{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T01:54:47Z","timestamp":1760234087920,"version":"build-2065373602"},"reference-count":38,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2021,3,16]],"date-time":"2021-03-16T00:00:00Z","timestamp":1615852800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng\/Hz1\/2.<\/jats:p>","DOI":"10.3390\/s21062070","type":"journal-article","created":{"date-parts":[[2021,3,16]],"date-time":"2021-03-16T21:42:41Z","timestamp":1615930961000},"page":"2070","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":23,"title":["Design and Modification of a High-Resolution Optical Interferometer Accelerometer"],"prefix":"10.3390","volume":"21","author":[{"given":"Yuan","family":"Yao","sequence":"first","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China"},{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Debin","family":"Pan","sequence":"additional","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China"},{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Jianbo","family":"Wang","sequence":"additional","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Tingting","family":"Dong","sequence":"additional","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Jie","family":"Guo","sequence":"additional","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Chensheng","family":"Wang","sequence":"additional","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Anbing","family":"Geng","sequence":"additional","affiliation":[{"name":"Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China"}]},{"given":"Weidong","family":"Fang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China"}]},{"given":"Qianbo","family":"Lu","sequence":"additional","affiliation":[{"name":"Frontiers Science Center for Flexible Electronics (FSCFE), MIIT Key Laboratory of Flexible Electronics (KLoFE), Shaanxi Key Laboratory of Flexible Electronics (KLoFE), Institute of Flexible Electronics (IFE), Ningbo Institute of Northwestern Polytechnical University, Northwestern Polytechnical University, Xi\u2019an 710072, China"}]}],"member":"1968","published-online":{"date-parts":[[2021,3,16]]},"reference":[{"key":"ref_1","first-page":"583","article-title":"Research and Development Status of MOEMS Accelerometers","volume":"48","author":"Feng","year":"2011","journal-title":"Micronanoelectronic Technol."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Wang, C., Chen, F., Wang, Y., Sadeghpour, S., Wang, C., Baijot, M., Esteves, R., Zhao, C., Bai, J., and Liu, H. (2020). Micromachined Accelerometers with Sub-\u00b5g\/\u221a Hz Noise Floor: A Review. Sensors, 20.","DOI":"10.3390\/s20144054"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1413","DOI":"10.1364\/AO.50.001413","article-title":"Nanometer-scale displacement sensor based on phase-sensitive diffraction grating","volume":"50","author":"Zhao","year":"2011","journal-title":"Appl. Opt."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Hortschitz, W., Kainz, A., Kovacs, G., Steiner, H., Stifter, M., Sauter, T., Schalko, J., Jachimowicz, A., and Keplinger, F. (2018, January 21\u201325). Robust, ultra sensitive MOEMS inertial sensor read out with infrared light. Proceedings of the 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK.","DOI":"10.1109\/MEMSYS.2018.8346715"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"151104","DOI":"10.1063\/1.4979541","article-title":"Optically read displacement detection using phase-modulated diffraction gratings with reduced zeroth-order reflections","volume":"110","author":"Williams","year":"2017","journal-title":"Appl. Phys. Lett."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Williams, R.P., Hall, N.A., and Avenson, B.D. (2019, January 23\u201327). Grating-Based Acceleration Sensors with Optical Interferometric Readout and Closed-Loop Control. Proceedings of the 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany.","DOI":"10.1109\/TRANSDUCERS.2019.8808749"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"768","DOI":"10.1038\/nphoton.2012.245","article-title":"A high-resolution microchip optomechanical accelerometer","volume":"6","author":"Krause","year":"2012","journal-title":"Nat. Photonics"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1027","DOI":"10.1109\/LPT.2014.2312796","article-title":"Design of out-of-plane MOEMS accelerometer with subwavelength gratings","volume":"26","author":"Yao","year":"2014","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"182","DOI":"10.1109\/JMEMS.2002.1007396","article-title":"Sub-10 cm\/sup 3\/interferometric accelerometer with nano-g resolution","volume":"11","author":"Loh","year":"2002","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"800","DOI":"10.1109\/JSEN.2011.2166258","article-title":"A robust and compact fiber Bragg grating vibration sensor for seismic measurement","volume":"12","author":"Weng","year":"2011","journal-title":"IEEE Sens. J."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1235","DOI":"10.1109\/LPT.2010.2052797","article-title":"VCSEL-based tilted fiber grating vibration sensing system","volume":"22","author":"Huang","year":"2010","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2612","DOI":"10.1063\/1.1143878","article-title":"A sensitive interferometric accelerometer","volume":"64","author":"Stephens","year":"1993","journal-title":"Rev. of Sci. Instrum."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1758","DOI":"10.1109\/JLT.2005.863336","article-title":"Analysis of fiber Fabry-P\u00e9rot interferometric sensors using low-coherence light sources","volume":"24","author":"Yu","year":"2006","journal-title":"J. Lightwave Technol."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"425","DOI":"10.1109\/84.946800","article-title":"A high-precision, wide-bandwidth micromachined tunneling accelerometer","volume":"10","author":"Liu","year":"2001","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"37","DOI":"10.1109\/JMEMS.2007.910243","article-title":"Micromachined accelerometers with optical interferometric read-out and integrated electrostatic actuation","volume":"17","author":"Hall","year":"2008","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"770","DOI":"10.1109\/JMEMS.2006.878884","article-title":"Surface and bulk-silicon-micromachined optical displacement sensor fabricated with the SwIFT-Lite\u2122 process","volume":"15","author":"Hall","year":"2006","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"4188","DOI":"10.1364\/AO.54.004188","article-title":"Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation","volume":"54","author":"Lu","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"9094","DOI":"10.1364\/OE.24.009094","article-title":"Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers","volume":"24","author":"Lu","year":"2016","journal-title":"Opt. Express"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"859","DOI":"10.1109\/JMEMS.2017.2693341","article-title":"Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer","volume":"26","author":"Lu","year":"2017","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"7005","DOI":"10.1364\/AO.51.007005","article-title":"Optical accelerometer based on grating interferometer with phase modulation technique","volume":"51","author":"Zhao","year":"2012","journal-title":"Appl. Opt."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"108017","DOI":"10.1016\/j.measurement.2020.108017","article-title":"Investigation of the Thermal Deformation of a Chip-scale Packaged Optical Accelerometer","volume":"163","author":"Fang","year":"2020","journal-title":"Measurement"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"34298","DOI":"10.1364\/OE.27.034298","article-title":"High-resolution micro-grating accelerometer based on a gram-scale proof mass","volume":"27","author":"Gao","year":"2019","journal-title":"Opt. Express"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"6115","DOI":"10.1364\/AO.55.006115","article-title":"Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer","volume":"55","author":"Zhang","year":"2016","journal-title":"Appl. Opt."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"4091","DOI":"10.1364\/AO.52.004091","article-title":"Sensitivity improvement of micro-grating accelerometer based on differential detection method","volume":"52","author":"Wang","year":"2013","journal-title":"Appl. Opt."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"903","DOI":"10.1109\/16.210197","article-title":"Mechanical-Thermal Nosie in Micromachined Acoustic and Vibration Sensors","volume":"40","author":"Gabrielson","year":"1993","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"510","DOI":"10.1049\/mnl.2011.0137","article-title":"Low cross-axis sensitivity micro-gravity microelectromechanical system sandwich capacitance accelerometer","volume":"6","author":"Hu","year":"2011","journal-title":"Micro Nano Lett."},{"key":"ref_27","unstructured":"Merchant, B.J. (2009, January 10\u201311). MEMS Applications in Seismology. Proceedings of the 2009 Seismic Instrumentation Technology Symposium, Palm Springs Valley, CA, USA."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Rao, K., Wei, X., Zhang, S., Zhang, M., Hu, C., Liu, H., and Tu, L.C. (2019). A MEMS micro-g capacitive accelerometer based on through-silicon-wafer-etching process. Micromachines, 10.","DOI":"10.3390\/mi10060380"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Kempe, V. (2011). Inertial MEMS-Principles and Practice, Cambridge University Press.","DOI":"10.1017\/CBO9780511933899"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"125016","DOI":"10.1088\/1361-6439\/aae9cd","article-title":"A precise spacing-control method in MEMS packaging for capacitive accelerometer applications","volume":"28","author":"Wu","year":"2018","journal-title":"J. Micromechanics Microengineering"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"2658","DOI":"10.1364\/AO.49.002658","article-title":"Optical accelerometer based on high-order diffraction beam interference","volume":"49","author":"Chen","year":"2010","journal-title":"Appl. Opt."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"238","DOI":"10.1016\/j.sna.2018.07.050","article-title":"A nano-g micromachined seismic sensor for levelling-free measurements","volume":"280","author":"Wu","year":"2018","journal-title":"Sens. Actuators A Phys."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"4108","DOI":"10.1109\/JSEN.2018.2818066","article-title":"A high stability optical shadow sensor with applications for precision accelerometers","volume":"18","author":"Bramsiepe","year":"2018","journal-title":"IEEE Sens. J."},{"key":"ref_34","doi-asserted-by":"crossref","unstructured":"Pike, W.T., Standley, I.M., Calcutt, S.B., and Mukherjee, A.G. (2018, January 21\u201325). A broad-band silicon microseismometer with 0.25 NG\/rtHz performance. Proceedings of the 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK.","DOI":"10.1109\/MEMSYS.2018.8346496"},{"key":"ref_35","doi-asserted-by":"crossref","unstructured":"Milligan, D.J., Homeijer, B.D., and Walmsley, R.G. (2011, January 28\u201331). An ultra-low noise MEMS accelerometer for seismic imaging. Proceedings of the SENSORS, 2011 IEEE, Limerick, Ireland.","DOI":"10.1109\/ICSENS.2011.6127185"},{"key":"ref_36","doi-asserted-by":"crossref","unstructured":"Pike, W.T., Delahunty, A.K., Mukherjee, A., Dou, G., Liu, H., Calcutt, S., and Standley, I.M. (2014, January 15). A self-levelling nano-g silicon seismometer. Proceedings of the 2014 IEEE SENSORS, Valencia, Spain.","DOI":"10.1109\/ICSENS.2014.6985324"},{"key":"ref_37","doi-asserted-by":"crossref","unstructured":"Olsson, R.H., Keeler, B.E., Czaplewski, D.A., and Carr, D.W. (2007, January 27\u201330). Circuit Techniques for Reducing Low Frequency Noise in Optical MEMS Position and Inertial Sensors. Proceedings of the 2007 IEEE International Symposium on Circuits and Systems, New Orleans, LA, USA.","DOI":"10.1109\/ISCAS.2007.377941"},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"2767","DOI":"10.1063\/1.1149013","article-title":"Technique for measurement of the noise of a sensor in the presence of large background signals","volume":"69","author":"Barzilai","year":"1998","journal-title":"Rev. Sci. Instrum."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/6\/2070\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T05:36:13Z","timestamp":1760160973000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/6\/2070"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,3,16]]},"references-count":38,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2021,3]]}},"alternative-id":["s21062070"],"URL":"https:\/\/doi.org\/10.3390\/s21062070","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2021,3,16]]}}}