{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,31]],"date-time":"2026-03-31T11:40:29Z","timestamp":1774957229512,"version":"3.50.1"},"reference-count":22,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2021,1,26]],"date-time":"2021-01-26T00:00:00Z","timestamp":1611619200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Key Project of Research and Development Plan","award":["2016YFC0301801"],"award-info":[{"award-number":["2016YFC0301801"]}]},{"name":"Strategic Priority Research Program (A) of the Chinese Academy of Sciences","award":["XDA22020302"],"award-info":[{"award-number":["XDA22020302"]}]},{"DOI":"10.13039\/501100014219","name":"National Science Fund for Distinguished Young Scholars","doi-asserted-by":"publisher","award":["61825107 and U1930206"],"award-info":[{"award-number":["61825107 and U1930206"]}],"id":[{"id":"10.13039\/501100014219","id-type":"DOI","asserted-by":"publisher"}]},{"name":"National Key Scientific Instrument and Equipment Development Project of China","award":["2013YQ12035703"],"award-info":[{"award-number":["2013YQ12035703"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This study developed a MEMS-based electrochemical seismometer relying on a cathode\u2013anode\u2013cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations.<\/jats:p>","DOI":"10.3390\/s21030809","type":"journal-article","created":{"date-parts":[[2021,1,26]],"date-time":"2021-01-26T08:29:16Z","timestamp":1611649756000},"page":"809","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure"],"prefix":"10.3390","volume":"21","author":[{"given":"Xu","family":"She","sequence":"first","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Junbo","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Deyong","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4612-3279","authenticated-orcid":false,"given":"Jian","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Chao","family":"Xu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Wenjie","family":"Qi","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Bowen","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Tian","family":"Liang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}]}],"member":"1968","published-online":{"date-parts":[[2021,1,26]]},"reference":[{"key":"ref_1","first-page":"2106","article-title":"Development situation of geophones and its application in seismic array observation","volume":"29","author":"Zeng","year":"2014","journal-title":"Prog. 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