{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T02:34:56Z","timestamp":1760236496260,"version":"build-2065373602"},"reference-count":60,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2021,11,26]],"date-time":"2021-11-26T00:00:00Z","timestamp":1637884800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Lately, wearable applications featuring photonic on-chip sensors are on the rise. Among many ways of controlling and\/or modulating, the acousto-optic technique is seen to be a popular technique. This paper undertakes the study of different multilayer structures that can be fabricated for realizing an acousto-optic device, the objective being to obtain a high acousto-optic figure of merit (AOFM). By varying the thicknesses of the layers of these materials, several properties are discussed. The study shows that the multilayer thin film structure-based devices can give a high value of electromechanical coupling coefficient (k2) and a high AOFM as compared to the bulk piezoelectric\/optical materials. The study is conducted to find the optimal normalised thickness of the multilayer structures with a material possessing the best optical and piezoelectric properties for fabricating acousto-optic devices. Based on simulations and studies of SAW propagation characteristics such as the electromechanical coupling coefficient (k2) and phase velocity (v), the acousto-optic figure of merit is calculated. The maximum value of the acousto-optic figure of merit achieved is higher than the AOFM of all the individual materials used in these layer structures. The suggested SAW device has potential application in wearable and small footprint acousto-optic devices and gives better results than those made with bulk piezoelectric materials.<\/jats:p>","DOI":"10.3390\/s21237863","type":"journal-article","created":{"date-parts":[[2021,12,1]],"date-time":"2021-12-01T01:45:02Z","timestamp":1638323102000},"page":"7863","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["FEM Analysis of Various Multilayer Structures for CMOS Compatible Wearable Acousto-Optic Devices"],"prefix":"10.3390","volume":"21","author":[{"given":"Mehwish","family":"Hanif","sequence":"first","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, Seri Iskandar 32610, Perak, Malaysia"}]},{"given":"Varun","family":"Jeoti","sequence":"additional","affiliation":[{"name":"Faculty of Technical Sciences, University of Novi Sad, Trg Dositeja Obradovica 6, 21000 Novi Sad, Serbia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6073-8790","authenticated-orcid":false,"given":"Mohamad Radzi","family":"Ahmad","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, Seri Iskandar 32610, Perak, Malaysia"}]},{"given":"Muhammad Zubair","family":"Aslam","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, Seri Iskandar 32610, Perak, Malaysia"}]},{"given":"Saima","family":"Qureshi","sequence":"additional","affiliation":[{"name":"Faculty of Technical Sciences, University of Novi Sad, Trg Dositeja Obradovica 6, 21000 Novi Sad, Serbia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2098-189X","authenticated-orcid":false,"given":"Goran","family":"Stojanovic","sequence":"additional","affiliation":[{"name":"Faculty of Technical Sciences, University of Novi Sad, Trg Dositeja Obradovica 6, 21000 Novi Sad, Serbia"}]}],"member":"1968","published-online":{"date-parts":[[2021,11,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"227","DOI":"10.1039\/C0AN00449A","article-title":"Photonics-on-a-chip: Recent advances in integrated waveguides as enabling detection elements for real-world, lab-on-a-chip biosensing applications","volume":"136","author":"Washburn","year":"2011","journal-title":"Analyst"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"012002","DOI":"10.1088\/2515-7647\/ab6742","article-title":"Opportunities for photonic integrated circuits in optical gas sensors","volume":"2","author":"Heck","year":"2020","journal-title":"J. Phys. Photonics"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1155\/2008\/383927","article-title":"Silicon photonic biosensors for lab-on-a-chip applications","volume":"2008","author":"Zinoviev","year":"2008","journal-title":"Adv. Opt. Technol."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Zhu, H., Goi, K., Ishikura, N., and Omichi, K. (2018, January 2\u20135). Silicon Photonics Based System-On-Chip Gas Sensor. Proceedings of the Optical Fiber Sensors, Zurich, Switzerland.","DOI":"10.1364\/OFS.2018.ThE46"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Mic\u00f3, G., Gargallo, B., Pastor, D., and Mu\u00f1oz, P. (2019). Integrated optic sensing spectrometer: Concept and design. Sensors, 19.","DOI":"10.3390\/s19051018"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"4214","DOI":"10.1038\/s41467-019-12157-x","article-title":"Surface acoustic wave photonic devices in silicon on insulator","volume":"10","author":"Munk","year":"2019","journal-title":"Nat. Commun."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Poveda, A.C., B\u00fchler, D.D., S\u00e1ez, A.C., Santos, P.V., and Lima, M.M.d. (2018). Optical waveguide devices modulated by surface acoustic waves. arXiv.","DOI":"10.1088\/1361-6463\/ab1464"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1433","DOI":"10.1364\/OE.27.001433","article-title":"Surface acoustic waves for acousto-optic modulation in buried silicon nitride waveguides","volume":"27","author":"Porcel","year":"2019","journal-title":"Opt. Express"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Li, J., Gui, Y., Xu, R., Zhang, Z., Liu, W., Lv, G., Wang, M., Li, C., and He, Z. (2021). Applications of AOTF Spectrometers in In Situ Lunar Measurements. Materials, 14.","DOI":"10.3390\/ma14133454"},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Yang, Z., Albrow-Owen, T., Cai, W., and Hasan, T. (2021). Miniaturization of optical spectrometers. Science, 371.","DOI":"10.1126\/science.abe0722"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"132","DOI":"10.1007\/s12596-018-0458-x","article-title":"Development and integration of an AOTF based NIR spectrophotometer","volume":"47","author":"Govindaraj","year":"2018","journal-title":"J. Opt."},{"key":"ref_12","unstructured":"Fernandes, M.E. (2021, November 21). Acousto-Optic Effect and Its Use in Signal Processing. Available online: https:\/\/www.semanticscholar.org\/paper\/Acousto-Optic-Effect-and-Its-use-in-Signal-Fernandes\/9ce8b3947de1e06d1f7e83066244098cf10145b6."},{"key":"ref_13","unstructured":"Honardoost, A. (2020). Thin-Film Lithium Niobate Integrated Photonics on Silicon for Electro-and Nonlinear-Optic Applications. [Ph.D. Thesis, University of Central Florida]."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"658","DOI":"10.1557\/mrs2009.177","article-title":"Piezoelectric thin films for sensors, actuators, and energy harvesting","volume":"34","author":"Muralt","year":"2009","journal-title":"MRS Bull."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"378","DOI":"10.1016\/j.mattod.2015.03.002","article-title":"Recent advances and remaining challenges in thin-film silicon photovoltaic technology","volume":"18","author":"Meillaud","year":"2015","journal-title":"Mater. Today"},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Dharmadasa, I. (2018). Advances in Thin-Film Solar Cells, Jenny Stanford Publishing.","DOI":"10.1201\/9780429020841"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"13105","DOI":"10.1021\/acsami.5b01718","article-title":"Phthalocyanine-based organic thin-film transistors: A review of recent advances","volume":"7","author":"Melville","year":"2015","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2945","DOI":"10.1002\/adma.201103228","article-title":"Oxide semiconductor thin-film transistors: A review of recent advances","volume":"24","author":"Fortunato","year":"2012","journal-title":"Adv. Mater."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"31","DOI":"10.1016\/j.pmatsci.2017.04.006","article-title":"Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications","volume":"89","author":"Fu","year":"2017","journal-title":"Prog. Mater. Sci."},{"key":"ref_20","unstructured":"Juneau, J.-M. (2017). The Simulation, Design, and Fabrication of Optical Filters, Rose Hulman Institute of Technology."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Keshmiri, S., and Mirsalehi, M. (2004). Multilayer Thin-Film Optical Filters: Design, Fabrication, and Applications. Physics and Technology of Thin Films: IWTF 2003, World Scientific.","DOI":"10.1142\/9789812702876_0024"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"303","DOI":"10.1016\/S0925-4005(03)00091-1","article-title":"Comparison of layered based SAW sensors","volume":"91","author":"Powell","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_23","unstructured":"Chang, I. (1976, January 26\u201327). Tunable acousto-optic filters: An overview. Proceedings of the Acousto-Optics: Device Development\/Instrumentation\/Applications, San Diego, CA, USA."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"50","DOI":"10.1016\/j.ultras.2015.01.011","article-title":"Wide-aperture TeO2 AOTF at low temperatures: Operation and survival","volume":"59","author":"Mantsevich","year":"2015","journal-title":"Ultrasonics"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1364\/AO.41.000209","article-title":"Spectral characterization of acousto-optic filters used in imaging spectroscopy","volume":"41","author":"Georgiev","year":"2002","journal-title":"Appl. Opt."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"15818","DOI":"10.1038\/s41598-017-15664-3","article-title":"Effective mechanical properties of multilayer nano-heterostructures","volume":"7","author":"Mukhopadhyay","year":"2017","journal-title":"Sci. Rep."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"762","DOI":"10.1016\/j.phpro.2015.08.129","article-title":"Acousto-optic figure of merit search","volume":"70","author":"Pfeiffer","year":"2015","journal-title":"Phys. Procedia"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"135703","DOI":"10.1088\/1361-6528\/abd1ab","article-title":"Piezoelectric potential enhanced photocatalytic performance based on ZnO with different nanostructures","volume":"32","author":"Yu","year":"2021","journal-title":"Nanotechnology"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"3363","DOI":"10.1039\/D0RA10371C","article-title":"Piezoelectric property comparison of two-dimensional ZnO nanostructures for energy harvesting devices","volume":"11","author":"Yang","year":"2021","journal-title":"RSC Adv."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"191","DOI":"10.1007\/BF00614817","article-title":"Lithium niobate: Summary of physical properties and crystal structure","volume":"37","author":"Weis","year":"1985","journal-title":"Appl. Phys. A"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"764","DOI":"10.1109\/TED.2015.2395443","article-title":"AlN\/SiO2\/Si3N4\/Si(100)-based CMOS compatible surface acoustic wave filter with\u2212 12.8-dB minimum insertion loss","volume":"62","author":"Kaletta","year":"2015","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1016\/j.ultras.2013.04.009","article-title":"FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN\/SiO2\/Si (1 0 0)","volume":"54","author":"Kaletta","year":"2014","journal-title":"Ultrasonics"},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Aslam, M.Z., Jeoti, V., Karuppanan, S., Malik, A.F., and Iqbal, A. (2018). FEM analysis of sezawa mode SAW sensor for VOC based on CMOS compatible AlN\/SiO2\/Si multilayer structure. Sensors, 18.","DOI":"10.3390\/s18061687"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"363","DOI":"10.1016\/j.ultras.2012.07.002","article-title":"Investigation of surface acoustic waves propagating in ZnO\u2013SiO2\u2013Si multilayer structure","volume":"53","author":"Zhang","year":"2013","journal-title":"Ultrasonics"},{"key":"ref_35","doi-asserted-by":"crossref","unstructured":"Shu, L., Peng, B., Li, C., Gong, D., Yang, Z., Liu, X., and Zhang, W. (2016). The characterization of surface acoustic wave devices based on AlN-metal structures. Sensors, 16.","DOI":"10.3390\/s16040526"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"2164","DOI":"10.3390\/s130202164","article-title":"Investigation into mass loading sensitivity of sezawa wave mode-based surface acoustic wave sensors","volume":"13","author":"Mohanan","year":"2013","journal-title":"Sensors"},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"7","DOI":"10.1016\/j.diamond.2015.12.004","article-title":"FEM simulation of AlN thin layers on diamond substrates for high frequency SAW devices","volume":"62","author":"Maouhoub","year":"2016","journal-title":"Diam. Relat. Mater."},{"key":"ref_38","unstructured":"Hofer, M., Finger, N., Kovacs, G., Schoberl, J., Langer, U., and Lerch, R. (2002, January 8\u201311). Finite element simulation of bulk-and surface acoustic wave (SAW) interaction in SAW devices. Proceedings of the 2002 IEEE Ultrasonics Symposium, Munich, Germany."},{"key":"ref_39","unstructured":"Buchner, M., Ruile, W., Dietz, A., and Dill, R. (1991, January 8\u201311). FEM analysis of the reflection coefficient of SAWs in an infinite periodic array. Proceedings of the IEEE 1991 Ultrasonics Symposium, Orlando, FL, USA."},{"key":"ref_40","unstructured":"Yong, Y.-K. (2001, January 7\u201310). Analysis of periodic structures for BAW and SAW resonators. Proceedings of the 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No. 01CH37263), Atlanta, GA, USA."},{"key":"ref_41","unstructured":"McIntosh, R., Bhalla, A.S., and Guo, R. (2021, January 12\u201313). Finite element modeling of acousto-optic effect and optimization of the figure of merit. Proceedings of the Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI, San Diego, CA, USA."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"41","DOI":"10.1134\/1.1434511","article-title":"Evaluation of physical parameters for the group III nitrates: BN, AlN, GaN, and InN","volume":"36","author":"Davydov","year":"2002","journal-title":"Semiconductors"},{"key":"ref_43","doi-asserted-by":"crossref","unstructured":"Aslam, M.Z., Jeoti, V., Karuppanan, S., and Malik, A.F. (2018, January 13\u201314). FEM Simulation Analysis of AlN\/SiO 2\/Si Multilayer Structure and Effect of IDT Configuration on SAW Propagation Modes and Characteristics. Proceedings of the 2018 International Conference on Intelligent and Advanced System (ICIAS), Kuala Lumpur, Malaysia.","DOI":"10.1109\/ICIAS.2018.8540581"},{"key":"ref_44","doi-asserted-by":"crossref","unstructured":"Malik, A.F., Jeoti, V., Fawzy, M., Iqbal, A., Aslam, Z., Pandian, M.S., and Marigo, E. (2016, January 15\u201317). Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN\/SiO2\/Si. Proceedings of the 2016 6th International Conference on Intelligent and Advanced Systems (ICIAS), Kuala Lumpur, Malaysia.","DOI":"10.1109\/ICIAS.2016.7824112"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"1116","DOI":"10.1088\/0022-3727\/25\/7\/014","article-title":"Thin film layered structure for acousto-optic devices","volume":"25","author":"Jain","year":"1992","journal-title":"J. Phys. D Appl. Phys."},{"key":"ref_46","doi-asserted-by":"crossref","unstructured":"Nayak, R., Nayak, A., Gupta, V., and Sreenivas, K. (2003, January 5\u20138). Optical interactions in ZnO-TeO\/sub 2\/bi-layer for AO device applications. Proceedings of the IEEE Symposium on Ultrasonics 2003, Honolulu, HI, USA.","DOI":"10.1109\/ULTSYM.2003.1293099"},{"key":"ref_47","doi-asserted-by":"crossref","unstructured":"Stedham, C., Draper, M., Ward, J., Wachman, E., and Pannell, C. (2008, January 22). A novel acousto-optic tunable filter for use in hyperspectral imaging systems. Proceedings of the Physics and Simulation of Optoelectronic Devices XVI, San Jose, CA, USA.","DOI":"10.1117\/12.765532"},{"key":"ref_48","first-page":"1","article-title":"Optical Properties of TiO2 Based Multilayer Thin Films: Application to Optical Filters","volume":"4","author":"Kitui","year":"2015","journal-title":"Int. J. Thin Film Sci. Technol."},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"22","DOI":"10.1016\/j.mee.2015.03.042","article-title":"FEM simulation of Rayleigh waves for SAW devices based on ZnO\/AlN\/Si","volume":"136","author":"Maouhoub","year":"2015","journal-title":"Microelectron. Eng."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"958","DOI":"10.1016\/j.physb.2011.12.114","article-title":"Electronic, elastic, optical properties of rutile TiO2 under pressure: A DFT study","volume":"407","author":"Mahmood","year":"2012","journal-title":"Phys. B Condens. Matter"},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"102","DOI":"10.1016\/j.cap.2017.10.005","article-title":"Effect of AlN layer on the resistive switching properties of TiO2 based ReRAM memory devices","volume":"18","author":"Rathore","year":"2018","journal-title":"Curr. Appl. Phys."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"183103","DOI":"10.1063\/1.4967533","article-title":"THz pulse generation using a contact grating device composed of TiO2\/SiO2 thin films on LiNbO3 crystal","volume":"120","author":"Yoshida","year":"2016","journal-title":"J. Appl. Phys."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"205","DOI":"10.1016\/j.jallcom.2013.12.137","article-title":"Microstructure and memory characteristics of ferroelectric LiNbO3\/ZnO composite thin films on Pt\/TiO2\/SiO2\/Si substrates","volume":"590","author":"Hao","year":"2014","journal-title":"J. Alloy. Compd."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"10233","DOI":"10.1016\/j.apsusc.2011.07.027","article-title":"Deposition of ZnO multilayer on LiNbO3 single crystals by DC-magnetron sputtering","volume":"257","author":"Shirazi","year":"2011","journal-title":"Appl. Surf. Sci."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"19178","DOI":"10.1039\/D0RA02448A","article-title":"Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments","volume":"10","author":"Xiong","year":"2020","journal-title":"RSC Adv."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"6789","DOI":"10.1364\/AO.51.006789","article-title":"Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride","volume":"51","author":"Kischkat","year":"2012","journal-title":"Appl. Opt."},{"key":"ref_57","doi-asserted-by":"crossref","unstructured":"Newnham, R.E. (2005). Properties of Materials: Anisotropy, Symmetry, Structure, Oxford University Press on Demand.","DOI":"10.1093\/oso\/9780198520757.003.0005"},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"1806","DOI":"10.1109\/TUFFC.2005.1561635","article-title":"Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices","volume":"52","author":"Benetti","year":"2005","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"2538","DOI":"10.1063\/1.1509471","article-title":"Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates","volume":"81","author":"Takagaki","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"251","DOI":"10.1109\/TUFFC.2006.1588412","article-title":"Surface acoustic wave velocity in single-crystal AlN substrates","volume":"53","author":"Bu","year":"2006","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/23\/7863\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T07:36:02Z","timestamp":1760168162000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/23\/7863"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,11,26]]},"references-count":60,"journal-issue":{"issue":"23","published-online":{"date-parts":[[2021,12]]}},"alternative-id":["s21237863"],"URL":"https:\/\/doi.org\/10.3390\/s21237863","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2021,11,26]]}}}