{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,21]],"date-time":"2026-02-21T02:54:14Z","timestamp":1771642454718,"version":"3.50.1"},"reference-count":20,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2020,5,3]],"date-time":"2020-05-03T00:00:00Z","timestamp":1588464000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>RF-MEMS, i.e., Micro-Electro-Mechanical Systems (MEMS) for Radio Frequency (RF) passive components, exhibit interesting characteristics for the upcoming 5G and Internet of Things (IoT) scenarios, in which reconfigurable broadband and frequency-agile devices, like high-order switching units, tunable filters, multi-state attenuators, and phase shifters will be necessary to enable mm-Wave services, small cells, and advanced beamforming. In particular, satellite communication systems providing high-speed Internet connectivity utilize the K and Ka bands, which offer larger bandwidth compared to lower frequencies. This paper focuses on two design concepts of multi-state phase shifter designed and manufactured in RF-MEMS technology. The networks feature 4 switchable stages (16 states) and are developed for the K and Ka bands. The proposed phase shifters are realized in a surface micromachining RF-MEMS technology and the experimentally measured parameters are compared with Finite Element Method (FEM) multi-physical electromechanical and RF simulations. The simulated phase shifts at both the operating bands fit well the measured value, despite the measured losses (S21) are larger than 5\u20137 dB if compared to simulations. However, such a non-ideality has a technological motivation that is explained in the paper and that will be fixed in the manufacturing of future devices.<\/jats:p>","DOI":"10.3390\/s20092612","type":"journal-article","created":{"date-parts":[[2020,5,4]],"date-time":"2020-05-04T14:00:43Z","timestamp":1588600843000},"page":"2612","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-6462-4814","authenticated-orcid":false,"given":"Jacopo","family":"Iannacci","sequence":"first","affiliation":[{"name":"Center for Materials and Microsystems (CMM), Fondazione Bruno Kessler (FBK), Via Sommarive, 18-38123 Trento, Italy"}]},{"given":"Giuseppe","family":"Resta","sequence":"additional","affiliation":[{"name":"Center for Materials and Microsystems (CMM), Fondazione Bruno Kessler (FBK), Via Sommarive, 18-38123 Trento, Italy"}]},{"given":"Alvise","family":"Bagolini","sequence":"additional","affiliation":[{"name":"Center for Materials and Microsystems (CMM), Fondazione Bruno Kessler (FBK), Via Sommarive, 18-38123 Trento, Italy"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6009-0103","authenticated-orcid":false,"given":"Flavio","family":"Giacomozzi","sequence":"additional","affiliation":[{"name":"Center for Materials and Microsystems (CMM), Fondazione Bruno Kessler (FBK), Via Sommarive, 18-38123 Trento, Italy"}]},{"given":"Elena","family":"Bochkova","sequence":"additional","affiliation":[{"name":"Bazovye Tekhnologii, LLC, 125124 Moscow, Russia"}]},{"given":"Evgeny","family":"Savin","sequence":"additional","affiliation":[{"name":"Bazovye Tekhnologii, LLC, 125124 Moscow, Russia"}]},{"given":"Roman","family":"Kirtaev","sequence":"additional","affiliation":[{"name":"Bazovye Tekhnologii, LLC, 125124 Moscow, Russia"}]},{"given":"Alexey","family":"Tsarkov","sequence":"additional","affiliation":[{"name":"Bazovye Tekhnologii, LLC, 125124 Moscow, Russia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9477-9243","authenticated-orcid":false,"given":"Massimo","family":"Donelli","sequence":"additional","affiliation":[{"name":"Department of Information Engineering and Computer Science, University of Trento, 38123 Trento, Italy"}]}],"member":"1968","published-online":{"date-parts":[[2020,5,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1868","DOI":"10.1109\/22.734501","article-title":"RF-MEMS switches for reconfigurable integrated circuits","volume":"46","author":"Brown","year":"1998","journal-title":"IEEE Trans. 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