{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,18]],"date-time":"2026-04-18T01:11:00Z","timestamp":1776474660599,"version":"3.51.2"},"reference-count":35,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2021,8,31]],"date-time":"2021-08-31T00:00:00Z","timestamp":1630368000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001659","name":"Deutsche Forschungsgemeinschaft","doi-asserted-by":"publisher","award":["INST 273\/75-1 FUGG"],"award-info":[{"award-number":["INST 273\/75-1 FUGG"]}],"id":[{"id":"10.13039\/501100001659","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100008530","name":"European Regional Development Fund","doi-asserted-by":"publisher","award":["2018VF0008 and 2018FE9020"],"award-info":[{"award-number":["2018VF0008 and 2018FE9020"]}],"id":[{"id":"10.13039\/501100008530","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.<\/jats:p>","DOI":"10.3390\/s21175862","type":"journal-article","created":{"date-parts":[[2021,8,31]],"date-time":"2021-08-31T22:58:15Z","timestamp":1630450695000},"page":"5862","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5611-7852","authenticated-orcid":false,"given":"Ingo","family":"Ortlepp","sequence":"first","affiliation":[{"name":"Institute of Process Measurement and Sensor Technology, Technische Universit\u00e4t Ilmenau, 98693 Ilmenau, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jaqueline","family":"Stauffenberg","sequence":"additional","affiliation":[{"name":"Institute of Process Measurement and Sensor Technology, Technische Universit\u00e4t Ilmenau, 98693 Ilmenau, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1672-2978","authenticated-orcid":false,"given":"Eberhard","family":"Manske","sequence":"additional","affiliation":[{"name":"Institute of Process Measurement and Sensor Technology, Technische Universit\u00e4t Ilmenau, 98693 Ilmenau, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2021,8,31]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"032002","DOI":"10.1088\/2631-7990\/ac087c","article-title":"Sub-10-nm fabrication: Methods and applications","volume":"3","author":"Chen","year":"2021","journal-title":"Int. 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