{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:07:49Z","timestamp":1760238469584,"version":"build-2065373602"},"reference-count":33,"publisher":"MDPI AG","issue":"16","license":[{"start":{"date-parts":[[2020,8,11]],"date-time":"2020-08-11T00:00:00Z","timestamp":1597104000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["No. 61571126 and 61104217"],"award-info":[{"award-number":["No. 61571126 and 61104217"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer and a glass substrate, is described, the theoretical simplified model is established and the mechanical sensitivity to air flow is deducted. Then, the structure simulations based on Ansys software are implemented to preliminarily verify the feasibility of the proposed sensor conception and optimize the structure parameters simultaneously. Subsequently, a closed-loop control scheme based on digital phase-locked loop and an amplitude demodulation algorithm of oscillatory flow velocity based on the least mean square method are proposed to transform and extract the air flow signal, and then verify it by circuit simulations based on SIMULINK. Finally, the fabricated prototype is illustrated and comprehensively tested. The tested prototype possesses an x-axis scale factor of 1.56 Hz\/(m\/s)2 and a y-axis scale factor of 1.81 Hz\/(m\/s)2 for the steady air flow and an x-axis detection threshold of 43.27 mm\/s and a y-axis detection threshold of 41.85 mm\/s for the oscillatory air flow.<\/jats:p>","DOI":"10.3390\/s20164483","type":"journal-article","created":{"date-parts":[[2020,8,11]],"date-time":"2020-08-11T09:28:57Z","timestamp":1597138137000},"page":"4483","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing"],"prefix":"10.3390","volume":"20","author":[{"given":"Zhuoyue","family":"Liang","sequence":"first","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Xin","family":"Guo","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Bo","family":"Yang","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]},{"given":"Ting","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"},{"name":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China"}]}],"member":"1968","published-online":{"date-parts":[[2020,8,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"113001","DOI":"10.1088\/0964-1726\/21\/11\/113001","article-title":"Hair flow sensors: From bio-inspiration to bio-mimicking\u2014A review","volume":"23","author":"Tao","year":"2012","journal-title":"Smart Mater. 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