{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T03:26:02Z","timestamp":1760239562804,"version":"build-2065373602"},"reference-count":54,"publisher":"MDPI AG","issue":"24","license":[{"start":{"date-parts":[[2020,12,8]],"date-time":"2020-12-08T00:00:00Z","timestamp":1607385600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61734007","61404136","61704166"],"award-info":[{"award-number":["61734007","61404136","61704166"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Key research program of Frontier Science of CAS","award":["QYZDY-SSW-JSC004"],"award-info":[{"award-number":["QYZDY-SSW-JSC004"]}]},{"name":"Youth Innovation Promotion Association of CAS","award":["29E07RQC03"],"award-info":[{"award-number":["29E07RQC03"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This work investigates the dominant energy dissipations of the multi-frequency whispering gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the devices. An extensive theory for each loss source was established and experimentally testified. The squeezed film damping (SFD) is a major loss for all the WGMs at atmosphere, which is distinguished from traditional bulk acoustic wave (BAW) resonators where the high-order modes suffer less from the air damping. In vacuum, the SFD is negligible, and the frequency-dependent Akhiezer damping (AKE) has significant effects on different order modes. For low-order WGMs, the AKE is limited, and the anchor loss behaves as the dominant loss. For high-order modes with an extended nodal region, the anchor loss is reduced, and the AKE determines the Q values. Substantial Q enhancements over four times and an excellent f \u00d7 Q product up to 6.36 \u00d7 1013 at 7 K were achieved.<\/jats:p>","DOI":"10.3390\/s20247017","type":"journal-article","created":{"date-parts":[[2020,12,8]],"date-time":"2020-12-08T09:17:04Z","timestamp":1607419024000},"page":"7017","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0735-6574","authenticated-orcid":false,"given":"Zeji","family":"Chen","sequence":"first","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2126-7954","authenticated-orcid":false,"given":"Qianqian","family":"Jia","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenli","family":"Liu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Quan","family":"Yuan","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yinfang","family":"Zhu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jinling","family":"Yang","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fuhua","family":"Yang","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,12,8]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"123001","DOI":"10.1088\/1361-6439\/ab4bad","article-title":"Vibrational modes in MEMS resonators","volume":"29","author":"Platz","year":"2019","journal-title":"J. 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