{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,19]],"date-time":"2026-02-19T00:08:11Z","timestamp":1771459691533,"version":"3.50.1"},"reference-count":30,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2022,2,25]],"date-time":"2022-02-25T00:00:00Z","timestamp":1645747200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"PRODEP-M\u00e9xico","award":["252831"],"award-info":[{"award-number":["252831"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA\/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.<\/jats:p>","DOI":"10.3390\/s22051806","type":"journal-article","created":{"date-parts":[[2022,2,27]],"date-time":"2022-02-27T20:48:33Z","timestamp":1645994913000},"page":"1806","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1947-9595","authenticated-orcid":false,"given":"Mario Alberto","family":"Garc\u00eda-Ram\u00edrez","sequence":"first","affiliation":[{"name":"Electronics Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino Garc\u00eda Barrag\u00e1n 1421, Guadalajara 44430, Mexico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7721-1127","authenticated-orcid":false,"given":"Orfil","family":"Gonz\u00e1lez-Reynoso","sequence":"additional","affiliation":[{"name":"Chemistry Engineering Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino Garc\u00eda Barrag\u00e1n 1421, Guadalajara 44430, Mexico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9615-8539","authenticated-orcid":false,"given":"Miguel Angel","family":"Bello-Jim\u00e9nez","sequence":"additional","affiliation":[{"name":"Departamento de Estudios Multidisciplinarios, Divisi\u00f3n Campus Irapuato-Salamanca, Universidad de Guanajuato, Av. Universidad s\/n, Col. Yacatitas, Yuriria, Guanajuato 38940, Mexico"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5480-3384","authenticated-orcid":false,"given":"Everado","family":"Vargas-Rodr\u00edguez","sequence":"additional","affiliation":[{"name":"Instituto de Investigaci\u00f3n en Comunicaci\u00f3n \u00d3ptica (IICO), Universidad Aut\u00f3noma de San Luis Potos\u00ed, Av. Karakorum No. 1470 Lomas 4<sup>a<\/sup> Secc., San Luis Potos\u00ed 78210, Mexico"}]}],"member":"1968","published-online":{"date-parts":[[2022,2,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1111\/j.1749-6632.1962.tb13623.x","article-title":"Electrodes system for Continuous Monitoring in Cardiovascular Surgery","volume":"102","author":"Clarck","year":"1962","journal-title":"Ann. N. Y. Acad. 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