{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,13]],"date-time":"2026-07-13T13:30:06Z","timestamp":1783949406990,"version":"3.55.0"},"reference-count":40,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2021,2,5]],"date-time":"2021-02-05T00:00:00Z","timestamp":1612483200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"the National Natural Science Foundation of China Project","award":["61671271"],"award-info":[{"award-number":["61671271"]}]},{"name":"the National Natural Science Foundation of China Project","award":["31427801"],"award-info":[{"award-number":["31427801"]}]},{"name":"the Capital Transformational Medicine Project","award":["2018-2Z-4086"],"award-info":[{"award-number":["2018-2Z-4086"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The demand for waterproofing of polymer (parylene) coating encapsulation has increased in a wide variety of applications, especially in the waterproof protection of electronic devices. However, parylene coatings often produce pinholes and cracks, which will reduce the waterproof effect as a protective barrier. This characteristic has a more significant influence on sensors and actuators with movable parts. Thus, a defect filling method of micro-nano composite structure is proposed to improve the waterproof ability of parylene coatings. The defect filling method is composed of a nano layer of Al2O3 molecules and a micro layer of parylene polymer. Based on the diffusion mechanism of water molecules in the polymer membrane, defects on the surface of polymer encapsulation will be filled and decomposed into smaller areas by Al2O3 nanoparticles to delay or hinder the penetration of water molecules. Accordingly, the dense Al2O3 nanoparticles are utilized to fill and repair the surface of the organic polymer by low-rate atomic layer deposition. This paper takes the pressure sensor as an example to carry out the corresponding research. Experimental results show that the proposed method is very effective and the encapsulated sensors work properly in a saline solution after a period of time equivalent to 153.9 days in body temperature, maintaining their accuracy and precision of 2 mmHg. Moreover, the sensors could improve accuracy by about 43% after the proposed encapsulation. Therefore, the water molecule anti-permeability encapsulation would have broad application prospects in micro\/nano-device protection.<\/jats:p>","DOI":"10.3390\/s21041107","type":"journal-article","created":{"date-parts":[[2021,2,5]],"date-time":"2021-02-05T08:33:48Z","timestamp":1612514028000},"page":"1107","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":18,"title":["Defect Filling Method of Sensor Encapsulation Based on Micro-Nano Composite Structure with Parylene Coating"],"prefix":"10.3390","volume":"21","author":[{"given":"Jialin","family":"Yao","sequence":"first","affiliation":[{"name":"The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China"},{"name":"School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wenjiang","family":"Qiang","sequence":"additional","affiliation":[{"name":"School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xingqi","family":"Guo","sequence":"additional","affiliation":[{"name":"The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hanshui","family":"Fan","sequence":"additional","affiliation":[{"name":"School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yushuang","family":"Zheng","sequence":"additional","affiliation":[{"name":"School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yan","family":"Xu","sequence":"additional","affiliation":[{"name":"School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xing","family":"Yang","sequence":"additional","affiliation":[{"name":"The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2021,2,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"3825","DOI":"10.1002\/adma.201501044","article-title":"Regenerative nano-hybrid coating tailored for autonomous corrosion protection","volume":"27","author":"Tran","year":"2015","journal-title":"Adv. Mater."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Li, C., Yang, W., Wang, M., Yu, X., Fan, J., Xiong, Y., Yang, Y., and Li, L. (2020). A Review of Coating Materials Used to Improve the Performance of Optical Fiber Sensors. Sensors, 20.","DOI":"10.3390\/s20154215"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"French, P., Krijnen, G., and Roozeboom, F. (2016). Precision in harsh environments. Microsyst. Nanoeng., 2.","DOI":"10.1038\/micronano.2016.48"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"4364","DOI":"10.1002\/adfm.201400254","article-title":"Programmable Arrays of \u201cMicro-Bubble\u201d Constructs via Self-Encapsulation","volume":"24","author":"Ye","year":"2014","journal-title":"Adv. Funct. Mater."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Park, J., Kim, J.K., Patil, S.J., Park, J.K., Park, S., and Lee, D.W. (2016). A wireless pressure sensor integrated with a biodegradable polymer stent for biomedical applications. Sensors, 16.","DOI":"10.3390\/s16060809"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Shapero, A.M., Liu, Y., and Tai, Y. (2016). Parylene-on-oil packaging for long-term implantable pressure sensors. Biomed. Microdevices, 18.","DOI":"10.1007\/s10544-016-0089-4"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Zhang, S., Li, Y., Tomasello, G., Anthonisen, M., Li, X., Mazzeo, M., Genco, A., Grutter, P., and Cicoira, F. (2019). Tuning the Electromechanical Properties of PEDOT:PSS Films for Stretchable Transistors And Pressure Sensors. Adv. Electron. Mater., 5.","DOI":"10.1002\/aelm.201900191"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"20620","DOI":"10.3390\/s141120620","article-title":"Chronically implanted pressure sensors: Challenges and state of the field","volume":"14","author":"Yu","year":"2014","journal-title":"Sensors"},{"key":"ref_9","unstructured":"Cui, Z. (2016). Encapsulation Technology for Organic Electronic Devices. Printed Electronics: Materials, Technologies and Applications, Wiley. [1st ed.]."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"42757","DOI":"10.1109\/ACCESS.2019.2904654","article-title":"Water-Resistant Smartphone Technologies","volume":"7","author":"Yu","year":"2019","journal-title":"IEEE Access"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"6158","DOI":"10.1016\/j.biomaterials.2009.07.061","article-title":"The insulation performance of reactive parylene films in implantable electronic devices","volume":"30","author":"Seymour","year":"2009","journal-title":"Biomaterials"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"814","DOI":"10.1017\/S1759078718000685","article-title":"Parylene coated waterproof washable inkjet-printed dual-band antenna on paper substrate","volume":"10","author":"Kim","year":"2018","journal-title":"Int. J. Microw. Wirel. Technol."},{"key":"ref_13","first-page":"47","article-title":"Parylene-oil-encapsulated low-drift implantable pressure sensors","volume":"1","author":"Shapero","year":"2018","journal-title":"IEEE Int. Conf. Micro Electro Mech. Syst."},{"key":"ref_14","first-page":"484","article-title":"Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors","volume":"1","author":"Wang","year":"2015","journal-title":"Int. Conf. Solid State Sens. Actuators Microsyst."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"17686","DOI":"10.3390\/s140917686","article-title":"Development of Clinically Relevant Implantable Pressure Sensors: Perspectives and Challenges","volume":"14","author":"Clausen","year":"2014","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"850","DOI":"10.1016\/j.nanoen.2019.04.004","article-title":"A fully packed water-proof, humidity resistant triboelectric nanogenerator for transmitting Morse code","volume":"60","author":"Chandrasekhar","year":"2019","journal-title":"Nano Energy"},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Ardebili, H., and Pecht, M.G. (2009). Plastic Encapsulant Materials. Encapsulation Technologies for Electronic Applications, William Andrew Publishing. [2nd ed.].","DOI":"10.1016\/B978-0-8155-1576-0.50006-1"},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Yao, J.L., Chen, Y.X., Qiang, W.J., Wang, X.Z., Wei, H., Gao, B.H., and Yang, X. (2019). A Simple, Low-Cost Micro-Coating Method for Accuracy Improvement and Its Application in Pressure Sensors. Sensors, 19.","DOI":"10.3390\/s19204601"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"960","DOI":"10.1016\/j.actbio.2013.10.031","article-title":"Lifetime assessment of atomic-layer-deposited Al2O3\u2013Parylene C bilayer coating for neural interfaces using accelerated age testing and electrochemical characterization","volume":"10","author":"Minnikanti","year":"2014","journal-title":"Acta Biomater."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"4151","DOI":"10.1021\/acsami.6b12991","article-title":"Flexible, cuttable, and self-waterproof bending strain sensors using microcracked gold nanofilms@ paper substrate","volume":"9","author":"Liao","year":"2017","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Li, C., Cauwe, M., Mader, L., Schaubroeck, D., and Op de Beeck, M. (2020). Accelerated Hermeticity Testing of Biocompatible Moisture Barriers Used for the Encapsulation of Implantable Medical Devices. Coatings, 10.","DOI":"10.3390\/coatings10010019"},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Xie, X., Rieth, L., Merugu, S., Tathireddy, P., and Solzbacher, F. (2012). Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics. Appl. Phys. Lett., 101.","DOI":"10.1063\/1.4748322"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"2943","DOI":"10.1109\/TBME.2013.2266542","article-title":"Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al2O3 and Parylene C for Biomedical Implantable Devices","volume":"60","author":"Xie","year":"2013","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"42302","DOI":"10.1021\/acsami.7b11801","article-title":"An implantable transparent conductive film with water resistance and ultrabendability for electronic devices","volume":"9","author":"Song","year":"2017","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Reeder, J.T., Choi, J., Xue, Y.G., Gutruf, P., Hanson, J., Liu, M., Ray, T., Bandodkar, A.J., Avila, R., and Xia, W. (2019). Waterproof, electronics-enabled, epidermal microfluidic devices for sweat collection, biomarker analysis, and thermography in aquatic settings. Sci. Adv., 5.","DOI":"10.1126\/sciadv.aau6356"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"15542","DOI":"10.1021\/acsami.5b04006","article-title":"Parylene-Coated Ionic Liquid\u2013Carbon Nanotube Actuators for User-Safe Haptic Devices","volume":"7","author":"Bubak","year":"2015","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Khanna, V.K. (2017). Moisture and Waterproof Electronics. Extreme-Temperature and Harsh-Environment Electronics, IOP Publishing.","DOI":"10.1088\/978-0-7503-1155-7"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"9","DOI":"10.13189\/ujbe.2015.030201","article-title":"Parylene coatings in medical devices and implants: A review","volume":"3","author":"Kuppusami","year":"2015","journal-title":"Univ. J. Biomed. Eng."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"5378","DOI":"10.1016\/j.polymer.2011.08.010","article-title":"The influence of thermal history on structure and water transport in Parylene C coatings","volume":"52","author":"Davis","year":"2011","journal-title":"Polymer"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1016\/j.commatsci.2015.04.032","article-title":"A molecular dynamics study of water transport inside an epoxy polymer matrix","volume":"106","author":"Pandiyan","year":"2015","journal-title":"Comput. Mater. Sci."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"2062","DOI":"10.1063\/1.459083","article-title":"A jump motion of small molecules in glassy polymers: A molecular dynamics simulation","volume":"93","author":"Takeuchi","year":"1990","journal-title":"J. Chem. Phys."},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Yang, C., Xing, X., Li, Z., and Zhang, S. (2020). A Comprehensive Review on Water Diffusion in Polymers Focusing on the Polymer\u2013Metal Interface Combination. Polymers, 12.","DOI":"10.3390\/polym12010138"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"207","DOI":"10.1007\/BFb0080200","article-title":"Dynamics of small molecules in bulk polymers","volume":"Volume 116","author":"Gusev","year":"1994","journal-title":"Atomistic Modeling of Physical Properties"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"123","DOI":"10.1080\/01611598308244062","article-title":"Diffusion of small molecules in polymers","volume":"11","author":"Frisch","year":"1983","journal-title":"Crit. Rev. Solid State Mat. Sci."},{"key":"ref_35","doi-asserted-by":"crossref","unstructured":"Comyn, J. (1985). Permeation of Gases and Vapors in Polymers. Polymer Permeability, Springer.","DOI":"10.1007\/978-94-009-4858-7"},{"key":"ref_36","unstructured":"Fan, C. (2014). Numerical Simulation of Small Molecule Gases Penetration in Poly p-xylylene 2011. [Master\u2019s Thesis, Southwest University of Science and Technology]."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"121","DOI":"10.1109\/TBME.1977.326115","article-title":"Parylene as a chronically stable, reproducible microelectrode insulator","volume":"2","author":"Loeb","year":"1977","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_38","doi-asserted-by":"crossref","unstructured":"Ortigoza-Diaz, J., Scholten, K., Larson, C., Cobo, A., Hudson, T., Yoo, J., Baldwin, A., Weltman Hirschberg, A., and Meng, E. (2018). Techniques and considerations in the microfabrication of Parylene C microelectromechanical systems. Micromachines, 9.","DOI":"10.3390\/mi9090422"},{"key":"ref_39","unstructured":"Specialty Coating Systems Inc. (2020, September 01). Technical Papers, Parylene Properties. Available online: https:\/\/scscoatings.com\/."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"38","DOI":"10.1016\/j.sna.2016.06.035","article-title":"A thin-film pressure transducer for implantable and intravascular blood pressure sensing","volume":"248","author":"Starr","year":"2016","journal-title":"Sens. Actuator A Phys."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/4\/1107\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T05:19:57Z","timestamp":1760159997000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/4\/1107"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,2,5]]},"references-count":40,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2021,2]]}},"alternative-id":["s21041107"],"URL":"https:\/\/doi.org\/10.3390\/s21041107","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,2,5]]}}}