{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T15:27:20Z","timestamp":1777908440692,"version":"3.51.4"},"reference-count":33,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2021,10,3]],"date-time":"2021-10-03T00:00:00Z","timestamp":1633219200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51935011"],"award-info":[{"award-number":["51935011"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52075505"],"award-info":[{"award-number":["52075505"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Innovative Research Group Project of National Science Foundation of China","award":["51821003"],"award-info":[{"award-number":["51821003"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 \u00b0C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material for the first time in the field of wireless passive sensing because of its ultra-high melting point (2800 \u00b0C) and excellent mechanical properties at elevated temperatures. The sensor mainly consists of inductance coils and an embedded sealed cavity. The cavity length decreases with the applied pressure, leading to a monotonic variation in the resonant frequency of the sensor, which can be retrieved wirelessly via a readout antenna. The capacitor cavity was fabricated using a MgO MEMS technique. This MEMS processing technique, including the wet chemical etching and direct bonding process, can improve the operating temperature of the sensor. The experimental results indicate that the proposed sensor can stably operate at an ambient environment of 22\u2013900 \u00b0C and 0\u2013700 kPa, and the pressure sensitivity of this sensor at room temperature is 14.52 kHz\/kPa. In addition, the sensor with a simple fabrication process shows high potential for practical engineering applications in harsh environments.<\/jats:p>","DOI":"10.3390\/s21196602","type":"journal-article","created":{"date-parts":[[2021,10,10]],"date-time":"2021-10-10T21:37:49Z","timestamp":1633901869000},"page":"6602","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4547-0992","authenticated-orcid":false,"given":"Pinggang","family":"Jia","sequence":"first","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jia","family":"Liu","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiang","family":"Qian","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qianyu","family":"Ren","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guowen","family":"An","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jijun","family":"Xiong","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2021,10,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1701","DOI":"10.1016\/j.apenergy.2009.10.024","article-title":"Performance and emission characteristics of biofuel in a small-scale gas turbine engine","volume":"87","author":"Habib","year":"2009","journal-title":"Appl. Energy"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"569","DOI":"10.1007\/s12206-009-1223-5","article-title":"Fast-response total pressure probe fore turbomachinery application. Journal of Mechanical Science and Technology","volume":"24","author":"Kang","year":"2010","journal-title":"J. Mech. Sci. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"3745","DOI":"10.1109\/JSEN.2014.2322959","article-title":"Passive Wireless Sensor Applications for NASA\u2019s Extreme Aeronautical Environments","volume":"14","author":"Wilson","year":"2014","journal-title":"IEEE Sens. J."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"337","DOI":"10.1109\/JMEMS.2002.800939","article-title":"Wireless micromachined ceramic pressure sensor for high-temperature applications","volume":"11","author":"Fonseca","year":"2002","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1207","DOI":"10.1109\/TUFFC.2007.374","article-title":"Optimal selection of piezoelectric substrates and crystal cuts for SAW-based pressure and temperature sensors","volume":"54","author":"Zhang","year":"2007","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"242907","DOI":"10.1063\/1.4811163","article-title":"Calcium aluminate silicate Ca2Al2SiO7 single crystal applicable to piezoelectric sensors at high temperature","volume":"102","author":"Takeda","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"40","DOI":"10.1016\/j.sna.2012.02.003","article-title":"Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals","volume":"178","author":"Kim","year":"2012","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"20305","DOI":"10.3390\/s150820305","article-title":"Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh Environments","volume":"15","author":"Ngo","year":"2015","journal-title":"Sensors"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"174","DOI":"10.1109\/LED.2014.2379262","article-title":"4H-SiC piezoresistive pressure sensors at 800 \u00b0C with observed sensitivity recovery","volume":"36","author":"Okojie","year":"2015","journal-title":"IEEE Electron. Device Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"277","DOI":"10.1016\/j.sna.2012.03.027","article-title":"High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer","volume":"179","author":"Li","year":"2012","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"4609","DOI":"10.1364\/OL.38.004609","article-title":"High-temperature fiber-optic Fabry\u2013Perot interferometric pressure sensor fabricated by femtosecond laser","volume":"38","author":"Zhang","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Yi, J., Lally, E., Wang, A., and Xu, Y. (2010). Demonstration of an All-Sapphire Fabry\u2013P\u00e9rot Cavity for Pressure Sensing. IEEE Photon- Technol. Lett., 23.","DOI":"10.1109\/LPT.2010.2089614"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"095016","DOI":"10.1088\/0960-1317\/25\/9\/095016","article-title":"Thermomechanical properties and performance of ceramic resonators for wireless pressure reading at high temperatures","volume":"25","author":"Sturesson","year":"2015","journal-title":"J. Micromech. Microeng."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"822","DOI":"10.1109\/JMEMS.2016.2602298","article-title":"LC Passive Wireless Sensors Toward a Wireless Sensing Platform: Status, Prospects, and Challenges","volume":"25","author":"Huang","year":"2016","journal-title":"J. Microelectromechanical Syst."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"2976","DOI":"10.1109\/TIM.2011.2122110","article-title":"A wireless sensor readout systemcircuit concept, simulation, and accuracy","volume":"60","author":"Nopper","year":"2011","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"13097","DOI":"10.3390\/s150613097","article-title":"Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments","volume":"15","author":"Li","year":"2015","journal-title":"Sensors"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1241","DOI":"10.1016\/j.microrel.2011.02.018","article-title":"LTCC package for high temperature applications","volume":"51","author":"Nowak","year":"2011","journal-title":"Microelectron. Reliab."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"711","DOI":"10.1016\/j.snb.2016.08.073","article-title":"A novel wireless gas sensor based on LTCC technology","volume":"239","author":"Ma","year":"2017","journal-title":"Sens. Actuators B: Chem."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"16729","DOI":"10.3390\/s150716729","article-title":"A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature\/Pressure Environments","volume":"15","author":"Qin","year":"2015","journal-title":"Sensors"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"299","DOI":"10.1016\/j.sna.2015.10.052","article-title":"Antenna-resonator integrated wireless passive temperature sensor based on low-temperature co-fired ceramic for harsh environment","volume":"236","author":"Tan","year":"2015","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Gao, R., Hong, Y., Zhang, H., Liu, W., Liang, T., Zhang, W., and Xiong, J. (2015). A Wireless Pressure Microsensor Fabricated in HTCC Technology for Dynamic Pressure Monitoring in Harsh Environments. Int. J. Distrib. Sens. Netw., 11.","DOI":"10.1155\/2015\/974742"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"1956","DOI":"10.1109\/JSEN.2009.2030974","article-title":"A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology","volume":"9","author":"Radosavljevic","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"105","DOI":"10.1109\/JSEN.2018.2872915","article-title":"A Novel Surface LCLC Wireless Passive Temperature Sensor Applied in Ultra-High Temperature Measurement","volume":"19","author":"Ji","year":"2018","journal-title":"IEEE Sens. J."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"433","DOI":"10.1016\/j.snb.2018.04.094","article-title":"A LC wireless passive temperature-pressure-humidity (TPH) sensor integrated on LTCC ceramic for harsh monitoring","volume":"270","author":"Tan","year":"2018","journal-title":"Sens. Actuators B: Chem."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"S129","DOI":"10.1016\/j.ceramint.2018.08.159","article-title":"Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology","volume":"44","author":"Lin","year":"2018","journal-title":"Ceram. Int."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"406","DOI":"10.1016\/j.sna.2018.08.020","article-title":"Wireless passive pressure sensor based on sapphire direct bonding for harsh environments","volume":"280","author":"Li","year":"2018","journal-title":"Sens. Actuators A: Phys."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"158","DOI":"10.1007\/s00339-019-2466-3","article-title":"Epitaxial codoped BaSnO3 thin films with tunable optical bandgap on MgO substrate","volume":"125","author":"Gao","year":"2019","journal-title":"Appl. Phys. A Mater. Sci. Process"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"837","DOI":"10.1364\/OME.9.000837","article-title":"Double-pass high-efficiency sumfrequency generation of a broadband orange laser in a single MgO: PPLN crystal","volume":"9","author":"Choge","year":"2019","journal-title":"Opt. Mater. Express"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Wu, S.-Y., Hung, C.-Y., and Hsu, W. (2014). A wirelessly readable and resettable shock recorder through the integration of LC circuits and MEMS devices. Smart Mater. Struct., 23.","DOI":"10.1088\/0964-1726\/23\/9\/095030"},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Li, C., Tan, Q., Xiong, J., Jia, P., Hong, Y., Ren, Z., Luo, T., Liu, J., Xue, C., and Zhang, W. (2014). A noncontact wireless passive radio frequency (RF) resonant pressure sensor with optimized design for applications in high-temperature environments. Meas. Sci. Technol., 25.","DOI":"10.1088\/0957-0233\/25\/7\/075101"},{"key":"ref_31","unstructured":"Giovanni, M. (1982). Flat and Corrugated Diaphragm Design Handbook, Mercel Dekker."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"015001","DOI":"10.1088\/1361-6439\/ab504d","article-title":"Surface characterization of patterning on MgO single crystals using wet chemical etching process to advance MEMS devices","volume":"30","author":"Liu","year":"2019","journal-title":"J. Micromechanics Microengineering"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"67242","DOI":"10.1109\/ACCESS.2020.2985750","article-title":"Hydrophilic Direct Bonding of MgO\/MgO for High-Temperature MEMS Devices","volume":"8","author":"Liu","year":"2020","journal-title":"IEEE Access"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/19\/6602\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T07:09:03Z","timestamp":1760166543000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/19\/6602"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,10,3]]},"references-count":33,"journal-issue":{"issue":"19","published-online":{"date-parts":[[2021,10]]}},"alternative-id":["s21196602"],"URL":"https:\/\/doi.org\/10.3390\/s21196602","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,10,3]]}}}