{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,29]],"date-time":"2026-03-29T06:22:13Z","timestamp":1774765333242,"version":"3.50.1"},"reference-count":44,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2021,6,14]],"date-time":"2021-06-14T00:00:00Z","timestamp":1623628800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100014132","name":"European Metrology Programme for Innovation and Research","doi-asserted-by":"publisher","award":["17IND05 MicroProbes"],"award-info":[{"award-number":["17IND05 MicroProbes"]}],"id":[{"id":"10.13039\/100014132","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass\u2013concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors.<\/jats:p>","DOI":"10.3390\/s21124088","type":"journal-article","created":{"date-parts":[[2021,6,14]],"date-time":"2021-06-14T22:25:46Z","timestamp":1623709546000},"page":"4088","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-2271-2792","authenticated-orcid":false,"given":"Andi","family":"Setiono","sequence":"first","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"},{"name":"Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1027-9968","authenticated-orcid":false,"given":"Michael","family":"Fahrbach","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]},{"given":"Alexander","family":"Deutschinger","sequence":"additional","affiliation":[{"name":"SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria"}]},{"given":"Ernest J.","family":"Fantner","sequence":"additional","affiliation":[{"name":"SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2730-8059","authenticated-orcid":false,"given":"Christian H.","family":"Schwalb","sequence":"additional","affiliation":[{"name":"GETec Microscopy GmbH, 1220 Vienna, Austria"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0419-313X","authenticated-orcid":false,"given":"Iqbal","family":"Syamsu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"},{"name":"Research Center for Electronics and Telecommunication, Indonesian Institute of Sciences (LIPI), Jl. Sangkuriang-Komplek LIPI Gedung 20, Bandung 40135, Indonesia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4522-3625","authenticated-orcid":false,"given":"Hutomo Suryo","family":"Wasisto","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5801-813X","authenticated-orcid":false,"given":"Erwin","family":"Peiner","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2021,6,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Elwenspoek, M., and Wiegerink, R. (2001). 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