{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,14]],"date-time":"2026-05-14T05:09:38Z","timestamp":1778735378214,"version":"3.51.4"},"reference-count":37,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2021,2,5]],"date-time":"2021-02-05T00:00:00Z","timestamp":1612483200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61575003"],"award-info":[{"award-number":["61575003"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, a polyimide (PI)\/Si\/SiO2-based piezoresistive microcantilever biosensor was developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the high piezoresistance coefficient of single-crystal silicon and the small spring constant of PI, the flexible piezoresistive microcantilever was designed using the buried oxide (BOX) layer of a silicon-on-insulator (SOI) wafer as a bottom passivation layer, the topmost single-crystal silicon layer as a piezoresistor layer, and a thin PI film as a top passivation layer. To obtain higher sensitivity and output voltage stability, four identical piezoresistors, two of which were located in the substrate and two integrated in the microcantilevers, were composed of a quarter-bridge configuration wheatstone bridge. The fabricated PI\/Si\/SiO2 microcantilever showed good mechanical properties with a spring constant of 21.31 nN\/\u03bcm and a deflection sensitivity of 3.54 \u00d7 10\u22127 nm\u22121. The microcantilever biosensor also showed a stable voltage output in the Phosphate Buffered Saline (PBS) buffer with a fluctuation less than 1 \u03bcV @ 3 V. By functionalizing anti-aflatoxin B1 on the sensing piezoresistive microcantilever with a biotin avidin system (BAS), a linear aflatoxin B1 detection concentration resulting from 1 ng\/mL to 100 ng\/mL was obtained, and the toxic molecule detection also showed good specificity. The experimental results indicate that the PI\/Si\/SiO2 flexible piezoresistive microcantilever biosensor has excellent abilities in trace-level and specific detections of aflatoxin B1 and other biomolecules.<\/jats:p>","DOI":"10.3390\/s21041118","type":"journal-article","created":{"date-parts":[[2021,2,7]],"date-time":"2021-02-07T14:04:13Z","timestamp":1612706653000},"page":"1118","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["A Flexible PI\/Si\/SiO2 Piezoresistive Microcantilever for Trace-Level Detection of Aflatoxin B1"],"prefix":"10.3390","volume":"21","author":[{"given":"Yuan","family":"Tian","sequence":"first","affiliation":[{"name":"National Key Laboratory of Science and Technology on Micro\/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Liu","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Science and Technology on Micro\/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yang","family":"Wang","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Science and Technology on Micro\/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jia","family":"Xu","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Science and Technology on Micro\/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiaomei","family":"Yu","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Science and Technology on Micro\/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2021,2,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"60","DOI":"10.1016\/j.foodcont.2014.12.009","article-title":"A novel electrochemical piezoelectric label free immunosensor for aflatoxin B1 detection in groundnut","volume":"52","author":"Chauhan","year":"2015","journal-title":"Food Control"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"65","DOI":"10.1016\/j.trac.2017.12.017","article-title":"Recent development of optical methods in rapid and non-destructive detection of aflatoxin and fungal contamination in agricultural products","volume":"100","author":"Tao","year":"2018","journal-title":"TrAC Trends Anal. Chem."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1016\/j.foodchem.2016.07.150","article-title":"Detection of aflatoxin M1 in milk using spectroscopy and multivariate analyses","volume":"238","author":"Jaiswal","year":"2018","journal-title":"Food Chem."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1822","DOI":"10.1021\/acs.jafc.6b05337","article-title":"A Dual-Color Quantum Dots Encoded Frit-Based Immunoassay for Visual Detection of Aflatoxin M1 and Pirlimycin Residues in Milk","volume":"65","author":"Jiang","year":"2017","journal-title":"J. Agric. Food Chem."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"11236","DOI":"10.1039\/C5CC04029A","article-title":"An ON1-OFF-ON2 electrochemiluminescence response: Combining the intermolecular specific binding with a radical scavenger","volume":"51","author":"Du","year":"2015","journal-title":"Chem. Commun."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1087","DOI":"10.1016\/j.snb.2016.08.115","article-title":"Evaluation of an alternative spectroscopic approach for aflatoxin analysis: Comparative analysis of food and feed samples with UPLC\u2013MS\/MS","volume":"239","author":"Campbell","year":"2017","journal-title":"Sens. Actuators B Chem."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"9923","DOI":"10.1021\/acs.jafc.7b04329","article-title":"Development of Multiple Heart-Cutting Two-Dimensional Liquid Chromatography Coupled to Quadrupole-Orbitrap High Resolution Mass Spectrometry for Simultaneous Determination of Aflatoxin B1, B2, G1, G2, and Ochratoxin A in Snus, a Smokeless Tobacco Product","volume":"65","author":"Qi","year":"2017","journal-title":"J. Agric. Food Chem."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"125176","DOI":"10.1016\/j.foodchem.2019.125176","article-title":"Simultaneous detection of aflatoxin B1, ochratoxin A, zearalenone and deoxynivalenol in corn and wheat using surface plasmon resonance","volume":"300","author":"Wei","year":"2019","journal-title":"Food Chem."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"139","DOI":"10.1016\/j.aca.2018.09.058","article-title":"Application of CdTe\/CdS\/ZnS quantum dot in immunoassay for aflatoxin B1 and molecular modeling of antibody recognition","volume":"1047","author":"Zhang","year":"2019","journal-title":"Anal. Chim. Acta"},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Zhang, Z., Tang, X., Wang, D., Zhang, Q., Li, P., and Ding, X. (2015). Rapid on-site sensing aflatoxin B1 in food and feed via a chromatographic time-resolved fluoroimmunoassay. PLoS ONE, 10.","DOI":"10.1371\/journal.pone.0123266"},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Kumar, Y.V.V.A., Renuka, R.M., Achuth, J., Venkataramana, M., Ushakiranmayi, M., and Sudhakar, P. (2018). Development of hybrid IgG-aptamer sandwich immunoassay platform for aflatoxin B1 detection and its evaluation onto various field samples. Front. Pharmacol., 9.","DOI":"10.3389\/fphar.2018.00271"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Moon, J., Byun, J., Kim, H., Lim, E.K., Jeong, J., Jung, J., and Kang, T. (2018). On-site detection of aflatoxin B1 in grains by a palm-sized surface plasmon resonance sensor. Sensors, 18.","DOI":"10.3390\/s18020598"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"374","DOI":"10.1016\/j.bios.2017.03.028","article-title":"A new amplified \u03c0-shape electrochemical aptasensor for ultrasensitive detection of aflatoxin B1","volume":"94","author":"Abnous","year":"2017","journal-title":"Biosens. Bioelectron."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"2487","DOI":"10.1007\/s10008-014-2506-z","article-title":"Electrochemical sensor for determination of aflatoxin B1 based on multiwalled carbon nanotubes-supported Au\/Pt bimetallic nanoparticles","volume":"18","author":"Wang","year":"2014","journal-title":"J. Solid State Electrochem."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"147","DOI":"10.1016\/j.saa.2017.08.029","article-title":"A large Raman scattering cross-section molecular embedded SERS aptasensor for ultrasensitive Aflatoxin B1 detection using CS-Fe3O4 for signal enrichment","volume":"189","author":"Chen","year":"2018","journal-title":"Spectrochim. Acta Part A Mol. Biomol. Spectrosc."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"10465","DOI":"10.1039\/C8RA00317C","article-title":"Development of a FRET-based fluorescence aptasensor for the detection of aflatoxin B1 in contaminated food grain samples","volume":"8","author":"Renuka","year":"2018","journal-title":"RSC Adv."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"261","DOI":"10.1016\/j.talanta.2019.05.109","article-title":"A label-free immunoassay protocol for aflatoxin B1 based on UV-induced fluorescence enhancement","volume":"204","author":"Shu","year":"2019","journal-title":"Talanta"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"310","DOI":"10.1016\/j.foodchem.2014.02.128","article-title":"Development of ultrasensitive direct chemiluminescent enzyme immunoassay for determination of aflatoxin M1 in milk","volume":"158","author":"Vdovenko","year":"2014","journal-title":"Food Chem."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1016\/j.talanta.2019.03.109","article-title":"Development of a chemiluminescent aptasensor for ultrasensitive and selective detection of aflatoxin B1 in peanut and milk","volume":"201","author":"Yao","year":"2019","journal-title":"Talanta"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"25","DOI":"10.1016\/j.talanta.2012.12.047","article-title":"Development of ultrasensitive direct chemiluminescent enzyme immunoassay for determination of aflatoxin B1 in food products","volume":"107","author":"Yu","year":"2013","journal-title":"Talanta"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"344","DOI":"10.1016\/j.talanta.2017.11.048","article-title":"Competitive horseradish peroxidase-linked aptamer assay for sensitive detection of Aflatoxin B1","volume":"179","author":"Sun","year":"2018","journal-title":"Talanta"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"204","DOI":"10.1016\/j.talanta.2019.04.016","article-title":"Development of a smartphone-based biomimetic sensor for aflatoxin B1 detection using molecularly imprinted polymer membranes","volume":"201","author":"Sergeyeva","year":"2019","journal-title":"Talanta"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1016\/j.snb.2015.11.092","article-title":"Nanomechanical label-free detection of aflatoxin B1 using a microcantilever","volume":"226","author":"Zhou","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_24","first-page":"902","article-title":"\u03bc-\u2018Diving suit\u2019for liquid-phase high-Q resonant detection","volume":"16","author":"Yu","year":"2016","journal-title":"LChip"},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Liu, X., Wang, L., Zhao, J., Zhu, Y., Yang, J., and Yang, F. (2019). Enhanced binding efficiency of microcantilever biosensor for the detection of Yersinia. Sensors, 19.","DOI":"10.3390\/s19153326"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Nyang\u2019au, W.O., Setiono, A., Bertke, M., Bosse, H., and Peiner, E. (2019). Cantilever-droplet-based sensing of magnetic particle concentrations in liquids. Sensors, 19.","DOI":"10.3390\/s19214758"},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Nyang\u2019au, W.O., Setiono, A., Schmidt, A., Bosse, H., and Peiner, E. (2020). Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting. Sensors, 20.","DOI":"10.3390\/s20092508"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"112","DOI":"10.1016\/j.snb.2015.02.002","article-title":"Trace level detections of abrin with high SNR piezoresistive cantilever biosensor","volume":"212","author":"Zhao","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"420","DOI":"10.1016\/j.bios.2018.09.014","article-title":"Gentamicin drug monitoring for peritonitis patients by using a CMOS-BioMEMS-based microcantilever sensor","volume":"130","author":"Li","year":"2019","journal-title":"Biosens. Bioelectron."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"566","DOI":"10.1016\/j.snb.2016.08.167","article-title":"Piezoresistive sensor-integrated PDMS cantilever: A new class of device for measuring the drug-induced changes in the mechanical activity of cardiomyocytes","volume":"240","author":"Kim","year":"2017","journal-title":"Sens. Actuators B Chem."},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Zhao, R., and Sun, Y. (2018). Polymeric flexible immunosensor based on piezoresistive micro-cantilever with PEDOT\/PSS conductive layer. Sensors, 18.","DOI":"10.3390\/s18020451"},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Tian, Y., Zhao, R., Liu, Y., and Yu, X. (2020). A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection. Micromachines, 11.","DOI":"10.3390\/mi11111001"},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Tian, Y., Wang, Y., and Yu, X. (2019, January 23\u201327). Ultrasensitive Detection of Aflatoxin B1 Using a Polyimide-Based Piezoresistive Microcantilever Biosensor. Proceedings of the 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany.","DOI":"10.1109\/TRANSDUCERS.2019.8808517"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"1231","DOI":"10.1016\/j.snb.2016.09.089","article-title":"Cantilever-based aptasensor for trace level detection of nerve agent simulant in aqueous matrices","volume":"238","author":"Zhao","year":"2017","journal-title":"Sens. Actuators B Chem."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"637","DOI":"10.1126\/science.287.5453.637","article-title":"Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load","volume":"287","author":"Yu","year":"2000","journal-title":"Science"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"6296","DOI":"10.1063\/1.1493660","article-title":"Optimization of sensitivity and noise in piezoresistive cantilevers","volume":"92","author":"Yu","year":"2002","journal-title":"J. Appl. Phys."},{"key":"ref_37","doi-asserted-by":"crossref","unstructured":"Doll, J.C., and Pruitt, B.L. (2013). Piezoresistor Design and Applications, Springer.","DOI":"10.1007\/978-1-4614-8517-9"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/4\/1118\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T05:20:09Z","timestamp":1760160009000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/4\/1118"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,2,5]]},"references-count":37,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2021,2]]}},"alternative-id":["s21041118"],"URL":"https:\/\/doi.org\/10.3390\/s21041118","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,2,5]]}}}