{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,17]],"date-time":"2026-03-17T03:51:54Z","timestamp":1773719514796,"version":"3.50.1"},"reference-count":21,"publisher":"MDPI AG","issue":"13","license":[{"start":{"date-parts":[[2022,6,22]],"date-time":"2022-06-22T00:00:00Z","timestamp":1655856000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A diaphragm-based hermetic optical fiber Fabry\u2013P\u00e9rot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO2 laser welding with a cavity length from 30 to 100 \u03bcm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of \u22122.02 nm\/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.<\/jats:p>","DOI":"10.3390\/s22134700","type":"journal-article","created":{"date-parts":[[2022,6,22]],"date-time":"2022-06-22T23:11:19Z","timestamp":1655939479000},"page":"4700","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Hermetic Welding of an Optical Fiber Fabry\u2013P\u00e9rot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser"],"prefix":"10.3390","volume":"22","author":[{"given":"Hui","family":"Zhang","sequence":"first","affiliation":[{"name":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yi","family":"Li","sequence":"additional","affiliation":[{"name":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhuo","family":"Zhang","sequence":"additional","affiliation":[{"name":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chaoming","family":"Yang","sequence":"additional","affiliation":[{"name":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mingshan","family":"Liang","sequence":"additional","affiliation":[{"name":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yong","family":"Hu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8023-7109","authenticated-orcid":false,"given":"Heming","family":"Wei","sequence":"additional","affiliation":[{"name":"Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fufei","family":"Pang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,6,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2467","DOI":"10.3390\/s120302467","article-title":"Interferometric Fiber Optic Sensors","volume":"12","author":"Lee","year":"2012","journal-title":"Sensors"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"10430","DOI":"10.3390\/s120810430","article-title":"In-Line Fiber Optic Interferometric Sensors in Single-Mode Fibers","volume":"12","author":"Zhu","year":"2012","journal-title":"Sensors"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"322","DOI":"10.1016\/j.optcom.2006.08.009","article-title":"Fiber Optic Fabry-Perot Pressure Sensor with Low Sensitivity to Temperature Changes for Downhole Application","volume":"269","author":"Aref","year":"2007","journal-title":"Opt. 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Available online: https:\/\/www.antpedia.com\/standard\/7063278-1.html."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/13\/4700\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T23:37:16Z","timestamp":1760139436000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/13\/4700"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,6,22]]},"references-count":21,"journal-issue":{"issue":"13","published-online":{"date-parts":[[2022,7]]}},"alternative-id":["s22134700"],"URL":"https:\/\/doi.org\/10.3390\/s22134700","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022,6,22]]}}}