{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,18]],"date-time":"2026-01-18T23:47:13Z","timestamp":1768780033538,"version":"3.49.0"},"reference-count":33,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2022,9,8]],"date-time":"2022-09-08T00:00:00Z","timestamp":1662595200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Defense Industrial Technology Development Program","award":["JCKY2017412C003"],"award-info":[{"award-number":["JCKY2017412C003"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 \u00b0C. The micro-hotplate heats to nearly 240 \u00b0C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors.<\/jats:p>","DOI":"10.3390\/s22186778","type":"journal-article","created":{"date-parts":[[2022,9,8]],"date-time":"2022-09-08T04:18:32Z","timestamp":1662610712000},"page":"6778","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors"],"prefix":"10.3390","volume":"22","author":[{"given":"Bolun","family":"Tang","sequence":"first","affiliation":[{"name":"Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China"}]},{"given":"Yunbo","family":"Shi","sequence":"additional","affiliation":[{"name":"Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China"}]},{"given":"Jianwei","family":"Li","sequence":"additional","affiliation":[{"name":"Computer Vision and Intellisense Lab, School of Computer Science, University of Nottingham Ningbo China (UNNC), 199 Taikang East Road, Ningbo 315100, China"}]},{"given":"Jie","family":"Tang","sequence":"additional","affiliation":[{"name":"Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China"}]},{"given":"Qiaohua","family":"Feng","sequence":"additional","affiliation":[{"name":"Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China"}]}],"member":"1968","published-online":{"date-parts":[[2022,9,8]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"18381","DOI":"10.1109\/JSEN.2021.3091854","article-title":"MEMS Gas Sensors: A Review","volume":"21","author":"Asri","year":"2021","journal-title":"IEEE Sens. 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