{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:19:28Z","timestamp":1760239168163,"version":"build-2065373602"},"reference-count":32,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2020,10,2]],"date-time":"2020-10-02T00:00:00Z","timestamp":1601596800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51805118"],"award-info":[{"award-number":["51805118"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100010009","name":"Heilongjiang Provincial Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["LBH-Z18080"],"award-info":[{"award-number":["LBH-Z18080"]}],"id":[{"id":"10.13039\/501100010009","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002858","name":"China Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["2018M641821"],"award-info":[{"award-number":["2018M641821"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>An external modulation laser module assembly (EMLMA) is proposed to suppress nonlinear errors in an interferometry system and improve its measurement performance. The EMLMA employs both phase modulation with radio frequency signal and a specific modulation amplitude switching mode, enabling the suppression of noise introduced by spurious reflections. The amplitude modulation reduces the influence of stray and background light by transforming the signal of interest to a high-frequency bandwidth. Experimental results show that the measurement error and stability of the interferometry system are significantly improved using the proposed light source module. After modulation, the spurious reflection-induced offset is decreased, and the measurement resolution improves from 7 to 2 nm. The EMLMA can replace the light source of any interferometric measurement system without altering the optical measurement structure. The proposed method reduces the influence of nonlinear errors in homodyne interferometry and provides a basis for further improvement of the interferometry performance.<\/jats:p>","DOI":"10.3390\/s20195652","type":"journal-article","created":{"date-parts":[[2020,10,3]],"date-time":"2020-10-03T07:22:16Z","timestamp":1601709736000},"page":"5652","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["External Modulation Laser Module Assembly for Improving Measurement Performance of Homodyne Interferometry"],"prefix":"10.3390","volume":"20","author":[{"given":"Tao","family":"Zhang","sequence":"first","affiliation":[{"name":"Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Space Environment Simulation Research Infrastructure, Harbin Institute of Technology, Harbin 150001, China"}]},{"given":"Tao","family":"Sun","sequence":"additional","affiliation":[{"name":"Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China"}]},{"given":"Jiean","family":"Li","sequence":"additional","affiliation":[{"name":"Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}]},{"given":"Xingyu","family":"Zhao","sequence":"additional","affiliation":[{"name":"Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}]},{"given":"Jiwen","family":"Cui","sequence":"additional","affiliation":[{"name":"Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China"}]}],"member":"1968","published-online":{"date-parts":[[2020,10,2]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"21042","DOI":"10.1364\/OE.17.021042","article-title":"High resolution interferometer with multiple-pass optical configuration","volume":"17","author":"Ahn","year":"2009","journal-title":"Opt. Express"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"187","DOI":"10.2478\/s11600-006-0015-x","article-title":"Application of laser strainmenters to the study of earthquake physics","volume":"54","author":"Dolgikh","year":"2006","journal-title":"Acta Geophys."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"325","DOI":"10.1126\/science.256.5055.325","article-title":"LIGO: The laser interferometer gravitational-wave observatory","volume":"256","author":"Abramovici","year":"1992","journal-title":"Science"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"907","DOI":"10.1088\/0957-0233\/4\/9\/001","article-title":"Recent advances in displacement measuring interferometry","volume":"4","author":"Bobroff","year":"1993","journal-title":"Meas. Sci. Technol."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"054008","DOI":"10.1088\/0957-0233\/23\/5\/054008","article-title":"Picometre and nanoradian heterodyne interferometry and its application in dilatometry and surface metrology","volume":"23","author":"Schuldt","year":"2012","journal-title":"Meas. Sci. Technol."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1016\/S0141-6359(98)00023-3","article-title":"Problems regarding linearity of data of a laser interferometer with a single-frequency laser","volume":"23","author":"Petru","year":"1999","journal-title":"Precis. Eng."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1941","DOI":"10.1016\/j.measurement.2012.04.011","article-title":"A novel approach for realization of primary vibration calibration standard by homodyne laser interferometer in frequency range of 0.1 Hz to 20 kHz","volume":"45","author":"Garg","year":"2012","journal-title":"Measurement"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"084009","DOI":"10.1088\/0957-0233\/20\/8\/084009","article-title":"Common path two-wavelength homodyne counting interferometer development","volume":"20","author":"Balling","year":"2009","journal-title":"Meas. Sci. Technol."},{"key":"ref_9","unstructured":"de Groot, P. (1997). Homodyne Interferometric Receiver and Calibration Method Having Improved Accuracy and Functionality. (5,663,793 A), U.S. Patent."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"064101","DOI":"10.1117\/1.OE.53.6.064101","article-title":"Polarization model for total internal reflection-based retroreflectors","volume":"53","author":"Zhu","year":"2014","journal-title":"Opt. Eng."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"71","DOI":"10.1117\/12.504939","article-title":"Quadrature phase-shift interferometer (QPSI) decoding algorithms and error analysis","volume":"Volume 5188","author":"Wang","year":"2003","journal-title":"Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1734","DOI":"10.1088\/0957-0233\/12\/10\/318","article-title":"The dynamic compensation of nonlinearity in a homodyne laser interferometer","volume":"12","author":"Eom","year":"2001","journal-title":"Meas. Sci. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"23299","DOI":"10.1364\/OE.17.023299","article-title":"A passive method to compensate nonlinearity in a homodyne interferometer","volume":"17","author":"Ahn","year":"2009","journal-title":"Opt. Express"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"16322","DOI":"10.1364\/OE.17.016322","article-title":"Quadrature phase-shift error analysis using a homodyne laser interferometer","volume":"17","year":"2009","journal-title":"Opt. Express"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"3090","DOI":"10.3390\/s150203090","article-title":"Compensation for the variable cyclic error in homodyne laser interferometers","volume":"15","author":"Hu","year":"2015","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"23505","DOI":"10.1364\/OE.24.023505","article-title":"Realization of a robust homodyne quadrature laser interferometer by performing wave plate yawing to realize ultra-low error sensitivity","volume":"24","author":"Cui","year":"2016","journal-title":"Opt. Express"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"8399","DOI":"10.1364\/OE.23.008399","article-title":"DC-offset-free homodyne interferometer and its nonlinearity compensation","volume":"23","author":"Hu","year":"2015","journal-title":"Opt. Express"},{"key":"ref_18","first-page":"7781","article-title":"Spectrally Controlled Interferometry","volume":"56","author":"Salsbury","year":"2017","journal-title":"J. Jpn. Soc. Precis. Eng."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"4904","DOI":"10.1364\/AO.32.004904","article-title":"Testing an optical window of a small wedge angle: Effect of multiple reflections","volume":"32","author":"Ai","year":"1993","journal-title":"Appl. Opt."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"1433","DOI":"10.1364\/AO.36.001433","article-title":"White-light Fizeau interferometer","volume":"36","author":"Schwider","year":"1997","journal-title":"Appl. Opt."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1907","DOI":"10.1364\/AO.11.001907","article-title":"White-light interferometric thickness gauge","volume":"11","author":"Flournoy","year":"1972","journal-title":"Appl. Opt."},{"key":"ref_22","first-page":"62920F","article-title":"Low-coherence vibration insensitive Fizeau interferometer","volume":"Volume 6292","author":"Kimbrough","year":"2006","journal-title":"Interferometry XIII: Techniques and Analysis"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"617","DOI":"10.1088\/1464-4258\/8\/8\/001","article-title":"Methods for removal of spurious reflection effect on phase-shifting interferometry","volume":"8","author":"Zhong","year":"2006","journal-title":"J. Opt. A Pure Appl. Opt."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"3039","DOI":"10.1364\/AO.27.003039","article-title":"Effect of spurious reflection on phase shift interferometry","volume":"27","author":"Ai","year":"1988","journal-title":"Appl. Opt."},{"key":"ref_25","first-page":"193","article-title":"Double-source interferometry for reducing spurious noise fringes","volume":"Volume 5531","author":"Liu","year":"2004","journal-title":"Interferometry XII: Techniques and Analysis"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"3550","DOI":"10.1364\/OL.35.003550","article-title":"Direct demodulation of closed-fringe interferograms based on active contours","volume":"35","author":"Vargas","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"8433","DOI":"10.1364\/AO.51.008433","article-title":"Separation of complex fringe patterns using two-dimensional continuous wavelet transform","volume":"51","author":"Pokorski","year":"2012","journal-title":"Appl. Opt."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"100","DOI":"10.1109\/TCE.2004.1277847","article-title":"Fundamental analysis for visible-light communication system using LED lights","volume":"50","author":"Komine","year":"2004","journal-title":"IEEE Trans. Consum. Electron."},{"key":"ref_29","first-page":"168","article-title":"Principles of modulation and channel coding for digital broadcasting for mobile receivers","volume":"224","author":"Lassalle","year":"1987","journal-title":"EBU Tech. Rev."},{"key":"ref_30","unstructured":"Galzerano, G., Bava, E., Ottoboni, R., and Svelto, C. (2003, January 20\u201322). Lock-in Amplifier up to 530 MHz with Phase and Amplitude Demodulation. Proceedings of the 20th IEEE Instrumentation and Measurement Technology Conference, Vail, CO, USA."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"3697","DOI":"10.1063\/1.1145423","article-title":"High-Performance Modular Digital Lock-In Amplifier","volume":"66","author":"Barone","year":"1995","journal-title":"Rev. Sci. Instrum."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"7308","DOI":"10.1364\/AO.54.007308","article-title":"Reducing coherent noise in interference systems using the phase modulation technique","volume":"54","author":"Cui","year":"2015","journal-title":"Appl. Opt."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/19\/5652\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T10:16:05Z","timestamp":1760177765000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/20\/19\/5652"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,10,2]]},"references-count":32,"journal-issue":{"issue":"19","published-online":{"date-parts":[[2020,10]]}},"alternative-id":["s20195652"],"URL":"https:\/\/doi.org\/10.3390\/s20195652","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2020,10,2]]}}}