{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,17]],"date-time":"2026-07-17T15:14:27Z","timestamp":1784301267772,"version":"3.55.0"},"reference-count":132,"publisher":"MDPI AG","issue":"14","license":[{"start":{"date-parts":[[2020,7,21]],"date-time":"2020-07-21T00:00:00Z","timestamp":1595289600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100013287","name":"Science Challenge Project","doi-asserted-by":"publisher","award":["TZ2016006-0502-02"],"award-info":[{"award-number":["TZ2016006-0502-02"]}],"id":[{"id":"10.13039\/501100013287","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003819","name":"Natural Science Foundation of Hubei Province","doi-asserted-by":"publisher","award":["2019CFB108"],"award-info":[{"award-number":["2019CFB108"]}],"id":[{"id":"10.13039\/501100003819","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 \u00b5g\/\u221aHz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 \u00b5g\/\u221aHz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.<\/jats:p>","DOI":"10.3390\/s20144054","type":"journal-article","created":{"date-parts":[[2020,7,22]],"date-time":"2020-07-22T03:23:16Z","timestamp":1595388196000},"page":"4054","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":96,"title":["Micromachined Accelerometers with Sub-\u00b5g\/\u221aHz Noise Floor: A Review"],"prefix":"10.3390","volume":"20","author":[{"given":"Chen","family":"Wang","sequence":"first","affiliation":[{"name":"College of Optical Science and Engineering, Zhejiang University,  Hangzhou 310027, China"},{"name":"Department of Electrical Engineering and Computer Science, University of Liege, 4000 Liege, Belgium"},{"name":"ESAT-MICAS, University of Leuven, 3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7961-6232","authenticated-orcid":false,"given":"Fang","family":"Chen","sequence":"additional","affiliation":[{"name":"SIMIT, Chinese Academy of Sciences, Shanghai 200050, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuan","family":"Wang","sequence":"additional","affiliation":[{"name":"PGMF and School of Physics, Huazhong University of Science and Technology,  Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sina","family":"Sadeghpour","sequence":"additional","affiliation":[{"name":"ESAT-MICAS, University of Leuven, 3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chenxi","family":"Wang","sequence":"additional","affiliation":[{"name":"ESAT-MICAS, University of Leuven, 3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6368-4142","authenticated-orcid":false,"given":"Mathieu","family":"Baijot","sequence":"additional","affiliation":[{"name":"ESAT-MICAS, University of Leuven, 3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rui","family":"Esteves","sequence":"additional","affiliation":[{"name":"ESAT-MICAS, University of Leuven, 3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chun","family":"Zhao","sequence":"additional","affiliation":[{"name":"PGMF and School of Physics, Huazhong University of Science and Technology,  Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jian","family":"Bai","sequence":"additional","affiliation":[{"name":"College of Optical Science and Engineering, Zhejiang University,  Hangzhou 310027, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0757-2362","authenticated-orcid":false,"given":"Huafeng","family":"Liu","sequence":"additional","affiliation":[{"name":"PGMF and School of Physics, Huazhong University of Science and Technology,  Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7213-1072","authenticated-orcid":false,"given":"Michael","family":"Kraft","sequence":"additional","affiliation":[{"name":"ESAT-MICAS, University of Leuven, 3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2020,7,21]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1085","DOI":"10.1016\/0094-5765(77)90008-X","article-title":"In orbit performance of the CACTUS accelerometer","volume":"4","author":"Beaussier","year":"1977","journal-title":"Acta Astronaut."},{"key":"ref_2","unstructured":"Toubul, P. 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