{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,5]],"date-time":"2025-11-05T21:06:08Z","timestamp":1762376768031,"version":"build-2065373602"},"reference-count":27,"publisher":"MDPI AG","issue":"15","license":[{"start":{"date-parts":[[2020,7,27]],"date-time":"2020-07-27T00:00:00Z","timestamp":1595808000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"the NSFC Joint Key Fund Project","award":["Grant Nos. U1837209"],"award-info":[{"award-number":["Grant Nos. U1837209"]}]},{"name":"project of knowledge National Key Research and Development Project","award":["Grant Nos. 2018YFB2002500"],"award-info":[{"award-number":["Grant Nos. 2018YFB2002500"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A surface acoustic wave (SAW) device with an aluminum nitride (AlN) composite structure of Al2O3\/IDTs\/AlN\/Metal\/Si was proposed for sensing at extreme high-temperature in this work. Optimization allowing determination of optimal design parameters for SAW devices was conducted using the typical coupling of modes (COM) model. The SAW propagation characteristics in the layered structure were investigated theoretically by employing the finite element method (FEM). Multiple acoustic-wave modes that occurred in the AlN composite structure was analyzed, and the corresponding suppression of spurious mode was proposed. The COM simulation parameters corresponding to the effective acoustic-wave mode were extracted, and the optimized parameters of the one\u2013port SAW resonator with a high-quality factor were determined.<\/jats:p>","DOI":"10.3390\/s20154160","type":"journal-article","created":{"date-parts":[[2020,7,27]],"date-time":"2020-07-27T04:39:50Z","timestamp":1595824790000},"page":"4160","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature"],"prefix":"10.3390","volume":"20","author":[{"given":"Shuyao","family":"Fan","sequence":"first","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wen","family":"Wang","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xueling","family":"Li","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yana","family":"Jia","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuan","family":"Sun","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mengwei","family":"Liu","sequence":"additional","affiliation":[{"name":"Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,7,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"999","DOI":"10.1109\/TUFFC.2012.2285","article-title":"Investigations on AlN\/sapphire piezoelectric bilayer structure for high-temperature SAW applications","volume":"59","author":"Aubert","year":"2012","journal-title":"Ferroelectr. 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