{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T01:05:24Z","timestamp":1760231124870,"version":"build-2065373602"},"reference-count":62,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2022,8,26]],"date-time":"2022-08-26T00:00:00Z","timestamp":1661472000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Natural Sciences and Engineering Research Council of Canada (NSERC)"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si3N4 layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm2\/gr].<\/jats:p>","DOI":"10.3390\/s22176428","type":"journal-article","created":{"date-parts":[[2022,8,30]],"date-time":"2022-08-30T01:37:55Z","timestamp":1661823475000},"page":"6428","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["A Study of Optimizing Lamb Wave Acoustic Mass Sensors\u2019 Performance through Adjustment of the Transduction Electrode Metallization Ratio"],"prefix":"10.3390","volume":"22","author":[{"given":"Fatemeh","family":"Gholami","sequence":"first","affiliation":[{"name":"Microtechnologies Integration & Convergence Research Group, Universit\u00e9 du Qu\u00e9bec \u00e0 Montr\u00e9al, Montreal, QC H2X 3Y7, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Andy","family":"Shih","sequence":"additional","affiliation":[{"name":"Department of Electrical Engineering, \u00c9cole de Technologie Sup\u00e9rieure (ETS), Montreal, QC H3C 1K3, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2413-7549","authenticated-orcid":false,"given":"Alexandre","family":"Robichaud","sequence":"additional","affiliation":[{"name":"Department of Applied Sciences, Universit\u00e9 du Qu\u00e9bec \u00e0 Chicoutimi (UQAC), Chicoutimi, QC G7H 2B1, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3665-0721","authenticated-orcid":false,"given":"Paul-Vahe","family":"Cicek","sequence":"additional","affiliation":[{"name":"Microtechnologies Integration & Convergence Research Group, Universit\u00e9 du Qu\u00e9bec \u00e0 Montr\u00e9al, Montreal, QC H2X 3Y7, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,8,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1016\/j.snb.2010.05.002","article-title":"Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol-gel derived nanocrystalline zinc oxide film","volume":"148","author":"Hong","year":"2010","journal-title":"Sens. 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