{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,4]],"date-time":"2026-06-04T15:35:07Z","timestamp":1780587307713,"version":"3.54.1"},"reference-count":26,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2020,12,29]],"date-time":"2020-12-29T00:00:00Z","timestamp":1609200000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100000104","name":"National Aeronautics and Space Administration","doi-asserted-by":"publisher","award":["NNX17AG44G"],"award-info":[{"award-number":["NNX17AG44G"]}],"id":[{"id":"10.13039\/100000104","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 \u00b0C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 \u00b0C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 \u00b0C and 84.56 MHz and 84.39 MHz at 500 \u00b0C, correspondingly, representing a \u22123% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be \u221295.27 ppm\/\u00b0C and 57.5 ppb\/\u00b0C2 for resonant mode A, and \u221295.43 ppm\/\u00b0C and 55.8 ppb\/\u00b0C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.<\/jats:p>","DOI":"10.3390\/s21010149","type":"journal-article","created":{"date-parts":[[2020,12,29]],"date-time":"2020-12-29T19:55:25Z","timestamp":1609271725000},"page":"149","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 \u00b0C in Air"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2423-2597","authenticated-orcid":false,"given":"Savannah R.","family":"Eisner","sequence":"first","affiliation":[{"name":"Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Cailin A.","family":"Chapin","sequence":"additional","affiliation":[{"name":"Department of Aeronautics and Astronautics, Stanford University, 496 Lomita Mall, Stanford, CA 94305, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0025-3924","authenticated-orcid":false,"given":"Ruochen","family":"Lu","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, 306 N Wright St, Urbana, IL 61801, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yansong","family":"Yang","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, 306 N Wright St, Urbana, IL 61801, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Songbin","family":"Gong","sequence":"additional","affiliation":[{"name":"Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, 306 N Wright St, Urbana, IL 61801, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Debbie G.","family":"Senesky","sequence":"additional","affiliation":[{"name":"Department of Aeronautics and Astronautics, Stanford University, 496 Lomita Mall, Stanford, CA 94305, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2020,12,29]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"803","DOI":"10.1109\/JMEMS.2013.2292368","article-title":"Uncooled infrared detectors using gallium nitride on silicon micromechanical resonators","volume":"23","author":"Gokhale","year":"2014","journal-title":"J. Microelectromech. Syst."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Calisgan, S.D., Villanueva-Lopez, V., Rajaram, V., Qian, Z., Kang, S., Hernandez-Rivera, S.P., and Rinaldi, M. (2018, January 28\u201331). Spectroscopic chemical sensing based on narrowband MEMS resonant infrared detectors. Proceedings of the 2018 IEEE SENSORS, New Delhi, India.","DOI":"10.1109\/ICSENS.2018.8589600"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Moosavifar, M., Ansari, A., and Rais-Zadeh, M. (November, January 30). An AlN-on-Si resonant IR sensor array with a large temperature coefficient of frequency. Proceedings of the 2016 IEEE SENSORS, Orlando, FL, USA.","DOI":"10.1109\/ICSENS.2016.7808781"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Hui, Y., Gomez-Diaz, J.S., Qian, Z., Al\u00f9, A., and Rinaldi, M. (2016). Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing. Nat. Commun., 7.","DOI":"10.1038\/ncomms11249"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Bardong, J., Schulz, M., Schmitt, M., Shrena, I., Eisele, D., Mayer, E., Reindl, L.M., and Fritze, H. (2008, January 19\u201321). Precise measurements of BAW and SAW properties of langasite in the temperature range from 25 \u00b0C to 1000 \u00b0C. Proceedings of the 2008 IEEE International Frequency Control Symposium, Honolulu, HI, USA.","DOI":"10.1109\/FREQ.2008.4623013"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"399","DOI":"10.1016\/j.sna.2018.06.047","article-title":"Temperature characteristics of langasite surface acoustic wave resonators coated with SiO2 films","volume":"279","author":"Li","year":"2018","journal-title":"Sens. Actuator A Phys."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Aubert, T., and Elmazria, O. (2012, January 7\u201310). Stability of langasite regarding SAW applications above 800 \u00b0C in air atmosphere. Proceedings of the 2012 IEEE International Ultrasonics Symposium, Dresden, Germany.","DOI":"10.1109\/ULTSYM.2012.0524"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Yen, T.-T., Lin, C.-M., Zhao, X., Felmetsger, V.V., Senesky, D.G., Hopcroft, M.A., and Pisano, A.P. (2010, January 24\u201328). Characterization of aluminum nitride lamb wave resonators operating at 600 \u00b0C for harsh environment RF applications. Proceedings of the 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong.","DOI":"10.1109\/MEMSYS.2010.5442304"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"524","DOI":"10.1109\/TUFFC.2010.1443","article-title":"Temperature-compensated aluminum nitride lamb wave resonators","volume":"57","author":"Lin","year":"2010","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"2722","DOI":"10.1002\/adma.201104842","article-title":"AlN\/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators","volume":"24","author":"Lin","year":"2012","journal-title":"Adv. Mater."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Aubert, T., Elmazria, O., Assouar, B., Bouvot, L., and Oudich, M. (2010). Surface acoustic wave devices based on AlN\/sapphire structure for high temperature applications. Appl. Phys. Lett., 96.","DOI":"10.1063\/1.3430042"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1127","DOI":"10.1109\/LED.2014.2358577","article-title":"A temperature-compensated gallium nitride micromechanical resonator","volume":"35","author":"Ansari","year":"2014","journal-title":"IEEE Electron Device Lett."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Aubert, T., Kokanyan, N., Alhousseini, H., Taguett, A., Bartoli, F., Streque, J., M\u2019Jahed, H., Boulet, P., and Elmazria, O. (November, January 29). First investigations on stoichiometric lithium niobate as piezoelectric substrate for high-temperature surface acoustic waves applications. Proceedings of the 2017 IEEE SENSORS, Glasgow, Scotland.","DOI":"10.1109\/ICSENS.2017.8234068"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/LSENS.2019.2908691","article-title":"Stoichiometric lithium niobate crystals: Towards identifiable wireless surface acoustic wave sensors operable up to 600 \u00b0C","volume":"3","author":"Streque","year":"2019","journal-title":"IEEE Sens. Lett."},{"key":"ref_15","unstructured":"Hauser, R., Reindl, L., and Biniasch, J. (2003, January 5\u20138). High-temperature stability of LiNbO3 based SAW devices. Proceedings of the 2003 IEEE Symposium on Ultrasonics, Honolulu, HI, USA."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1427","DOI":"10.1109\/TUFFC.2004.1367482","article-title":"Applicability of LiNbO3, langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies","volume":"51","author":"Fachberger","year":"2004","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"309","DOI":"10.1002\/pssb.19660130202","article-title":"The curie temperature of LiNbO3.","volume":"13","author":"Smolenskii","year":"1966","journal-title":"Phys. Status Solidi B"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"26","DOI":"10.1016\/j.ssi.2012.02.026","article-title":"Electrical and electromechanical properties of stoichiometric lithium niobate at high-temperatures","volume":"224","author":"Weidenfelder","year":"2012","journal-title":"Solid State Ion."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"613","DOI":"10.1364\/OL.25.000613","article-title":"Scanning Michelson interferometer for imaging surface acoustic wave fields","volume":"25","author":"Knuuttila","year":"2000","journal-title":"Opt. Lett."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Pop, F.V., Kochhar, A.S., Vidal-Alvarez, G., and Piazza, G. (2017, January 22\u201326). Laterally vibrating lithium Niobate MEMS resonators with 30% electromechanical coupling coefficient. Proceedings of the 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA.","DOI":"10.1109\/MEMSYS.2017.7863571"},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Manzaneque, T., Lu, R., Yang, Y., and Gong, S. (2017, January 18\u201322). A high FoM lithium niobate resonant transformer for passive voltage amplification. Proceedings of the 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan.","DOI":"10.1109\/TRANSDUCERS.2017.7994169"},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Lu, R., Manzaneque, T., Yang, Y., and Gong, S. (2018, January 21\u201325). Exploiting parallelism in resonators for large voltage gain in low power wake up radio front ends. Proceedings of the 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK.","DOI":"10.1109\/MEMSYS.2018.8346663"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1109\/JMEMS.2019.2892708","article-title":"Accurate extraction of large electromechanical coupling in piezoelectric MEMS resonators","volume":"28","author":"Lu","year":"2019","journal-title":"J. Microelectromech. Syst."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Bhugra, H., and Piazza, G. (2017). Piezoelectric MEMS Resonators, Springer International Publishing.","DOI":"10.1007\/978-3-319-28688-4"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"403","DOI":"10.1109\/TMTT.2012.2228671","article-title":"Design and analysis of lithium-niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering","volume":"61","author":"Gong","year":"2013","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_26","unstructured":"Lin, C.-M. (2013). Temperature-Compensated and High-Q Piezoelectric Aluminum Nitride Lamb Wave Resonators for Timing and Frequency Control Applications. [Ph.D. Thesis, University of California]."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/1\/149\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T10:47:16Z","timestamp":1760179636000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/1\/149"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,12,29]]},"references-count":26,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2021,1]]}},"alternative-id":["s21010149"],"URL":"https:\/\/doi.org\/10.3390\/s21010149","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,12,29]]}}}