{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,7]],"date-time":"2026-04-07T11:31:04Z","timestamp":1775561464164,"version":"3.50.1"},"reference-count":26,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2021,2,1]],"date-time":"2021-02-01T00:00:00Z","timestamp":1612137600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2017YFA070120"],"award-info":[{"award-number":["2017YFA070120"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100013287","name":"Science Challenge Program","doi-asserted-by":"publisher","award":["TZ2018006-0203-01"],"award-info":[{"award-number":["TZ2018006-0203-01"]}],"id":[{"id":"10.13039\/501100013287","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61635008"],"award-info":[{"award-number":["61635008"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Postdoctoral Innovative Talent Support Program of China","award":["BX20190230"],"award-info":[{"award-number":["BX20190230"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Phase compensation is a critical step for the optical measuring system using spatial light modulator (SLM). The wavefront distortion from SLM is mainly caused by the phase modulation non-linearity and non-uniformity of SLM\u2019s physical structure and environmental conditions. A phase modulation characteristic calibration and compensation method for liquid crystal on silicon spatial light modulator (LCoS-SLM) with a Twyman-Green interferometer is illustrated in this study. A method using two sequences of phase maps is proposed to calibrate the non-uniformity character over the whole aperture of LCoS-SLM at pixel level. A phase compensation matrix is calculated to correct the actual phase modulation of the LCoS-SLM and ensure that the designed wavefront could be achieved. Compared with previously known compensation methods, the proposed method could obtain the phase modulation characteristic curve of each pixel on the LCoS-SLM, rather than a mono look-up table (LUT) curve or multi-LUT curves corresponding to an array of blocks over the whole aperture of the LCoS-SLM. The experiment results show that the phase compensation precision could reach a peak-valley value of 0.061\u03bb in wavefront and this method can be applied in generating freeform wave front for precise optical performance.<\/jats:p>","DOI":"10.3390\/s21030967","type":"journal-article","created":{"date-parts":[[2021,2,1]],"date-time":"2021-02-01T11:40:48Z","timestamp":1612179648000},"page":"967","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":24,"title":["Phase Compensation of the Non-Uniformity of the Liquid Crystal on Silicon Spatial Light Modulator at Pixel Level"],"prefix":"10.3390","volume":"21","author":[{"given":"Zhen","family":"Zeng","sequence":"first","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology &amp; Instruments, Laboratory of Micro\/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China"}]},{"given":"Zexiao","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology &amp; Instruments, Laboratory of Micro\/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8716-5988","authenticated-orcid":false,"given":"Fengzhou","family":"Fang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology &amp; Instruments, Laboratory of Micro\/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China"}]},{"given":"Xiaodong","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Precision Measuring Technology &amp; Instruments, Laboratory of Micro\/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China"}]}],"member":"1968","published-online":{"date-parts":[[2021,2,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"843","DOI":"10.1016\/j.cirp.2019.05.005","article-title":"On-machine and in-process surface metrology for precision manufacturing","volume":"68","author":"Gao","year":"2019","journal-title":"CIRP Ann."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"45","DOI":"10.1007\/s41871-018-0007-x","article-title":"Design and testing of a micro-thermal sensor probe for nondestructive detection of defects on a flat surface","volume":"1","author":"Shimizu","year":"2018","journal-title":"Nanomanuf. 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Proceedings of the Practical Holography XXVIII: Materials and Applications, San Francisco, CA, USA.","DOI":"10.1117\/12.2037569"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/3\/967\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T05:18:11Z","timestamp":1760159891000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/3\/967"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,2,1]]},"references-count":26,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2021,2]]}},"alternative-id":["s21030967"],"URL":"https:\/\/doi.org\/10.3390\/s21030967","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,2,1]]}}}