{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,3]],"date-time":"2026-02-03T17:36:05Z","timestamp":1770140165364,"version":"3.49.0"},"reference-count":34,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T00:00:00Z","timestamp":1641945600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO3. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical energy. The process proposed presents several interesting features with the possibility of realizing smaller scale devices, integrated systems, miniaturized mechanical and electromechanical sensors, and transducers with an active layer used as the main conversion element. When the system is fabricated in the typical cantilever configuration, it can produce a peak-to-peak open-circuit output voltage of 0.208 V, due to flexural deformation, and a power density of 1.9 nW\u00b7mm\u22123\u00b7g\u22122 at resonance, with values of acceleration and frequency of 2.4 g and 4096 Hz, respectively. The electromechanical transduction capability is exploited for sensing and power generation\/energy harvesting applications. Theoretical considerations, simulations, numerical analyses, and experiments are presented to show the proposed LiNbO3-based MEMS fabrication process suitability. This paper presents substantial contributions to the state-of-the-art, proposing an integral solution regarding the design, modelling, simulation, realization, and characterization of a novel transducer.<\/jats:p>","DOI":"10.3390\/s22020559","type":"journal-article","created":{"date-parts":[[2022,1,12]],"date-time":"2022-01-12T04:15:25Z","timestamp":1641960925000},"page":"559","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":17,"title":["Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor\/Energy Harvester"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1619-1433","authenticated-orcid":false,"given":"Gabriel","family":"Barrientos","sequence":"first","affiliation":[{"name":"Dipartimento di Scienze Chimiche, Universit\u00e0 Degli Studi di Catania, v.le A. Doria 6, 95125 Catania, Italy"},{"name":"INSTM UdR Catania, v.le A. Doria 6, 95125 Catania, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Giacomo","family":"Clementi","sequence":"additional","affiliation":[{"name":"Institut FEMTO-ST, Universit\u00e9 Bourgogne Franche-Comt\u00e9 CNRS UMR 6174, 25000 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Carlo","family":"Trigona","sequence":"additional","affiliation":[{"name":"Dipartimento di Ingegneria Elettrica Elettronica e Informatica, Universit\u00e0 degli Studi di Catania, v.le A. Doria 6, 95125 Catania, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Merieme","family":"Ouhabaz","sequence":"additional","affiliation":[{"name":"Institut FEMTO-ST, Universit\u00e9 Bourgogne Franche-Comt\u00e9 CNRS UMR 6174, 25000 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ludovic","family":"Gauthier-Manuel","sequence":"additional","affiliation":[{"name":"Institut FEMTO-ST, Universit\u00e9 Bourgogne Franche-Comt\u00e9 CNRS UMR 6174, 25000 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Djaffar","family":"Belharet","sequence":"additional","affiliation":[{"name":"Institut FEMTO-ST, Universit\u00e9 Bourgogne Franche-Comt\u00e9 CNRS UMR 6174, 25000 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Samuel","family":"Margueron","sequence":"additional","affiliation":[{"name":"Institut FEMTO-ST, Universit\u00e9 Bourgogne Franche-Comt\u00e9 CNRS UMR 6174, 25000 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ausrine","family":"Bartasyte","sequence":"additional","affiliation":[{"name":"Institut FEMTO-ST, Universit\u00e9 Bourgogne Franche-Comt\u00e9 CNRS UMR 6174, 25000 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7483-3070","authenticated-orcid":false,"given":"Graziella","family":"Malandrino","sequence":"additional","affiliation":[{"name":"Dipartimento di Scienze Chimiche, Universit\u00e0 Degli Studi di Catania, v.le A. 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