{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,18]],"date-time":"2026-03-18T07:40:21Z","timestamp":1773819621484,"version":"3.50.1"},"reference-count":28,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2021,9,13]],"date-time":"2021-09-13T00:00:00Z","timestamp":1631491200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Key Research and Development Program of Shaanxi Province","award":["2019ZDLGY16-01"],"award-info":[{"award-number":["2019ZDLGY16-01"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Light loss is one of the main factors affecting the quantum efficiency of photodetectors. Many researchers have attempted to use various methods to improve the quantum efficiency of silicon-based photodetectors. Herein, we designed highly anti-reflective silicon nanometer truncated cone arrays (Si NTCAs) as a light-trapping layer in combination with graphene to construct a high-performance graphene\/Si NTCAs photodetector. This heterojunction structure overcomes the weak light absorption and severe surface recombination in traditional silicon-based photodetectors. At the same time, graphene can be used both as a broad-spectrum absorption layer and as a transparent electrode to improve the response speed of heterojunction devices. Due to these two mechanisms, this photodetector had a high quantum efficiency of 97% at a wavelength of 780 nm and a short rise\/fall time of 60\/105\u00b5s. This device design promotes the development of silicon-based photodetectors and provides new possibilities for integrated photoelectric systems.<\/jats:p>","DOI":"10.3390\/s21186146","type":"journal-article","created":{"date-parts":[[2021,9,14]],"date-time":"2021-09-14T03:46:14Z","timestamp":1631591174000},"page":"6146","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["High Quantum Efficiency and Broadband Photodetector Based on Graphene\/Silicon Nanometer Truncated Cone Arrays"],"prefix":"10.3390","volume":"21","author":[{"given":"Jijie","family":"Zhao","sequence":"first","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]},{"given":"Huan","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]},{"given":"Lier","family":"Deng","sequence":"additional","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5221-1956","authenticated-orcid":false,"given":"Minyu","family":"Bai","sequence":"additional","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]},{"given":"Fei","family":"Xie","sequence":"additional","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]},{"given":"Shuai","family":"Wen","sequence":"additional","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4789-821X","authenticated-orcid":false,"given":"Weiguo","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Opto-Electronic Engineering, Xi\u2019an Technological University, Xi\u2019an 710021, China"}]}],"member":"1968","published-online":{"date-parts":[[2021,9,13]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"225208","DOI":"10.1088\/1361-6528\/ab767f","article-title":"Role of nanowire length on the performance of a self-driven NIR photodetector based on mono\/bi-layer graphene (cam-phor)\/Si-nanowire Schottky junction","volume":"31","author":"Chaliyawala","year":"2020","journal-title":"Nanotechnology"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"704","DOI":"10.1016\/j.nantod.2016.10.001","article-title":"Design and fabrication of silicon nanowires towards efficient solar cells","volume":"11","author":"Yu","year":"2016","journal-title":"Nano Today"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"10742","DOI":"10.1039\/C5CC02331A","article-title":"Silicon nanowire arrays coupled with cobalt phosphide spheres as low-cost photocathodes for efficient solar hydrogen evolution","volume":"51","author":"Bao","year":"2015","journal-title":"Chem. Commun."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"175","DOI":"10.1186\/1556-276X-9-175","article-title":"Structural and optical properties of ITO\/TiO2 anti-reflective films for solar cell applications","volume":"9","author":"Ali","year":"2014","journal-title":"Nanoscale Res. Lett."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Bai, M., Liu, H., Xie, F., Zhao, J., Liu, W., and Xie, H. (2020). Light trapping enhancement via structure design. Int. J. Mod. Phys. B, 34.","DOI":"10.1142\/S021797922050040X"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"14777","DOI":"10.1039\/C9NR05019A","article-title":"High temperature stable plasmonic and cavity resonances in metal nanoparticle decorated silicon nanopillars for strong broadband absorption in photothermal applications","volume":"11","author":"Hou","year":"2019","journal-title":"Nanoscale"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"061112","DOI":"10.1063\/1.2870080","article-title":"Broadband moth-eye antireflection coatings on silicon","volume":"92","author":"Sun","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"231105","DOI":"10.1063\/1.2821833","article-title":"Templated fabrication of large area subwavelength antireflection gratings on silicon","volume":"91","author":"Sun","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"2007987","DOI":"10.1002\/adfm.202007987","article-title":"All-Dielectric Nanostructure Fabry\u2013P\u00e9rot-Enhanced Mie Resonances Coupled with Photogain Modulation toward Ultrasensitive In2S3 Photodetector","volume":"31","author":"Lu","year":"2020","journal-title":"Adv. Funct. Mater."},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Mandal, M., Maitra, A., Das, T., and Das, C.K. (2015). Graphene and Related Two-Dimensional Materials, John Wiley & Sons, Inc.","DOI":"10.1002\/9781119131816.ch1"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"2033","DOI":"10.1007\/s00542-016-2914-3","article-title":"Small scale effect on the pull-in instability and vibration of graphene sheets","volume":"23","author":"Wang","year":"2016","journal-title":"Microsyst. Technol."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"104040","DOI":"10.1016\/j.rinp.2021.104040","article-title":"Tunable plasmon induced transparency with high transmittance in a two-layer graphene structure","volume":"23","author":"Zheng","year":"2021","journal-title":"Results Phys."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"3799","DOI":"10.1021\/nl802129f","article-title":"Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching","volume":"8","author":"Choi","year":"2008","journal-title":"Nano Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"30","DOI":"10.1021\/nl801827v","article-title":"Large area, few layer graphene films on arbitrary substrates by chemical vapor deposition","volume":"9","author":"Reina","year":"2009","journal-title":"Nano. Lett."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"210","DOI":"10.1038\/nnano.2008.67","article-title":"Monitoring dopants by Raman scattering in an electrochemically top-gated graphene transistor","volume":"3","author":"Das","year":"2008","journal-title":"Nat. Nanotechnol."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1038\/s41467-021-23436-x","article-title":"High-responsivity graphene photodetectors integrated on silicon microring resonators","volume":"12","author":"Schuler","year":"2021","journal-title":"Nat. Commun."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"2700","DOI":"10.1021\/acs.nanolett.5b00407","article-title":"Enhanced Light Emission from Large-Area Monolayer MoS2 Using Plasmonic Nanodisc Arrays","volume":"15","author":"Butun","year":"2015","journal-title":"Nano Lett."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Bai, M., Wang, Z., Zhao, J., Wen, S., Zhang, P., Xie, F., and Liu, H. (2021). 2D MoS2 Encapsulated Silicon Nanopillar Array with High-Performance Light Trapping Obtained by Direct CVD Process. Crystals, 11.","DOI":"10.3390\/cryst11030267"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"2563","DOI":"10.1021\/nl500366c","article-title":"Nanopyramid Structure for Ultrathin c-Si Tandem Solar Cells","volume":"14","author":"Li","year":"2014","journal-title":"Nano Lett."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"276","DOI":"10.1364\/OL.35.000276","article-title":"Antireflective submicrometer gratings on thin-film silicon solar cells for light-absorption en-hancement","volume":"35","author":"Song","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"107","DOI":"10.1021\/acsphotonics.8b00951","article-title":"High responsivity and quantum efficiency of graphene\/silicon photodiodes achieved by interdigitating Schottky and gated regions","volume":"6","author":"Riazimehr","year":"2018","journal-title":"ACS Photonics"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"2910","DOI":"10.1002\/adfm.201500216","article-title":"MoS2\/Si Heterojunction with Vertically Standing Layered Structure for Ultrafast, High-Detectivity, Self-Driven Visi-ble-Near Infrared Photodetectors","volume":"25","author":"Wang","year":"2015","journal-title":"Adv. Funct. Mater."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"4126","DOI":"10.1021\/acsami.0c15819","article-title":"An Ultrasensitive Gateless Photodetector Based on the 2D Bilayer MoS2\u20131D Si Nanowire\u20130D Ag Nanoparticle Hybrid Structure","volume":"13","author":"Mao","year":"2021","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"1567","DOI":"10.1021\/acsanm.0c03048","article-title":"Vertical Tip-to-Tip Interconnection p\u2013n Silicon Nanowires for Plasmonic Hot Electron-Enhanced Broadband Photodetectors","volume":"4","author":"Huang","year":"2021","journal-title":"ACS Appl. Nano Mater."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"272","DOI":"10.1016\/j.solmat.2018.03.017","article-title":"Photovoltaic high-performance broadband photodetector based on MoS2\/Si nanowire array heterojunction","volume":"182","author":"Wu","year":"2018","journal-title":"Sol. Energy Mater. Sol. Cells"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"4015","DOI":"10.1021\/nn501001j","article-title":"Core\u2013Shell Heterojunction of Silicon Nanowire Arrays and Carbon Quantum Dots for Photovoltaic Devices and Self-Driven Photodetectors","volume":"8","author":"Xie","year":"2014","journal-title":"ACS Nano"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"e1804422","DOI":"10.1002\/adma.201804422","article-title":"Lowering the Schottky Barrier Height by Graphene\/Ag Electrodes for High-Mobility MoS2 Field-Effect Transistors","volume":"31","author":"Chee","year":"2018","journal-title":"Adv. Mater."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"251106","DOI":"10.1063\/1.5009704","article-title":"Spectral photovoltaic response of graphene-silicon heterojunction","volume":"111","author":"Ying","year":"2017","journal-title":"Appl. Phys. Lett."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/18\/6146\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T07:02:03Z","timestamp":1760166123000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/18\/6146"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,9,13]]},"references-count":28,"journal-issue":{"issue":"18","published-online":{"date-parts":[[2021,9]]}},"alternative-id":["s21186146"],"URL":"https:\/\/doi.org\/10.3390\/s21186146","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,9,13]]}}}