{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,6]],"date-time":"2026-05-06T06:40:46Z","timestamp":1778049646956,"version":"3.51.4"},"reference-count":26,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2021,4,4]],"date-time":"2021-04-04T00:00:00Z","timestamp":1617494400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.<\/jats:p>","DOI":"10.3390\/s21072533","type":"journal-article","created":{"date-parts":[[2021,4,5]],"date-time":"2021-04-05T11:48:29Z","timestamp":1617623309000},"page":"2533","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Towards a Highly Sensitive Piezoelectric Nano-Mass Detection\u2014A Model-Based Concept Study"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5759-1134","authenticated-orcid":false,"given":"Jens","family":"Twiefel","sequence":"first","affiliation":[{"name":"Institute of Dynamics and Vibration Research, Leibniz Universit\u00e4t Hannover, An der Universit\u00e4t 1 Geb. 8142, 30823 Grabsen, Germany"}]},{"given":"Anatoly","family":"Glukhovkoy","sequence":"additional","affiliation":[{"name":"Institute of Micro Production Technology, Leibniz Universit\u00e4t Hannover, An der Universit\u00e4t 2, 30823 Grabsen, Germany"}]},{"given":"Sascha","family":"de Wall","sequence":"additional","affiliation":[{"name":"Institute of Micro Production Technology, Leibniz Universit\u00e4t Hannover, An der Universit\u00e4t 2, 30823 Grabsen, Germany"}]},{"given":"Marc Christopher","family":"Wurz","sequence":"additional","affiliation":[{"name":"Institute of Micro Production Technology, Leibniz Universit\u00e4t Hannover, An der Universit\u00e4t 2, 30823 Grabsen, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2030-8825","authenticated-orcid":false,"given":"Merle","family":"Sehlmeyer","sequence":"additional","affiliation":[{"name":"Institute of Electrical Engineering and Measurement Technology, Leibniz Universit\u00e4t Hannover, Appelstr. 9A, 30167 Hannover, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8950-8788","authenticated-orcid":false,"given":"Moritz","family":"Hitzemann","sequence":"additional","affiliation":[{"name":"Institute of Electrical Engineering and Measurement Technology, Leibniz Universit\u00e4t Hannover, Appelstr. 9A, 30167 Hannover, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1725-6657","authenticated-orcid":false,"given":"Stefan","family":"Zimmermann","sequence":"additional","affiliation":[{"name":"Institute of Electrical Engineering and Measurement Technology, Leibniz Universit\u00e4t Hannover, Appelstr. 9A, 30167 Hannover, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2021,4,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1007\/BF01337937","article-title":"Verwendung von Schwingquarzen zur W\u00e4gung d\u00fcnner Schichten und zur Mikrow\u00e4gung","volume":"155","author":"Sauerbrey","year":"1959","journal-title":"Z. 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