman","year":"2019","journal-title":"IEEE Sens. J."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Aher, R., Bhorde, A., Nair, S., Borate, H., Pandharkar, S., Naik, D., Vairale, P., Karpe, S., Late, D., and Prasad, M. (2019). Solvothermal Growth of PbBi2Se4 Nano-Flowers: A Material for Humidity Sensor and Photodetector Applications. Phys. Status Solidi A Appl. Mater. Sci., 216.","DOI":"10.1002\/pssa.201900065"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"4834","DOI":"10.1021\/acs.langmuir.8b04259","article-title":"Flexible and Highly Sensitive Humidity Sensor Based on Cellulose Nanofibers and Carbon Nanotube Composite Film","volume":"35","author":"Zhu","year":"2019","journal-title":"Langmuir"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Liu, H., Wang, Q., Sheng, W.J., Wang, X.B., Zhang, K.D., Du, L., and Zhou, J. (2019). Humidity Sensors with Shielding Electrode Under Interdigitated Electrode. Sensors, 19.","DOI":"10.3390\/s19030659"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"256","DOI":"10.1016\/j.snb.2018.05.084","article-title":"Effect of interdigital electrode gap on the performance of SnO2-modified MoS2 capacitive humidity sensor","volume":"271","author":"Zhao","year":"2018","journal-title":"Sens. Actuators B Chem."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"186","DOI":"10.1016\/j.mssp.2018.09.019","article-title":"Effect of calcination temperature on the humidity sensitivity of TiO2\/graphene oxide nanocomposites","volume":"89","author":"Luo","year":"2019","journal-title":"Mater. Sci. Semicond. Process."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"482","DOI":"10.1016\/j.apsusc.2019.04.266","article-title":"Effects on structure, surface oxygen defects and humidity performance of Au modified ZnO via hydrothermal method","volume":"486","author":"Zhang","year":"2019","journal-title":"Appl. Surf. Sci."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"361","DOI":"10.1007\/s00339-019-2638-1","article-title":"Room temperature humidity sensing performance of polyaniline\u2013holmium oxide composite","volume":"125","author":"Manjunatha","year":"2019","journal-title":"Appl. Phys. A"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1016\/j.snb.2018.03.069","article-title":"Capacitive and resistive response of humidity sensors based on graphene decorated by PMMA and silver nanoparticles","volume":"267","author":"Rahim","year":"2018","journal-title":"Sens. Actuators B Chem."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"2994","DOI":"10.1016\/j.tsf.2008.11.071","article-title":"Accelerated resistive humidity sensing properties of silicon nanoporous pillar array","volume":"517","author":"Jiang","year":"2009","journal-title":"Thin Solid Film."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"443","DOI":"10.1016\/j.snb.2016.06.041","article-title":"Optimization of porous anodic alumina nanostructure for ultra high sensitive humidity sensor","volume":"237","author":"Sharma","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"180","DOI":"10.1016\/j.inoche.2018.11.024","article-title":"Copper ferrite-yttrium oxide (CFYO) nanocomposite as remarkable humidity sensor","volume":"99","author":"Reddy","year":"2019","journal-title":"Inorg. Chem. Commun."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"3349","DOI":"10.1007\/s00604-017-2348-3","article-title":"Magnesium oxide nanocubes deposited on an overhead projector sheet: Synthesis and resistivity-based hydrogen sensing capability","volume":"184","author":"Pradeep","year":"2017","journal-title":"Microchim. Acta"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"1083","DOI":"10.1007\/s12274-014-0471-6","article-title":"Piezotronic effect enhanced Schottky-contact ZnO micro\/nanowire humidity sensors","volume":"7","author":"Hu","year":"2014","journal-title":"Nano Res."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"274","DOI":"10.1016\/j.snb.2012.08.009","article-title":"Schottky diodes based on electrodeposited ZnO nanorod arrays for humidity sensing at room temperature","volume":"174","author":"Ochoteco","year":"2012","journal-title":"Sens. Actuators B Chem."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"3662","DOI":"10.1021\/j100856a051","article-title":"Electrical conductivity of silica gel in the presence of adsorbed water","volume":"72","author":"Anderson","year":"1968","journal-title":"J. Phys. Chem."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"384","DOI":"10.1016\/j.snb.2014.03.057","article-title":"Sensitivity evolution and enhancement mechanism of porous anodic aluminum oxide humidity sensor using magnetic field","volume":"199","author":"Chen","year":"2014","journal-title":"Sens. Actuators B Chem."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"91","DOI":"10.3390\/s20300091","article-title":"Room temperature ammonia and humidity sensing using highly ordered nanoporous alumina films","volume":"2","author":"Dickey","year":"2002","journal-title":"Sensors"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"10263","DOI":"10.1016\/j.ceramint.2014.02.116","article-title":"Humidity sensitive properties of amorphous (K,Na)NbO3 lead free thin films","volume":"40","author":"Zhen","year":"2014","journal-title":"Ceram. Int."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/6\/1736\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T09:10:06Z","timestamp":1760173806000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/6\/1736"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,3,20]]},"references-count":41,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2020,3]]}},"alternative-id":["s20061736"],"URL":"https:\/\/doi.org\/10.3390\/s20061736","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,3,20]]}}}