{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,17]],"date-time":"2026-06-17T16:27:11Z","timestamp":1781713631254,"version":"3.54.5"},"reference-count":31,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2022,3,3]],"date-time":"2022-03-03T00:00:00Z","timestamp":1646265600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52075432"],"award-info":[{"award-number":["52075432"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry\u2013P\u00e9rot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm\/kPa. The measurement range and sensitivity of the pressure sensor are 0\u2013700 Pa and 115 nA\/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.<\/jats:p>","DOI":"10.3390\/s22051973","type":"journal-article","created":{"date-parts":[[2022,3,3]],"date-time":"2022-03-03T20:36:30Z","timestamp":1646339790000},"page":"1973","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A Compact Optical MEMS Pressure Sensor Based on Fabry\u2013P\u00e9rot Interference"],"prefix":"10.3390","volume":"22","author":[{"given":"Yonghong","family":"Qi","sequence":"first","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Minghui","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bo","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ziming","family":"Ren","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bing","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6443-4727","authenticated-orcid":false,"given":"Xueyong","family":"Wei","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,3,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"252","DOI":"10.1061\/(ASCE)0733-9399(1998)124:3(252)","article-title":"Estimation of long return period design values for wind speeds","volume":"124","author":"Naess","year":"1998","journal-title":"J. Eng. Mech."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"130","DOI":"10.4103\/2229-5151.114273","article-title":"Wind disasters: A comprehensive review of current management strategies","volume":"3","author":"Marchigiani","year":"2013","journal-title":"Int. J. Crit. Illn. Inj. Sci."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1813","DOI":"10.1016\/j.egypro.2012.01.279","article-title":"Random wind-induced response analysis of transmission tower-line system","volume":"16","author":"Li","year":"2012","journal-title":"Energy Procedia"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"147","DOI":"10.1108\/MI-09-2019-0060","article-title":"MEMS piezoresistive pressure sensor with patterned thinning of diaphragm","volume":"37","author":"Kordrostami","year":"2020","journal-title":"Microelectron. Int."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1715","DOI":"10.1063\/1.2401312","article-title":"Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films","volume":"100","author":"Akiyama","year":"2006","journal-title":"J. Appl. Phys."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"085029","DOI":"10.1088\/1361-665X\/ab99d8","article-title":"Design and simulation of a MEMS Fabry\u2013Perot accelerometer with ultra-low cross-axis sensitivity","volume":"29","author":"Zhao","year":"2020","journal-title":"Smart Mater. Struct."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Yan, P., Lu, Y., Xiang, C., Wang, J., and Chen, J. (2019). A temperature-insensitive resonant pressure micro sensor based on silicon-on-glass vacuum packaging. Sensors, 19.","DOI":"10.3390\/s19183866"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"010302","DOI":"10.7567\/JJAP.57.010302","article-title":"MEMS optical interferometry-based pressure sensor using elastomer nanosheet developed by dry transfer technique","volume":"57","author":"Takahashi","year":"2018","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1080\/02533839.2018.1454855","article-title":"Modeling analysis and fabrication of MEMS capacitive differential pressure sensor for altimeter application","volume":"41","author":"Parthasarathy","year":"2018","journal-title":"J. Chin. Inst. Eng."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1046","DOI":"10.1049\/mnl.2018.0149","article-title":"Design and analysis of hairpin piezoresistive pressure sensor with improved linearity using square and circular diaphragms","volume":"13","author":"Hayati","year":"2018","journal-title":"Micro. Nano. Lett."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"640","DOI":"10.1109\/TED.2019.2957880","article-title":"A micromachined resonant differential pressure sensor","volume":"67","author":"Li","year":"2020","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"159661","DOI":"10.1016\/j.jallcom.2021.159661","article-title":"Flexible self-powered piezoelectric pressure sensor based on GaN\/p-GaN coaxial nanowires","volume":"872","author":"Waseem","year":"2021","journal-title":"J. Alloy. Compd."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"3215","DOI":"10.1007\/s00542-016-3015-z","article-title":"Capacitive MEMS absolute pressure sensor using a modified commercial microfabrication process","volume":"23","author":"Merdassi","year":"2017","journal-title":"Microsyst. Technol."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Zhang, J.H., Chen, J.X., Li, M., Ge, Y.X., Wang, T.T., Shan, P., and Mao, X.L. (2018). Design, fabrication, and implementation of an array-type MEMS piezoresistive intelligent pressure sensor system. Micromachines, 9.","DOI":"10.3390\/mi9030104"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"112075","DOI":"10.1016\/j.sna.2020.112075","article-title":"Metal-embedded fiber optic sensor packaging and signal demodulation scheme towards high-frequency dynamic measurements in harsh environments","volume":"312","author":"Sweeney","year":"2020","journal-title":"Sens. Actuators A Phys."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"4272","DOI":"10.1109\/JSEN.2020.3029152","article-title":"MgO single crystals MEMS-based fiber-optic fabry-perot pressure sensor for harsh monitoring","volume":"21","author":"Liu","year":"2021","journal-title":"IEEE Sens. J."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Zhou, N., Jia, P., Liu, J., Ren, Q., and Xiong, J. (2020). MEMS-based reflective intensity-modulated fiber-optic sensor for pressure measurements. Sensors, 20.","DOI":"10.3390\/s20082233"},{"key":"ref_18","first-page":"10618","article-title":"An MEMS optical fiber pressure sensor fabricated by Au-Au thermal-compression bonding","volume":"28","author":"Wang","year":"2017","journal-title":"Adv. Opt. Sens. Appl."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"117","DOI":"10.1007\/s12596-014-0186-9","article-title":"A high sensitive FBG pressure sensor using thin metal diaphragm","volume":"43","author":"Pachava","year":"2014","journal-title":"J. Opt. -UK"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"514","DOI":"10.1016\/j.optcom.2016.08.013","article-title":"Diaphragm based long cavity Fabry\u2013Perot fiber acoustic sensor using phase generated carrier","volume":"382","author":"Liu","year":"2017","journal-title":"Opt. Commun."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Zhang, P., Wang, C., Wan, L., Zhang, Q., Gong, Z., Qin, Z., and Chan, C.C. (2022). Opto-microfluidic fabry-perot sensor with extended air cavity and enhanced pressure sensitivity. Micromachines, 13.","DOI":"10.3390\/mi13010019"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"289","DOI":"10.1016\/j.optlaseng.2019.04.028","article-title":"Fiber-optic Fabry\u2013Perot pressure sensor for down-hole application","volume":"121","author":"Zhou","year":"2019","journal-title":"Opt. Lasers Eng."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1961","DOI":"10.1007\/s00542-020-04747-3","article-title":"A MEMS based Fabry-Perot accelerometer with high resolution","volume":"26","author":"Zhao","year":"2020","journal-title":"Microsyst. Technol."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"085010","DOI":"10.1088\/1361-6439\/ab931a","article-title":"Eccentric reflective optical fiber MEMS micro-pressure sensor","volume":"30","author":"Tian","year":"2020","journal-title":"J. Micromech. Microeng."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"2907","DOI":"10.1007\/s00542-018-4245-z","article-title":"Analysis on edge effect of MEMS capacitance diaphragm gauge with square pressure-sensing diaphragm","volume":"25","author":"Han","year":"2019","journal-title":"Microsyst. Technol."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"742","DOI":"10.1109\/19.744340","article-title":"A theoretical analysis of the Bifurcated fiber bundle displacement sensor","volume":"47","author":"Faria","year":"1998","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"43","DOI":"10.1016\/j.optlastec.2013.03.019","article-title":"Feedback-stabilized interrogation technique for optical Fabry\u2013Perot acoustic sensor using a tunable fiber laser","volume":"51","author":"Wang","year":"2013","journal-title":"Opt. Laser Technol."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"817","DOI":"10.1109\/LPT.2015.2391912","article-title":"Fast white light interferometry demodulation algorithm for low-finesse Fabry\u2013P\u00e9rot sensors","volume":"27","author":"Yu","year":"2015","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"43","DOI":"10.1080\/10584587.2018.1514881","article-title":"Design and analysis of MEMS piezoresistive rectangular paddle microcantilever based wind speed sensor","volume":"193","author":"Agrawal","year":"2018","journal-title":"Integr. Ferroelectr."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"133","DOI":"10.1364\/OL.37.000133","article-title":"High-sensitivity Fabry\u2013Perot interferometric pressure sensor based on a nanothick silver diaphragm","volume":"37","author":"Xu","year":"2012","journal-title":"Opt. Lett."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"125104","DOI":"10.1088\/1361-6501\/aadfb1","article-title":"An optical fiber Fabry\u2013P\u00e9rot micro-pressure sensor based on beam-membrane structure","volume":"29","author":"Tian","year":"2018","journal-title":"Meas. Sci. Technol."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/5\/1973\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T22:31:08Z","timestamp":1760135468000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/5\/1973"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,3,3]]},"references-count":31,"journal-issue":{"issue":"5","published-online":{"date-parts":[[2022,3]]}},"alternative-id":["s22051973"],"URL":"https:\/\/doi.org\/10.3390\/s22051973","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022,3,3]]}}}