{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,2]],"date-time":"2026-04-02T16:03:05Z","timestamp":1775145785109,"version":"3.50.1"},"reference-count":33,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2022,9,14]],"date-time":"2022-09-14T00:00:00Z","timestamp":1663113600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Natural Science Foundation of China","award":["11904045"],"award-info":[{"award-number":["11904045"]}]},{"name":"National Natural Science Foundation of China","award":["61905034"],"award-info":[{"award-number":["61905034"]}]},{"name":"National Natural Science Foundation of China","award":["61705031"],"award-info":[{"award-number":["61705031"]}]},{"name":"National Natural Science Foundation of China","award":["62075025"],"award-info":[{"award-number":["62075025"]}]},{"name":"National Natural Science Foundation of China","award":["2020M673542"],"award-info":[{"award-number":["2020M673542"]}]},{"name":"Postdoctoral Research Foundation of China","award":["11904045"],"award-info":[{"award-number":["11904045"]}]},{"name":"Postdoctoral Research Foundation of China","award":["61905034"],"award-info":[{"award-number":["61905034"]}]},{"name":"Postdoctoral Research Foundation of China","award":["61705031"],"award-info":[{"award-number":["61705031"]}]},{"name":"Postdoctoral Research Foundation of China","award":["62075025"],"award-info":[{"award-number":["62075025"]}]},{"name":"Postdoctoral Research Foundation of China","award":["2020M673542"],"award-info":[{"award-number":["2020M673542"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>An ultra-high-sensitivity, miniaturized Fabry-Perot interferometric (FPI) fiber-optic microphone (FOM) has been developed, utilizing a silicon cantilever as an acoustic transducer. The volumes of the cavity and the FOM are determined to be 60 microliters and 102 cubic millimeters, respectively. The FOM has acoustic pressure sensitivities of 1506 nm\/Pa at 2500 Hz and 26,773 nm\/Pa at 3233 Hz. The minimum detectable pressure (MDP) and signal-to-noise ratio (SNR) of the designed FOM are 0.93 \u03bcPa\/Hz1\/2 and 70.14 dB, respectively, at an acoustic pressure of 0.003 Pa. The designed FOM has the characteristics of ultra-high sensitivity, low MDP, and small size, which makes it suitable for the detection of weak acoustic signals, especially in the field of miniaturized all-optical photoacoustic spectroscopy.<\/jats:p>","DOI":"10.3390\/s22186948","type":"journal-article","created":{"date-parts":[[2022,9,14]],"date-time":"2022-09-14T23:16:36Z","timestamp":1663197396000},"page":"6948","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection"],"prefix":"10.3390","volume":"22","author":[{"given":"Guojie","family":"Wu","sequence":"first","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Haie","family":"Li","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Hongxin","family":"Ye","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Zhenfeng","family":"Gong","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Junsheng","family":"Ma","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Min","family":"Guo","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0495-2549","authenticated-orcid":false,"given":"Ke","family":"Chen","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Wei","family":"Peng","sequence":"additional","affiliation":[{"name":"School of Physics, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Qingxu","family":"Yu","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1000-4497","authenticated-orcid":false,"given":"Liang","family":"Mei","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China"}]}],"member":"1968","published-online":{"date-parts":[[2022,9,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"85821","DOI":"10.1109\/ACCESS.2019.2924736","article-title":"A Comprehensive Study of Optical Fiber Acoustic Sensing","volume":"7","author":"Wang","year":"2019","journal-title":"IEEE Access"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"025022","DOI":"10.1088\/1361-665X\/26\/2\/025022","article-title":"Gas pipeline leakage detection based on PZT sensors","volume":"26","author":"Zhu","year":"2017","journal-title":"Smart Mater. 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