{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,6]],"date-time":"2026-06-06T20:35:23Z","timestamp":1780778123964,"version":"3.54.1"},"reference-count":37,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2021,4,30]],"date-time":"2021-04-30T00:00:00Z","timestamp":1619740800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the sensor\u2019s operation: the temperature drift of bias and the temperature drift of scale factor. This method requires less data to obtain the characteristic parameters, allowing a faster calibration. Furthermore, using an equation with fewer parameters reduces the computational cost of compensation. After studying six accelerometers, model LIS3DSH, their characteristic parameters are obtained in a temperature range between 15 \u00b0C and 55 \u00b0C. It is observed that the Temperature Drift of Bias (TDB) is the parameter with the greatest influence on thermal drift, reaching 1.3 mg\/\u00b0C. The Temperature Drift of Scale Factor (TDSF) is always negative and ranges between 0 and \u2212400 ppm\/\u00b0C. With these parameters, the thermal drifts are compensated in tests with 20 \u00b0C of thermal variation. An average improvement of 47% was observed. In the axes where the thermal drift was greater than 1 mg\/\u00b0C, the improvement was greater than 80%. Other sensor behaviors have also been analyzed, such as temporal drift (up to 1 mg\/h for three hours) and self-heating (2\u20133 \u00b0C in the first hours with the corresponding drift). Thermal compensation has been found to reduce the effect of the latter in the first hours after power-up of the sensor by 43%.<\/jats:p>","DOI":"10.3390\/s21093117","type":"journal-article","created":{"date-parts":[[2021,4,30]],"date-time":"2021-04-30T05:10:55Z","timestamp":1619759455000},"page":"3117","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1562-4433","authenticated-orcid":false,"given":"Javier","family":"Mart\u00ednez","sequence":"first","affiliation":[{"name":"Department of Electronic Engineering, Escuela Universitaria Polit\u00e9cnica de la Almunia, C\/Mayor 5, La Almunia de Do\u00f1a Godina, 50100 Zaragoza, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3618-4940","authenticated-orcid":false,"given":"David","family":"Asiain","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering, Escuela Universitaria Polit\u00e9cnica de la Almunia, C\/Mayor 5, La Almunia de Do\u00f1a Godina, 50100 Zaragoza, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7500-4650","authenticated-orcid":false,"given":"Jos\u00e9 Ram\u00f3n","family":"Beltr\u00e1n","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering and Communications, Universidad de Zaragoza, C\/Mar\u00eda de Luna 1, 50018 Zaragoza, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2021,4,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"100","DOI":"10.1109\/MCOM.2013.6495768","article-title":"MEMS inertial sensors: A tutorial overview","volume":"51","author":"Shaeffer","year":"2013","journal-title":"IEEE Commun. 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