{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T01:58:31Z","timestamp":1760234311814,"version":"build-2065373602"},"reference-count":20,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2021,4,29]],"date-time":"2021-04-29T00:00:00Z","timestamp":1619654400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61704026"],"award-info":[{"award-number":["61704026"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young\u2019s moduli. A 2 mm \u00d7 2 mm copper electrode array is located on each electrode layer, forming four parallel plate capacitors as the sensitive elements. The wind in the xy-plane tilts the windward pillar, decreasing two capacitances on the windward side and increasing two capacitances on the leeward side. The wind in the z-axis depresses the windward pillar, resulting in an increase of all four capacitances. Experiments demonstrate that this sensor can measure the wind speed up to 23.9 m\/s and the wind direction over the full 360\u00b0 range of the xy-plane. The sensitivities of wind speed are close to 4 fF\u00b7m\u22121\u00b7s and 3 fF\u00b7m\u22121\u00b7s in the xy-plane and z-axis, respectively.<\/jats:p>","DOI":"10.3390\/s21093101","type":"journal-article","created":{"date-parts":[[2021,4,29]],"date-time":"2021-04-29T10:30:41Z","timestamp":1619692241000},"page":"3101","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["2.5D Flexible Wind Sensor Using Differential Plate Capacitors"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1979-3560","authenticated-orcid":false,"given":"Yu","family":"Wan","sequence":"first","affiliation":[{"name":"Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China"}]},{"given":"Zhenxiang","family":"Yi","sequence":"additional","affiliation":[{"name":"Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China"}]}],"member":"1968","published-online":{"date-parts":[[2021,4,29]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Suomi, I., and Vihma, T. 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