{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,6]],"date-time":"2026-06-06T16:16:52Z","timestamp":1780762612129,"version":"3.54.1"},"reference-count":35,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2022,8,28]],"date-time":"2022-08-28T00:00:00Z","timestamp":1661644800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Special Fund for Scientific and Technological Innovation Strategy of Guangdong Province (Special Fund for \u201cClimbing Plan\u201d)","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"General project of Shenzhen university stability support plan","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"General project of Shenzhen university stability support plan","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"General project of Shenzhen university stability support plan","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"General project of Shenzhen university stability support plan","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"General project of Shenzhen university stability support plan","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"General project of Shenzhen university stability support plan","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"General project of Shenzhen university stability support plan","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"General project of Shenzhen university stability support plan","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Guangdong university innovation team project (Natural Science)","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Special projects in key fields of colleges and universities of Guangdong Province","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Basic and Applied Basic Research Foundation of Guangdong Province Natural Science Foundation","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Shenzhen, Hong Kong and Macao Science and Technology plan (Class C)","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Natural Science Foundation of Top Talent of SZTU","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["Pdjh2022b0463"],"award-info":[{"award-number":["Pdjh2022b0463"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["SZWD2021006"],"award-info":[{"award-number":["SZWD2021006"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["2020KCXTD029"],"award-info":[{"award-number":["2020KCXTD029"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["2021ZDZX1013"],"award-info":[{"award-number":["2021ZDZX1013"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["2022A1515010841"],"award-info":[{"award-number":["2022A1515010841"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["SGDX20201103009520303"],"award-info":[{"award-number":["SGDX20201103009520303"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["GDRC202103"],"award-info":[{"award-number":["GDRC202103"]}]},{"name":"Guangdong Provincial Major Scientific Research Grant","award":["2018KZDXM077"],"award-info":[{"award-number":["2018KZDXM077"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A high-frequency surface acoustic wave (SAW) resonator, based on sandwiched interdigital transducer (IDT), is presented. The resonator has the structure of diamond\/AlN\/IDT\/AlN\/diamond, with Si as the substrate. The results show that its phase velocity and electromechanical coupling coefficient are both significantly improved, compared with that of the traditional interdigital transduce-free surface structure. The M2 mode of the sandwiched structure can excite an operation frequency up to 6.15 GHz, with an electromechanical coupling coefficient of 5.53%, phase velocity of 12,470 m\/s, and temperature coefficient of frequency of \u22126.3 ppm\/\u00b0C. This structure provides a new ideal for the design of high-performance and high-frequency SAW devices.<\/jats:p>","DOI":"10.3390\/s22176479","type":"journal-article","created":{"date-parts":[[2022,8,30]],"date-time":"2022-08-30T01:37:55Z","timestamp":1661823475000},"page":"6479","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":19,"title":["High-Frequency Surface Acoustic Wave Resonator with Diamond\/AlN\/IDT\/AlN\/Diamond Multilayer Structure"],"prefix":"10.3390","volume":"22","author":[{"given":"Liang","family":"Lei","sequence":"first","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bo","family":"Dong","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuxuan","family":"Hu","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yisong","family":"Lei","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhizhong","family":"Wang","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuangchen","family":"Ruan","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,8,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"3626","DOI":"10.1039\/c3lc50361e","article-title":"Surface acoustic wave microfluidics","volume":"13","author":"Ding","year":"2013","journal-title":"Lab Chip"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"355","DOI":"10.1109\/5.75091","article-title":"Advanced channelization for RF, microwave, and millimeterwave applications","volume":"79","author":"Anderson","year":"1991","journal-title":"Proc. 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Lett."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"106460","DOI":"10.1016\/j.ultras.2021.106460","article-title":"Structure with thin SiOx\/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices","volume":"115","author":"Shen","year":"2021","journal-title":"Ultrasonics"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.ultras.2019.03.001","article-title":"High-velocity non-attenuated acoustic waves in LiTaO3\/quartz layered substrates for high frequency resonators","volume":"95","author":"Naumenko","year":"2019","journal-title":"Ultrasonics"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1016\/j.sna.2019.03.023","article-title":"Ultra high frequency acoustic wave propagation in fully polymer based surface acoustic wave device","volume":"292","author":"Kumar","year":"2019","journal-title":"Sens. Actuators A Phys."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"123262","DOI":"10.1109\/ACCESS.2020.3007162","article-title":"3D layout of interdigital transducers for high frequency surface acoustic wave devices","volume":"8","author":"Shen","year":"2020","journal-title":"IEEE Access"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"113504","DOI":"10.1063\/1.5086445","article-title":"High-frequency V-doped ZnO\/SiC surface acoustic wave devices with enhanced electromechanical coupling coefficient","volume":"114","author":"Fu","year":"2019","journal-title":"Appl. Phys. Lett."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"021001","DOI":"10.1088\/1674-4926\/37\/2\/021001","article-title":"Surface acoustic wave devices for sensor applications","volume":"37","author":"Liu","year":"2016","journal-title":"J. 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