{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,19]],"date-time":"2025-10-19T16:14:14Z","timestamp":1760890454832,"version":"build-2065373602"},"reference-count":26,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2022,4,4]],"date-time":"2022-04-04T00:00:00Z","timestamp":1649030400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 \u03bcm pitch pixels with a large detection area of 1.68 cm2; Chip B with 2.8 \u03bcm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance detection precision of less than 100 zF (10\u221219 F) at an input voltage of 20 V and less than 10 zF (10\u221220 F) at 300 V due to the noise cancelling technique. Furthermore, by using multiple input pulse amplitudes, a capacitance detection dynamic range of up to 123 dB was achieved. The spatial resolution improvement was confirmed by the experimentally obtained modulation transfer function for Chip B with various line and space pattens. The examples of capacitance imaging using the fabricated chips were also demonstrated.<\/jats:p>","DOI":"10.3390\/s22072770","type":"journal-article","created":{"date-parts":[[2022,4,4]],"date-time":"2022-04-04T09:49:41Z","timestamp":1649065781000},"page":"2770","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution"],"prefix":"10.3390","volume":"22","author":[{"given":"Yuki","family":"Sugama","sequence":"first","affiliation":[{"name":"Graduate School of Engineering, Tohoku University, 6-6-11-811, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"}]},{"given":"Yoshiaki","family":"Watanabe","sequence":"additional","affiliation":[{"name":"Graduate School of Engineering, Tohoku University, 6-6-11-811, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7812-3084","authenticated-orcid":false,"given":"Rihito","family":"Kuroda","sequence":"additional","affiliation":[{"name":"Graduate School of Engineering, Tohoku University, 6-6-11-811, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"},{"name":"New Industry Creation Hatchery Center, Tohoku University, 6-6-10, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"}]},{"given":"Masahiro","family":"Yamamoto","sequence":"additional","affiliation":[{"name":"Graduate School of Engineering, Tohoku University, 6-6-11-811, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"}]},{"given":"Tetsuya","family":"Goto","sequence":"additional","affiliation":[{"name":"New Industry Creation Hatchery Center, Tohoku University, 6-6-10, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"}]},{"given":"Toshiro","family":"Yasuda","sequence":"additional","affiliation":[{"name":"OHT Inc., 1118-1, Nishinakajo, Kannabe-cho, Fukuyama 720-2103, Hiroshima, Japan"}]},{"given":"Hiroshi","family":"Hamori","sequence":"additional","affiliation":[{"name":"OHT Inc., 1118-1, Nishinakajo, Kannabe-cho, Fukuyama 720-2103, Hiroshima, Japan"}]},{"given":"Naoya","family":"Kuriyama","sequence":"additional","affiliation":[{"name":"LAPIS Semiconductor Co., Ltd., 2-4-8, Shin-Yokohama, Kohoku-ku, Yokohama 222-8575, Kanagawa, Japan"}]},{"given":"Shigetoshi","family":"Sugawa","sequence":"additional","affiliation":[{"name":"New Industry Creation Hatchery Center, Tohoku University, 6-6-10, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Miyagi, Japan"}]}],"member":"1968","published-online":{"date-parts":[[2022,4,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Sukhavasi, S.B., Sukhavasi, S.B., Elleithy, K., and Abuzneid, S. 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Solid-State Circuits"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/7\/2770\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T22:49:37Z","timestamp":1760136577000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/7\/2770"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,4,4]]},"references-count":26,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2022,4]]}},"alternative-id":["s22072770"],"URL":"https:\/\/doi.org\/10.3390\/s22072770","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2022,4,4]]}}}