{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,1]],"date-time":"2026-05-01T08:54:29Z","timestamp":1777625669803,"version":"3.51.4"},"reference-count":45,"publisher":"MDPI AG","issue":"16","license":[{"start":{"date-parts":[[2021,8,17]],"date-time":"2021-08-17T00:00:00Z","timestamp":1629158400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51978079"],"award-info":[{"award-number":["51978079"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100013338","name":"Major Technology Innovation of Hubei Province","doi-asserted-by":"publisher","award":["2019AAA011"],"award-info":[{"award-number":["2019AAA011"]}],"id":[{"id":"10.13039\/501100013338","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Science and Technology Research Program from Educational Committee of Hubei Province","award":["Q20201309"],"award-info":[{"award-number":["Q20201309"]}]},{"name":"Open Fund of Key Laboratory of Exploration Technologies for Oil and Gas Resources (Yangtze University), Ministry of Educa-tion","award":["K2021-18"],"award-info":[{"award-number":["K2021-18"]}]},{"name":"Open Fund of Cooperative Innovation Center of Unconventional Oil and Gas (Ministry of Education &amp; Hubei Province), Yangtze University","award":["UOG2020-03"],"award-info":[{"award-number":["UOG2020-03"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are \u00b136.2\u00b0@200 VDC and \u00b136.2\u00b0@180 VDC, respectively, and the dynamic tilting angles increases linearly with the driving voltage. Device B with a 10 mm-length square mirror provides the accessible tilting angles of \u00b136.0\u00b0@200 VDC and \u00b135.9\u00b0@180 VDC for horizontal and diagonal actuations, respectively. In the dynamic actuation regime, the orthogonal and diagonal tilting angles at 10 Hz are \u00b18.1\u00b0\/Vpp and \u00b18.9\u00b0\/Vpp, respectively. This work confirmed that the Union Jack-shaped arrangement of trapezoidal actuators is a promising option for designing powerful optical devices.<\/jats:p>","DOI":"10.3390\/s21165513","type":"journal-article","created":{"date-parts":[[2021,8,17]],"date-time":"2021-08-17T03:43:04Z","timestamp":1629171784000},"page":"5513","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5156-033X","authenticated-orcid":false,"given":"Changhe","family":"Sun","sequence":"first","affiliation":[{"name":"School of Electronics and Information, Yangtze University, Jingzhou 434023, China"},{"name":"Cooperative Innovation Center of Unconventional Oil and Gas, Yangtze University, Ministry of Education, Wuhan 430100, China"},{"name":"Key Laboratory of Optoelectronic Technology & Systems, Chongqing University, Ministry of Education, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2988-8843","authenticated-orcid":false,"given":"Yufei","family":"Liu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Technology & Systems, Chongqing University, Ministry of Education, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bolun","family":"Li","sequence":"additional","affiliation":[{"name":"School of Electronics and Information, Yangtze University, Jingzhou 434023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenqu","family":"Su","sequence":"additional","affiliation":[{"name":"School of Electronics and Information, Yangtze University, Jingzhou 434023, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mingzhang","family":"Luo","sequence":"additional","affiliation":[{"name":"School of Electronics and Information, Yangtze University, Jingzhou 434023, China"},{"name":"Cooperative Innovation Center of Unconventional Oil and Gas, Yangtze University, Ministry of Education, Wuhan 430100, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guofeng","family":"Du","sequence":"additional","affiliation":[{"name":"School of Electronics and Information, Yangtze University, Jingzhou 434023, China"},{"name":"Cooperative Innovation Center of Unconventional Oil and Gas, Yangtze University, Ministry of Education, Wuhan 430100, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yaming","family":"Wu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2021,8,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"259","DOI":"10.1109\/JMEMS.2013.2295470","article-title":"MEMS Laser Scanners: A Review","volume":"23","author":"Holmstrom","year":"2014","journal-title":"J. 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