{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,12]],"date-time":"2026-05-12T20:12:50Z","timestamp":1778616770387,"version":"3.51.4"},"reference-count":47,"publisher":"MDPI AG","issue":"22","license":[{"start":{"date-parts":[[2021,11,15]],"date-time":"2021-11-15T00:00:00Z","timestamp":1636934400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100002241","name":"Japan Science and Technology Agency","doi-asserted-by":"publisher","award":["JPMJTM20K2"],"award-info":[{"award-number":["JPMJTM20K2"]}],"id":[{"id":"10.13039\/501100002241","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100014735","name":"JKA Foundation","doi-asserted-by":"publisher","award":["2021M-201"],"award-info":[{"award-number":["2021M-201"]}],"id":[{"id":"10.13039\/501100014735","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>By using the stress\u2013impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.<\/jats:p>","DOI":"10.3390\/s21227578","type":"journal-article","created":{"date-parts":[[2021,11,15]],"date-time":"2021-11-15T20:46:47Z","timestamp":1637009207000},"page":"7578","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Micromechanical Force Sensor Using the Stress\u2013Impedance Effect of Soft Magnetic FeCuNbSiB"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5003-0238","authenticated-orcid":false,"given":"Joerg","family":"Froemel","sequence":"first","affiliation":[{"name":"Division for the Establishment of Frontier Sciences, Organization for Advanced Studies, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan"},{"name":"Advanced Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2794-3901","authenticated-orcid":false,"given":"Gildas","family":"Diguet","sequence":"additional","affiliation":[{"name":"Division for the Establishment of Frontier Sciences, Organization for Advanced Studies, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan"},{"name":"Advanced Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6808-5106","authenticated-orcid":false,"given":"Masanori","family":"Muroyama","sequence":"additional","affiliation":[{"name":"Division for the Establishment of Frontier Sciences, Organization for Advanced Studies, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan"},{"name":"Department of Robotics, Graduate School of Engineering, Tohoku University, 6-6-01, Aza Aoba, Aramaki Aoba-ku, Sendai 980-8579, Japan"},{"name":"Department of Electrical and Electronic Engineering, Faculty of Engineering, Tohoku Institute of Technology, Yagiyama Kasumi-cho 35-1, Taihaku-ku, Sendai 982-8577, Japan"}]}],"member":"1968","published-online":{"date-parts":[[2021,11,15]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"195","DOI":"10.1016\/j.robot.2015.07.015","article-title":"Tactile sensing in dexterous robot hands\u2014Review","volume":"74","author":"Kappassov","year":"2015","journal-title":"Rob. 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