{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,12]],"date-time":"2026-06-12T23:04:52Z","timestamp":1781305492499,"version":"3.54.1"},"reference-count":118,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2022,5,19]],"date-time":"2022-05-19T00:00:00Z","timestamp":1652918400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.<\/jats:p>","DOI":"10.3390\/s22103857","type":"journal-article","created":{"date-parts":[[2022,5,20]],"date-time":"2022-05-20T00:18:11Z","timestamp":1653005891000},"page":"3857","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":47,"title":["A Review on Coupled Bulk Acoustic Wave MEMS Resonators"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4879-0721","authenticated-orcid":false,"given":"Linlin","family":"Wang","sequence":"first","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chen","family":"Wang","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuan","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Aojie","family":"Quan","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3685-6778","authenticated-orcid":false,"given":"Masoumeh","family":"Keshavarz","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bernardo Pereira","family":"Madeira","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hemin","family":"Zhang","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chenxi","family":"Wang","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7213-1072","authenticated-orcid":false,"given":"Michael","family":"Kraft","sequence":"additional","affiliation":[{"name":"Micro- and Nanosystems\u2014MNS, Department of Electrical Engineering ESAT, KU Leuven, B-3001 Leuven, Belgium"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,5,19]]},"reference":[{"key":"ref_1","unstructured":"Chollet, F., and Liu, H. 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