{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,19]],"date-time":"2026-02-19T02:02:25Z","timestamp":1771466545922,"version":"3.50.1"},"reference-count":44,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2020,11,28]],"date-time":"2020-11-28T00:00:00Z","timestamp":1606521600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2018YFF01010304"],"award-info":[{"award-number":["2018YFF01010304"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2018AAA0100301"],"award-info":[{"award-number":["2018AAA0100301"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["No. 61704166"],"award-info":[{"award-number":["No. 61704166"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012236","name":"Beijing Institute of Technology Research Fund Program for Young Scholars","doi-asserted-by":"publisher","award":["2020CX04072"],"award-info":[{"award-number":["2020CX04072"]}],"id":[{"id":"10.13039\/501100012236","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and state-of-the-art pixel scale. It could bear a load of 1700 g and its load pressure was improved by more than 5.24 times and time constant decreased by 50.7% compared to the traditional soft infrared thin film transducer. The array scale of its pixels exceeded 2k \u00d7 2k. The simulation and measured results of the transient temperature and radiation intensity were well consistent. Illuminated by a 532 nm laser with a frequency of 50 Hz and 50% duty cycle, the thermal decay time of the proposed transducer was 6.0 ms. A knife-edge image was utilized for spatial resolution test and the full width at half maximum (FWHM) of the proposed transducer was 24% smaller than the traditional soft one. High-resolution infrared images were generated using the proposed robust transducer. These results proved that the robust transducer was promising in infrared image generation.<\/jats:p>","DOI":"10.3390\/s20236807","type":"journal-article","created":{"date-parts":[[2020,11,29]],"date-time":"2020-11-29T21:00:57Z","timestamp":1606683657000},"page":"6807","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["A Robust Infrared Transducer of an Ultra-Large-Scale Array"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2021-544X","authenticated-orcid":false,"given":"Defang","family":"Li","sequence":"first","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3630-8878","authenticated-orcid":false,"given":"Jinying","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qingfeng","family":"Shi","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xichen","family":"Yuan","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhuo","family":"Li","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xin","family":"Wang","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Suhui","family":"Yang","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yan","family":"Hao","sequence":"additional","affiliation":[{"name":"School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,11,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1016\/j.trit.2016.03.003","article-title":"A study on key technologies of unmanned driving","volume":"1","author":"Zhang","year":"2016","journal-title":"CAAI Trans. 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