{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,10]],"date-time":"2026-07-10T22:50:41Z","timestamp":1783723841088,"version":"3.55.0"},"reference-count":35,"publisher":"MDPI AG","issue":"24","license":[{"start":{"date-parts":[[2021,12,7]],"date-time":"2021-12-07T00:00:00Z","timestamp":1638835200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001659","name":"Deutsche Forschungsgemeinschaft","doi-asserted-by":"publisher","award":["CRC 1261 Project A9, 286471992"],"award-info":[{"award-number":["CRC 1261 Project A9, 286471992"]}],"id":[{"id":"10.13039\/501100001659","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002347","name":"Federal Ministry of Education and Research","doi-asserted-by":"publisher","award":["16FMD01K, 16FMD02, 16FMD03"],"award-info":[{"award-number":["16FMD01K, 16FMD02, 16FMD03"]}],"id":[{"id":"10.13039\/501100002347","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO2 layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT\/Hz at 10 Hz and 72 pT\/Hz at 10 kHz at an input power of 20 dBm. The dynamic range was found to span from about \u00b11.7 mT to the corresponding limit of detection, leading to an interval of about 8 orders of magnitude. Fabrication, achieved sensitivity, and noise floor of the sensors are presented.<\/jats:p>","DOI":"10.3390\/s21248166","type":"journal-article","created":{"date-parts":[[2021,12,7]],"date-time":"2021-12-07T02:48:13Z","timestamp":1638845293000},"page":"8166","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":28,"title":["Thin-Film-Based SAW Magnetic Field Sensors"],"prefix":"10.3390","volume":"21","author":[{"given":"Jana","family":"Meyer","sequence":"first","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4226-5827","authenticated-orcid":false,"given":"Viktor","family":"Schell","sequence":"additional","affiliation":[{"name":"Institute for Materials Science, Kiel University, Kaiserstra\u00dfe 2, 24143 Kiel, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2994-2021","authenticated-orcid":false,"given":"Jingxiang","family":"Su","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Simon","family":"Fichtner","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"},{"name":"Institute for Materials Science, Kiel University, Kaiserstra\u00dfe 2, 24143 Kiel, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Erdem","family":"Yarar","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Florian","family":"Niekiel","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Thorsten","family":"Giese","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6759-4208","authenticated-orcid":false,"given":"Anne","family":"Kittmann","sequence":"additional","affiliation":[{"name":"Institute for Materials Science, Kiel University, Kaiserstra\u00dfe 2, 24143 Kiel, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lars","family":"Thorm\u00e4hlen","sequence":"additional","affiliation":[{"name":"Institute for Materials Science, Kiel University, Kaiserstra\u00dfe 2, 24143 Kiel, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Vadim","family":"Lebedev","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5095-8781","authenticated-orcid":false,"given":"Stefan","family":"Moench","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8125-3805","authenticated-orcid":false,"given":"Agn\u0117","family":"\u017dukauskait\u0117","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Eckhard","family":"Quandt","sequence":"additional","affiliation":[{"name":"Institute for Materials Science, Kiel University, Kaiserstra\u00dfe 2, 24143 Kiel, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fabian","family":"Lofink","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2021,12,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"278","DOI":"10.1038\/s41598-017-18441-4","article-title":"Wide band low noise love wave magnetic field sensor system","volume":"8","author":"Kittmann","year":"2018","journal-title":"Sci. Rep."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"631","DOI":"10.1109\/JSEN.2006.874493","article-title":"Magnetic sensors and their applications","volume":"6","author":"Lenz","year":"2006","journal-title":"IEEE Sens. J."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"S160","DOI":"10.1088\/0953-2048\/19\/3\/024","article-title":"Biomagnetism using SQUIDs: Status and perspectives","volume":"19","author":"Sternickel","year":"2006","journal-title":"Supercond. Sci. Technol."},{"key":"ref_4","unstructured":"Williamson, S.J., and Hoke, M. (2012). Advances in Biomagnetism, Springer Science & Business Media."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"971","DOI":"10.1109\/TBCAS.2020.2998290","article-title":"Ultrasensitive magnetoelectric sensing system for pico-tesla magnetomyography","volume":"14","author":"Zuo","year":"2020","journal-title":"IEEE Trans. Biomed. Circuits Syst."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"354","DOI":"10.1109\/JSEN.2009.2013914","article-title":"Current sensing techniques: A review","volume":"9","author":"Ziegler","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1500404","DOI":"10.1109\/LSENS.2019.2943129","article-title":"Frequency Response of SAW Delay Line Magnetic Field\/Current Sensor","volume":"3","author":"Labrenz","year":"2019","journal-title":"IEEE Sens. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1410","DOI":"10.1109\/TMAG.1979.1060442","article-title":"Applications of amorphous magnetic-layers in surface-acoustic-wave devices","volume":"15","author":"Webb","year":"1979","journal-title":"IEEE Trans. Magn."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"2829","DOI":"10.1109\/TMAG.2002.802467","article-title":"Optimization of the Delta E effect in thin films and multilayers by magnetic field annealing","volume":"38","author":"Ludwig","year":"2002","journal-title":"IEEE Trans. Magn."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"075009","DOI":"10.1088\/1361-6439\/ab8dd0","article-title":"Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field","volume":"30","author":"Su","year":"2020","journal-title":"J. Micromech. Microeng."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"082402","DOI":"10.1063\/1.5044478","article-title":"Self-biased vector magnetic sensor based on a Love-type surface acoustic wave resonator","volume":"113","author":"Liu","year":"2018","journal-title":"Appl. Phys. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"360","DOI":"10.1063\/1.351863","article-title":"Love-type surface-acoustic waves propagating in amorphous iron-boron films with multilayer structure","volume":"72","author":"Yokokawa","year":"1992","journal-title":"J. Appl. Phys."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"610","DOI":"10.1049\/el:19750465","article-title":"Magnetically tuned surface-acoustic-wave phase shifter","volume":"11","author":"Ganguly","year":"1975","journal-title":"Electron. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"916","DOI":"10.1109\/TMAG.1980.1060738","article-title":"Variable SAW delay line using amorphous TbFe2 film","volume":"16","author":"Yamaguchi","year":"1980","journal-title":"IEEE Trans. Magn."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"111998","DOI":"10.1016\/j.sna.2020.111998","article-title":"Sensitivity and noise analysis of SAW magnetic field sensors with varied magnetostrictive layer thicknesses","volume":"311","author":"Kittmann","year":"2020","journal-title":"Sens. Actuators A Phys."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"3032","DOI":"10.1063\/1.124055","article-title":"Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications","volume":"74","author":"Dubois","year":"1999","journal-title":"Appl. Phys. Lett."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1641","DOI":"10.1063\/1.1604482","article-title":"High-frequency, high-sensitivity acoustic sensor implemented on ALN\/Si substrate","volume":"83","author":"Caliendo","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"035301","DOI":"10.1063\/1.4993908","article-title":"Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric microelectromechanical systems","volume":"122","author":"Fichtner","year":"2017","journal-title":"J. Appl. Phys."},{"key":"ref_19","unstructured":"Ding, A. (2020). Surface Acoustic Wave Devices Based on C-Plane and A-Plane AlScN. [Ph.D. Thesis, Albert-Ludwigs-Universit\u00e4t Freiburg]."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"075106","DOI":"10.1063\/1.5094611","article-title":"Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators","volume":"126","author":"Kurz","year":"2019","journal-title":"J. Appl. Phys."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"133502","DOI":"10.1063\/1.4896853","article-title":"High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient","volume":"105","author":"Wang","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"581","DOI":"10.1109\/PROC.1976.10180","article-title":"Surface acoustic waves and SAW materials","volume":"64","author":"Slobodnik","year":"1976","journal-title":"Proc. IEEE"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"711","DOI":"10.1109\/PROC.1976.10200","article-title":"Surface-acoustic-wave resonators","volume":"64","author":"Bell","year":"1976","journal-title":"Proc. IEEE"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"314","DOI":"10.1063\/1.1754276","article-title":"Direct piezoelectric coupling to surface elastic waves","volume":"7","author":"White","year":"1965","journal-title":"Appl. Phys. Lett."},{"key":"ref_25","unstructured":"Smole, P., Ruile, W., Korden, C., Ludwig, A., Quandt, E., Krassnitzer, S., and Pongratz, P. (2003, January 4\u20138). Magnetically tunable SAW-resonator. Proceedings of the IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, Tampa, FL, USA."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"073503","DOI":"10.1063\/1.5140562","article-title":"Magnetic anisotropy controlled FeCoSiB thin films for surface acoustic wave magnetic field sensors","volume":"116","author":"Schell","year":"2020","journal-title":"Appl. Phys. Lett."},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Durdaut, P., M\u00fcller, C., Kittmann, A., Schell, V., Bahr, A., Quandt, E., Kn\u00f6chel, R., H\u00f6ft, M., and McCord, J. (2021). Phase Noise of SAW Delay Line Magnetic Field Sensors. Sensors, 21.","DOI":"10.3390\/s21165631"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1700559","DOI":"10.1002\/pssa.201700559","article-title":"Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films","volume":"215","author":"Lu","year":"2018","journal-title":"Phys. Status Solidi A"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"582","DOI":"10.1109\/PROC.1974.9483","article-title":"Practical surface acoustic wave devices","volume":"62","author":"Holland","year":"1974","journal-title":"Proc. IEEE"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"032902","DOI":"10.1063\/1.4812706","article-title":"Magnetoelectric thin film composites with interdigital electrodes","volume":"103","author":"Piorra","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_31","unstructured":"(2020, November 11). COMSOL Multiphysics\u00ae\u00ae v. 5.6. COMSOL AB, Stockholm, Sweden. Available online: https:\/\/www.comsol.com."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"7804","DOI":"10.1109\/TIE.2015.2458958","article-title":"Hysteresis compensation based on controlled current pulses for magnetoresistive sensors","volume":"62","author":"Xie","year":"2015","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"46","DOI":"10.1016\/S0924-4247(01)00478-2","article-title":"Integrated Hall-effect magnetic sensors","volume":"91","author":"Popovic","year":"2001","journal-title":"Sens. Actuators A Phys."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"112001","DOI":"10.1088\/0957-0233\/21\/11\/112001","article-title":"Electric current sensors: A review","volume":"21","author":"Ripka","year":"2010","journal-title":"Meas. Sci. Technol."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"5269","DOI":"10.1038\/s41598-021-84415-2","article-title":"Exchange biased delta-E effect enables the detection of low frequency pT magnetic fields with simultaneous localization","volume":"11","author":"Spetzler","year":"2021","journal-title":"Sci. Rep."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/24\/8166\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T07:42:15Z","timestamp":1760168535000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/24\/8166"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,12,7]]},"references-count":35,"journal-issue":{"issue":"24","published-online":{"date-parts":[[2021,12]]}},"alternative-id":["s21248166"],"URL":"https:\/\/doi.org\/10.3390\/s21248166","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,12,7]]}}}