{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:20:26Z","timestamp":1760239226130,"version":"build-2065373602"},"reference-count":32,"publisher":"MDPI AG","issue":"20","license":[{"start":{"date-parts":[[2020,10,19]],"date-time":"2020-10-19T00:00:00Z","timestamp":1603065600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100014440","name":"Ministerio de Ciencia, Innovaci\u00f3n y Universidades","doi-asserted-by":"publisher","award":["RTI2018-099766-B-I00"],"award-info":[{"award-number":["RTI2018-099766-B-I00"]}],"id":[{"id":"10.13039\/100014440","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004895","name":"European Social Fund","doi-asserted-by":"publisher","award":["0000"],"award-info":[{"award-number":["0000"]}],"id":[{"id":"10.13039\/501100004895","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed as a replacement for magnetometers currently used in consumer electronics market. Being MEMS devices, they can be manufactured in the same die as accelerometers and gyroscopes, greatly reducing current solutions volume and costs. However, they still present low sensitivities and large offsets that hinder their performance. In this article, a 2-axis out-of-plane, lateral field sensing, CMOS-MEMS magnetometer designed using the Back-End-Of-Line (BEOL) metal and oxide layers of a standard CMOS (Complementary Metal\u2013Oxide\u2013Semiconductor) process is proposed. As a result, its integration in the same die area, side-by-side, not only with other MEMS devices, but with the readout electronics is possible. A shielding structure is proposed that cancels out the offset frequently reported in this kind of sensors. Full-wafer device characterization has been performed, which provides valuable information on device yield and performance. The proposed device has a minimum yield of 85.7% with a good uniformity of the resonance frequency fr\u00af=56.8 kHz, \u03c3fr=5.1 kHz and quality factor Q\u00af=7.3, \u03c3Q=1.6 at ambient pressure. Device sensitivity to magnetic field is 37.6fA\u00b7\u03bcT\u22121 at P=1130 Pa when driven with I=1mApp.<\/jats:p>","DOI":"10.3390\/s20205899","type":"journal-article","created":{"date-parts":[[2020,10,19]],"date-time":"2020-10-19T09:36:28Z","timestamp":1603100188000},"page":"5899","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1101-6804","authenticated-orcid":false,"given":"Josep Maria","family":"S\u00e1nchez-Chiva","sequence":"first","affiliation":[{"name":"Electronic Engineering Department, Universitat Polit\u00e8cnica de Catalunya, Jordi Girona 1\u20133, 08034 Barcelona, Spain"},{"name":"Laboratoire de Recherche en Informatique (LIP6), Sorbonne Universit\u00e9, 4 place Jussieu, 75005 Paris, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9849-7868","authenticated-orcid":false,"given":"Juan","family":"Valle","sequence":"additional","affiliation":[{"name":"Electronic Engineering Department, Universitat Polit\u00e8cnica de Catalunya, Jordi Girona 1\u20133, 08034 Barcelona, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1076-6697","authenticated-orcid":false,"given":"Daniel","family":"Fern\u00e1ndez","sequence":"additional","affiliation":[{"name":"Institut de F\u00edsica d\u2019Altes Energies (IFAE-BIST), Edifici Cn. Facultat Ci\u00e8ncies Nord, Universitat Aut\u00f2noma de Barcelona, 08193 Bellaterra (Barcelona), Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5905-9179","authenticated-orcid":false,"given":"Jordi","family":"Madrenas","sequence":"additional","affiliation":[{"name":"Electronic Engineering Department, Universitat Polit\u00e8cnica de Catalunya, Jordi Girona 1\u20133, 08034 Barcelona, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,10,19]]},"reference":[{"key":"ref_1","unstructured":"Magnetic Sensor (2017). Market and Technology Report-November 2017, Yole D\u00e9veloppement. Technical Report."},{"key":"ref_2","unstructured":"Lahrach, A. (2015). eCompass Comparative Report, System Plus Consulting. 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