{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,14]],"date-time":"2026-03-14T18:34:22Z","timestamp":1773513262190,"version":"3.50.1"},"reference-count":32,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2020,8,21]],"date-time":"2020-08-21T00:00:00Z","timestamp":1597968000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004663","name":"Ministry of Science and Technology, Taiwan","doi-asserted-by":"publisher","award":["108-2221-E-005 -065 -MY2"],"award-info":[{"award-number":["108-2221-E-005 -065 -MY2"]}],"id":[{"id":"10.13039\/501100004663","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect transistors (MAGFETs) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The magnetic micro sensor is a three-axis sensing type. The structure of the magnetic microsensor is composed of an x\/y-MAGFET and a z-MAGFET. The x\/y-MAGFET is employed to sense the magnetic field (MF) in the x- and y-axis, and the z-MAGFET is used to detect the MF in the z-axis. To increase the sensitivity of the magnetic microsensor, gates are introduced into the two MAGFETs. The sensing current of the MAGFET enhances when a bias voltage is applied to the gates. The finite element method software Sentaurus TCAD was used to analyze the MMS\u2019s performance. Experiments show that the MMS has a sensitivity of 182 mV\/T in the x-axis MF and a sensitivity of 180 mV\/T in the y-axis MF. The sensitivity of the MMS is 27.8 mV\/T in the z-axis MF.<\/jats:p>","DOI":"10.3390\/s20174731","type":"journal-article","created":{"date-parts":[[2020,8,21]],"date-time":"2020-08-21T09:21:51Z","timestamp":1598001711000},"page":"4731","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process"],"prefix":"10.3390","volume":"20","author":[{"given":"Wei-Ren","family":"Chen","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}]},{"given":"Yao-Chuan","family":"Tsai","sequence":"additional","affiliation":[{"name":"Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan"}]},{"given":"Po-Jen","family":"Shih","sequence":"additional","affiliation":[{"name":"Department of Biomedical Engineering, National Taiwan University, Taipei 106, Taiwan"}]},{"given":"Cheng-Chih","family":"Hsu","sequence":"additional","affiliation":[{"name":"Department of Electro-Optical Engineering, National United University, Miaoli 360, Taiwan"}]},{"given":"Ching-Liang","family":"Dai","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2020,8,21]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"8285240","DOI":"10.1155\/2019\/8285240","article-title":"Application topics of amorphous wire CMOS IC magneto-impedance micromagnetic sensors for I-o-T smart society","volume":"2019","author":"Mohri","year":"2019","journal-title":"J. Sens."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Oh, Y., Jung, Y.J., Choi, S.H., and Kim, D.W. (2018). Design and evaluation of a MEMS magnetic field sensor-based respiratory monitoring and training System for radiotherapy. Sensors, 9.","DOI":"10.3390\/s18092742"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"3065","DOI":"10.1109\/JSSC.2018.2865480","article-title":"Design and implementation of reference-free drift-cancelling CMOS magnetic sensors for biosensing applications","volume":"53","author":"Sideris","year":"2018","journal-title":"IEEE J. Solid State Circuits"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Li, X.Y., Hu, J.P., Chen, W.P., Yin, L., and Liu, X.W. (2018). A novel high-precision digital tunneling magnetic resistance-type sensor for the nanosatellites\u2019 space application. Micromachines, 9.","DOI":"10.3390\/mi9030121"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Vetrella, A.R., Fasano, G., Accardo, D., and Moccia, A. (2016). Differential GNSS and vision-based tracking to improve navigation performance in cooperative multi-UAV systems. Sensors, 16.","DOI":"10.3390\/s16122164"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Tavassolizadeh, A., Rott, K., Meier, T., Quandt, E., Holscher, H., Reiss, G., and Meyners, D. (2016). Tunnel magnetoresistance sensors with magnetostrictive electrodes: Strain sensors. Sensors, 16.","DOI":"10.3390\/s16111902"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Gooneratne, C.P., Kodzius, R., Li, F.Q., Foulds, I.G., and Kosel, J. (2016). On-chip magnetic bead manipulation and detection using a magnetoresistive sensor-based micro-chip: Design considerations and experimental characterization. Sensors, 16.","DOI":"10.3390\/s16091369"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Zhang, H., Liao, L., Zhao, R.Q., Zhou, J.T., Yang, M., and Xia, R.C. (2016). The non-destructive test of steel corrosion in reinforced concrete bridges using a micro-magnetic sensor. Sensors, 16.","DOI":"10.3390\/s16091439"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"28665","DOI":"10.3390\/s151128665","article-title":"Recent developments of magnetoresistive sensors for industrial applications","volume":"15","author":"Jogschies","year":"2015","journal-title":"Sensors"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"12735","DOI":"10.3390\/s140712735","article-title":"An acetone microsensor with a ring oscillator circuit fabricated using the commercial 0.18 \u03bcm CMOS process","volume":"14","author":"Yang","year":"2014","journal-title":"Sensors"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1753","DOI":"10.3390\/s100301753","article-title":"Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip","volume":"10","author":"Dai","year":"2010","journal-title":"Sensors"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"20360","DOI":"10.3390\/s141120360","article-title":"Sol-Gel zinc oxide humidity sensors integrated with a ring oscillator circuit on-a-chip","volume":"14","author":"Yang","year":"2014","journal-title":"Sensors"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"744","DOI":"10.1016\/j.mejo.2007.12.015","article-title":"Micro FET pressure sensor manufactured using CMOS-MEMS technique","volume":"39","author":"Dai","year":"2008","journal-title":"Microelctron. J."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1645","DOI":"10.3390\/mi6111447","article-title":"Fabrication of micromachined capacitive switch using the CMOS-MEMS technology","volume":"6","author":"Lin","year":"2015","journal-title":"Micromachines"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"444","DOI":"10.1007\/s00542-004-0486-0","article-title":"A circular micromirror array fabricated by a maskless post-CMOS process","volume":"11","author":"Cheng","year":"2005","journal-title":"Microsyst. Technol."},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Li, X.L., Zhao, X.F., and Wen, D.Z. (2019). Characteristics of a magnetic field sensor with a concentrating-conducting magnetic flux structure. Sensors, 19.","DOI":"10.3390\/s19204498"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"20180854","DOI":"10.1587\/elex.16.20180854","article-title":"4-Contact structure of vertical-type CMOS Hall device for 3-D magnetic sensor","volume":"16","author":"Oh","year":"2019","journal-title":"IEICE Electron. Expr."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Lin, Y.N., and Dai, C.L. (2018). Micro magnetic field sensors manufactured using a standard 0.18-m CMOS process. Micromachines, 9.","DOI":"10.3390\/mi9080393"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"3454","DOI":"10.1109\/TED.2018.2849867","article-title":"Analysis, design, and optimization of the CHOPFET magnetic field transducer","volume":"65","author":"Osberger","year":"2018","journal-title":"IEEE Trans. Electron Dev."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Tseng, J.Z., Shih, P.J., Hsu, C.C., and Dai, C.L. (2017). A three-axis magnetic field microsensor fabricated utilizing a CMOS process. Appl. Sci., 7.","DOI":"10.3390\/app7121289"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"13815","DOI":"10.3390\/s140813815","article-title":"High-Sensitivity low-noise miniature fluxgate magnetometers using a flip chip conceptual design","volume":"14","author":"Lu","year":"2014","journal-title":"Sensors"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"565","DOI":"10.1016\/j.mejo.2014.03.016","article-title":"A merged magnetotransistor for 3-axis magnetic field measurement based on carrier recombination-deflection effect","volume":"45","author":"Leepattarapongpan","year":"2014","journal-title":"Microelectron. J."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"2253","DOI":"10.1109\/JSEN.2013.2246564","article-title":"2-D differential folded vertical Hall device fabricated on a p-type substrate using CMOS technology","volume":"13","author":"Sung","year":"2013","journal-title":"IEEE Sens. J."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"04CF05","DOI":"10.7567\/JJAP.56.04CF05","article-title":"Suppression method of low-frequency noise for two-dimensional integrated magnetic sensor","volume":"56","author":"Kimura","year":"2017","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"198","DOI":"10.1109\/JSSC.2016.2619711","article-title":"Multipath wide-bandwidth CMOS magnetic sensors","volume":"52","author":"Jiang","year":"2017","journal-title":"IEEE J. Solid State Circuits"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"345","DOI":"10.1002\/tee.22091","article-title":"Size-Reduced two-dimensional integrated magnetic sensor fabricated in 0.18-\u03bc CMOS process","volume":"10","author":"Kimura","year":"2015","journal-title":"IEEJ Trans. Electr. Electron. Eng."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"2359","DOI":"10.3390\/s130202359","article-title":"Energy harvesting thermoelectric generators manufactured using the complementary metal oxide semiconductor process","volume":"13","author":"Yang","year":"2013","journal-title":"Sensors"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"2366","DOI":"10.1088\/0960-1317\/15\/12\/019","article-title":"A maskless post-CMOS bulk micromachining process and its application","volume":"15","author":"Dai","year":"2005","journal-title":"J. Micromech. Microeng."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"1623","DOI":"10.3390\/s150101623","article-title":"Ethanol microsensors with a readout circuit manufactured using the CMOS-MEMS technique","volume":"15","author":"Yang","year":"2015","journal-title":"Sensors"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"2162","DOI":"10.3390\/s120202162","article-title":"A highly sensitive CMOS digital Hall sensor for low magnetic field applications","volume":"12","author":"Xu","year":"2012","journal-title":"Sensors"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"118501","DOI":"10.1088\/0256-307X\/29\/11\/118501","article-title":"High sensitivity magnetic field sensors based on nano-polysilicon thin-film transistors","volume":"29","author":"Zhao","year":"2012","journal-title":"Chinese Phys. Lett."},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Yang, X., Zhao, X., Bai, Y., Lv, M., and Wen, D. (2017). Two-dimensional magnetic field sensor based on silicon magnetic sensitive transistors with differential structure. Micromachines, 8.","DOI":"10.3390\/mi8040095"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/17\/4731\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T10:04:54Z","timestamp":1760177094000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/17\/4731"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,8,21]]},"references-count":32,"journal-issue":{"issue":"17","published-online":{"date-parts":[[2020,9]]}},"alternative-id":["s20174731"],"URL":"https:\/\/doi.org\/10.3390\/s20174731","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,8,21]]}}}