{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,19]],"date-time":"2025-12-19T09:44:29Z","timestamp":1766137469155,"version":"build-2065373602"},"reference-count":24,"publisher":"MDPI AG","issue":"13","license":[{"start":{"date-parts":[[2020,7,2]],"date-time":"2020-07-02T00:00:00Z","timestamp":1593648000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from \u00b12.12\u00b0 to \u00b1360\u00b0, and the resolution of the sensor was 0.4\u00b0. This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors.<\/jats:p>","DOI":"10.3390\/s20133711","type":"journal-article","created":{"date-parts":[[2020,7,3]],"date-time":"2020-07-03T06:51:20Z","timestamp":1593759080000},"page":"3711","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity"],"prefix":"10.3390","volume":"20","author":[{"given":"HanYang","family":"Xu","sequence":"first","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yulong","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kai","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kyle","family":"Jiang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, University of Birmingham, Birmingham B15 2TT, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,7,2]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"7440","DOI":"10.1021\/acsnano.7b03818","article-title":"Self-powered acceleration sensor based on liquid metal triboelectric nanogenerator for vibration monitoring","volume":"11","author":"Zhang","year":"2017","journal-title":"ACS Nano"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"151","DOI":"10.1016\/j.sna.2015.09.044","article-title":"Arrayed-type touch sensor using micro liquid metal droplets with large dynamic range and high sensitivity","volume":"235","author":"Won","year":"2015","journal-title":"Sens. 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