{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,25]],"date-time":"2026-04-25T07:38:16Z","timestamp":1777102696241,"version":"3.51.4"},"reference-count":37,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2020,5,9]],"date-time":"2020-05-09T00:00:00Z","timestamp":1588982400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100003141","name":"Consejo Nacional de Ciencia y Tecnolog\u00eda","doi-asserted-by":"publisher","award":["PUE-2018-03-02-84557"],"award-info":[{"award-number":["PUE-2018-03-02-84557"]}],"id":[{"id":"10.13039\/501100003141","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This work reports the development of arrays of infrared sensors (microbolometers) using a hydrogenated polymorphous silicon\u2013germanium alloy (pm-SixGe1-x:H). Basically, polymorphous semiconductors consist of an amorphous semiconductor matrix with embedded nanocrystals of about 2\u20133 nm. The pm-SixGe1-x:H alloy studied has a high temperature coefficient of resistance (TCR) of 4.08%\/K and conductivity of 1.5 \u00d7 10\u22125 S\u2219cm\u22121. Deposition of thermosensing film was made by plasma-enhanced chemical vapor deposition (PECVD) at 200 \u00b0C, while the area of the devices is 50 \u00d7 50 \u03bcm2 with a fill factor of 81%. Finally, an array of 19 \u00d7 20 microbolometers was packaged for electrical characterization. Voltage responsivity values were obtained in the range of 4 \u00d7 104 V\/W and detectivity around 2 \u00d7 107 cm\u2219Hz1\/2\/W with a polarization current of 70 \u03bcA at a chopper frequency of 30 Hz. A minimum value of 2 \u00d7 10\u221210 W\/Hz1\/2 noise equivalent power was obtained at room temperature. In addition, it was found that all the tested devices responded to incident infrared radiation, proving that the structure and mechanical stability are excellent.<\/jats:p>","DOI":"10.3390\/s20092716","type":"journal-article","created":{"date-parts":[[2020,5,11]],"date-time":"2020-05-11T12:26:30Z","timestamp":1589199990000},"page":"2716","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":20,"title":["Fabrication of Microbolometer Arrays Based on Polymorphous Silicon\u2013Germanium"],"prefix":"10.3390","volume":"20","author":[{"given":"Ricardo","family":"Jimenez","sequence":"first","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mario","family":"Moreno","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alfonso","family":"Torres","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alfredo","family":"Morales","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Arturo","family":"Ponce","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"},{"name":"Department of Physics and Astronomy, University of Texas at San Antonio, San Antonio, TX 78249, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Daniel","family":"Ferrusca","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2785-5060","authenticated-orcid":false,"given":"Jose","family":"Rangel-Magdaleno","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3603-4056","authenticated-orcid":false,"given":"Jorge","family":"Castro-Ramos","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Julio","family":"Hernandez-Perez","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Eduardo","family":"Cano","sequence":"additional","affiliation":[{"name":"Electronics Group, National Institute of Astrophysics, Optics and Electronics, Puebla 72840, Mexico"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,5,9]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"142","DOI":"10.1016\/j.sna.2013.03.008","article-title":"A plastic-based bolometer array sensor using carbon nanotubes for low-cost infrared imaging devices","volume":"195","author":"Narita","year":"2013","journal-title":"Sens. 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