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In this paper, we have demonstrated the plasmonic photodetection with dark current suppression to create a Si-based broadband photodetector with enhanced performance in the short-wavelength infrared (SWIR) region. By hybridizing a 3 nm Au layer with the spherical Au nanoparticles (NPs) formed by rapid thermal annealing (RTA) on Si substrate, a well-behaved ITO\/Au\/Au NPs\/n-Si Schottky photodetector with suppressed dark current and enhanced absorption in the SWIR region is obtained. This optimized detector shows a broad detection beyond 1200 nm and a high responsivity of 22.82 mA\/W at 1310 nm at \u22121 V, as well as a low dark current density on the order of 10\u22125 A\/cm2. Such a Si-based plasmon-enhanced detector with desirable performance in dark current will be a promising strategy for realization of the high SNR detector while keeping fabrication costs low.<\/jats:p>","DOI":"10.3390\/s22124536","type":"journal-article","created":{"date-parts":[[2022,6,17]],"date-time":"2022-06-17T11:45:44Z","timestamp":1655466344000},"page":"4536","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Demonstration of SWIR Silicon-Based Photodetection by Using Thin ITO\/Au\/Au Nanoparticles\/n-Si Structure"],"prefix":"10.3390","volume":"22","author":[{"given":"Xinxin","family":"Li","sequence":"first","affiliation":[{"name":"Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhen","family":"Deng","sequence":"additional","affiliation":[{"name":"Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China"},{"name":"Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"The Yangtze River Delta Physics Research Center, Liyang 213000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ziguang","family":"Ma","sequence":"additional","affiliation":[{"name":"Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of 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