{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T00:47:48Z","timestamp":1760230068568,"version":"build-2065373602"},"reference-count":30,"publisher":"MDPI AG","issue":"14","license":[{"start":{"date-parts":[[2022,7,7]],"date-time":"2022-07-07T00:00:00Z","timestamp":1657152000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001700","name":"A-STEP program of JST, MEXT Grant-in-Aid for Scientific Research on Innovative Areas \u201cScience of hybrid quantum systems\u201d","doi-asserted-by":"publisher","award":["15H05868","21K04151"],"award-info":[{"award-number":["15H05868","21K04151"]}],"id":[{"id":"10.13039\/501100001700","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001691","name":"JSPS KAKENHI","doi-asserted-by":"publisher","award":["15H05868","21K04151"],"award-info":[{"award-number":["15H05868","21K04151"]}],"id":[{"id":"10.13039\/501100001691","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Terahertz (THz) electromagnetic waves are attractive for use in nondestructive and biocompatible sensing applications. Thermal sensors are widely used for THz detection owing to the small photon energies of THz radiation, where this requires materials with low thermal conductivity and a small heat capacity to ensure the sensitive and fast operation of the sensors. In this study, we investigated the thermal and optical properties of porous nanomesh structures for sensitive THz bolometric detection. Nanometer (nm)-scale hole array structures were formed on gallium arsenide (GaAs) microelectromechanical system (MEMS) beams to improve their thermal properties. The thermal conductance of the porous MEMS beams was obtained by measuring their thermal bandwidths; it was found to decrease by as much as ~90% when the porosity (P) of the porous nanostructure was increased to ~0.69. We also measured the THz absorptance of the porous hole array structure. The results show that although the porous nanostructure has a much smaller area than the bulk material, it maintained a high coefficient of THz absorptance because the featured size was much smaller than the THz wavelength. The measured absorptance agreed well with that calculated by using the Drude model. These results demonstrate that the porous nanomesh structure is promising for developing highly sensitive THz thermal sensors.<\/jats:p>","DOI":"10.3390\/s22145109","type":"journal-article","created":{"date-parts":[[2022,7,7]],"date-time":"2022-07-07T07:51:56Z","timestamp":1657180316000},"page":"5109","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Thermal and Optical Properties of Porous Nanomesh Structures for Sensitive Terahertz Bolometric Detection"],"prefix":"10.3390","volume":"22","author":[{"given":"Ryoko","family":"Yamamoto","sequence":"first","affiliation":[{"name":"Institute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi 184-8588, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Akira","family":"Kojima","sequence":"additional","affiliation":[{"name":"Institute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi 184-8588, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Nobuyoshi","family":"Koshida","sequence":"additional","affiliation":[{"name":"Institute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi 184-8588, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Isao","family":"Morohashi","sequence":"additional","affiliation":[{"name":"National Institute of Information and Communications Technology, 4-2-1 Nukui-Kitamachi, Koganei-shi 184-8795, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kazuhiko","family":"Hirakawa","sequence":"additional","affiliation":[{"name":"Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku 153-8505, Japan"},{"name":"Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku 153-8505, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6108-5261","authenticated-orcid":false,"given":"Ya","family":"Zhang","sequence":"additional","affiliation":[{"name":"Institute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi 184-8588, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,7,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"97","DOI":"10.1038\/nphoton.2007.3","article-title":"Cutting-edge terahertz technology","volume":"1","author":"Tonouchi","year":"2007","journal-title":"Nat. Photonics"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"7146","DOI":"10.1021\/jp020579i","article-title":"Terahertz Spectroscopy","volume":"106","author":"Beard","year":"2002","journal-title":"J. Phys. Chem. B"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"124","DOI":"10.1002\/lpor.201000011","article-title":"Terahertz spectroscopy and imaging\u2014Modern techniques and applications","volume":"5","author":"Jepsen","year":"2011","journal-title":"Laser Photonics Rev."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"4342","DOI":"10.1021\/ac200907z","article-title":"Terahertz Spectroscopy","volume":"83","author":"Baxter","year":"2011","journal-title":"Anal. Chem."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"351","DOI":"10.1098\/rsta.2003.1321","article-title":"Applications of terahertz spectroscopy to pharmaceutical sciences","volume":"362","author":"Davies","year":"2004","journal-title":"Philos. Trans. R. Soc. Lond. Ser. A Math. Phys. Eng. Sci."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"2549","DOI":"10.1364\/OE.11.002549","article-title":"Non-destructive terahertz imaging of illicit drugs using spectral fingerprints","volume":"11","author":"Kawase","year":"2003","journal-title":"Opt. Express"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"9417","DOI":"10.1364\/OE.26.009417","article-title":"Twenty years of terahertz imaging [Invited]","volume":"26","author":"Mittleman","year":"2018","journal-title":"Opt. Express"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1085","DOI":"10.1007\/s003400050750","article-title":"Recent advances in terahertz imaging","volume":"68","author":"Mittleman","year":"1999","journal-title":"Appl. Phys. B"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"4068","DOI":"10.1063\/1.1751620","article-title":"Terahertz quantum-well photodetector","volume":"84","author":"Liu","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"168","DOI":"10.1364\/OL.33.000168","article-title":"Terahertz frontside-illuminated quantum-well photodetector","volume":"33","author":"Patrashin","year":"2008","journal-title":"Opt. Lett."},{"key":"ref_11","unstructured":"Willardson, R.K., and Beer, A.C. (1977). Semiconductors and Semimetals. Vol. 12: Infrared Detectors II, Academic Press."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1364\/JOSA.43.000001","article-title":"The general theory of bolometer performance","volume":"43","author":"Jones","year":"1953","journal-title":"J. Opt. Soc. Am."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1063\/1.357128","article-title":"Bolometers for infrared and millimeter waves","volume":"76","author":"Richards","year":"1994","journal-title":"J. Appl. Phys."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"2092","DOI":"10.1117\/12.143951","article-title":"Vanadium oxide films for optical switching and detection","volume":"32","author":"Jerominek","year":"1993","journal-title":"Opt. Eng."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1117\/12.445291","article-title":"Integrated vacuum packaging for low-cost light-weight uncooled microbolometer arrays","volume":"4369","author":"Cole","year":"2001","journal-title":"Proc. SPIE"},{"key":"ref_16","first-page":"69401","article-title":"Detection of terahertz radiation from quantum cascade laser using vanadium oxide microbolometer focal plane arrays","volume":"6940","author":"Oda","year":"2008","journal-title":"Proc. SPIE"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1528","DOI":"10.1021\/nl304687p","article-title":"Nanomechanical torsional resonators for frequency-shift infrared thermal sensing","volume":"13","author":"Zhang","year":"2013","journal-title":"Nano Lett."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"163503","DOI":"10.1063\/1.4947444","article-title":"Room temperature, very sensitive thermometer using a doubly clamped microelectromechanical beam resonator for bolometer applications","volume":"108","author":"Zhang","year":"2016","journal-title":"Appl. Phys. Lett."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"151602","DOI":"10.1063\/1.5045256","article-title":"Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction","volume":"125","author":"Zhang","year":"2019","journal-title":"J. Appl. Phys."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Froberger, K., Walter, B., Lavancier, M., Peretti, R., Ducournau, G., Lampin, J., Faucher, M., and Barbieri, S. (2022). SOI-based micro-mechanical terahertz detector operating at room-temperature. arXiv.","DOI":"10.1063\/5.0095126"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"687","DOI":"10.1063\/1.1642753","article-title":"Thermal conductivity of periodic microporous silicon films","volume":"84","author":"Song","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"e1700027","DOI":"10.1126\/sciadv.1700027","article-title":"Heat conduction tuning by wave nature of phonons","volume":"3","author":"Maire","year":"2017","journal-title":"Sci. Adv."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"080101","DOI":"10.7567\/JJAP.57.080101","article-title":"Thermal phonon engineering by tailored nanostructures","volume":"57","author":"Nomura","year":"2018","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"085102","DOI":"10.1063\/1.5113521","article-title":"Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures","volume":"9","author":"Zhang","year":"2019","journal-title":"AIP Adv."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"275","DOI":"10.1038\/nnano.2008.84","article-title":"Bit storage and bit flip operations in an electromechanical oscillator","volume":"3","author":"Mahboob","year":"2008","journal-title":"Nat. Nanotechnol."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"023504","DOI":"10.1063\/1.4993740","article-title":"Effect of buckling on the thermal response of microelectromechanical beam resonators","volume":"111","author":"Zhang","year":"2017","journal-title":"Appl. Phys. Lett."},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Qiu, B., Zhang, Y., Akahane, K., Nagai, N., and Hirakawa, K. (2018, January 9\u201314). Strain tuning in MEMS beam resonators for terahertz bolometer applications. Proceedings of the 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Nagoya, Japan.","DOI":"10.1109\/IRMMW-THz.2018.8510371"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"203503","DOI":"10.1063\/5.0029188","article-title":"Effect of beam deflection on the thermal responsivity of GaAs-based doubly clamped microelectromechanical beam resonators","volume":"117","author":"Qiu","year":"2020","journal-title":"Appl. Phys. Lett."},{"key":"ref_29","first-page":"460","article-title":"Deep-nanometer-scale terahertz spectroscopy using a transistor geometry with metal nanogap electrodes","volume":"2","author":"Zhang","year":"2021","journal-title":"Light Adv. Manuf."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"188","DOI":"10.1364\/JOSA.44.000188","article-title":"Infrared absorption of thin metal films","volume":"44","author":"Hilsum","year":"1954","journal-title":"J. Opt. Soc. Am."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/14\/5109\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T23:43:57Z","timestamp":1760139837000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/14\/5109"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,7,7]]},"references-count":30,"journal-issue":{"issue":"14","published-online":{"date-parts":[[2022,7]]}},"alternative-id":["s22145109"],"URL":"https:\/\/doi.org\/10.3390\/s22145109","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2022,7,7]]}}}