{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,17]],"date-time":"2026-03-17T00:18:29Z","timestamp":1773706709259,"version":"3.50.1"},"reference-count":47,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2022,9,17]],"date-time":"2022-09-17T00:00:00Z","timestamp":1663372800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"NATO Science for Peace","award":["NATO Science for Peace"],"award-info":[{"award-number":["NATO Science for Peace"]}]},{"name":"NATO Science for Peace","award":["801267"],"award-info":[{"award-number":["801267"]}]},{"name":"NATO Science for Peace","award":["2018717"],"award-info":[{"award-number":["2018717"]}]},{"name":"NATO Science for Peace","award":["DMR-1911592"],"award-info":[{"award-number":["DMR-1911592"]}]},{"name":"European Union Horizon 2020","award":["NATO Science for Peace"],"award-info":[{"award-number":["NATO Science for Peace"]}]},{"name":"European Union Horizon 2020","award":["801267"],"award-info":[{"award-number":["801267"]}]},{"name":"European Union Horizon 2020","award":["2018717"],"award-info":[{"award-number":["2018717"]}]},{"name":"European Union Horizon 2020","award":["DMR-1911592"],"award-info":[{"award-number":["DMR-1911592"]}]},{"name":"NSF-BSF program","award":["NATO Science for Peace"],"award-info":[{"award-number":["NATO Science for Peace"]}]},{"name":"NSF-BSF program","award":["801267"],"award-info":[{"award-number":["801267"]}]},{"name":"NSF-BSF program","award":["2018717"],"award-info":[{"award-number":["2018717"]}]},{"name":"NSF-BSF program","award":["DMR-1911592"],"award-info":[{"award-number":["DMR-1911592"]}]},{"name":"U.S. National Science Foundation","award":["NATO Science for Peace"],"award-info":[{"award-number":["NATO Science for Peace"]}]},{"name":"U.S. National Science Foundation","award":["801267"],"award-info":[{"award-number":["801267"]}]},{"name":"U.S. National Science Foundation","award":["2018717"],"award-info":[{"award-number":["2018717"]}]},{"name":"U.S. National Science Foundation","award":["DMR-1911592"],"award-info":[{"award-number":["DMR-1911592"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A protocol for successfully depositing [001] textured, 2\u20133 \u00b5m thick films of Al0.75Sc0.25N, is proposed. The procedure relies on the fact that sputtered Ti is [001]-textured \u03b1-phase (hcp). Diffusion of nitrogen ions into the \u03b1-Ti film during reactive sputtering of Al0.75,Sc0.25N likely forms a [111]-oriented TiN intermediate layer. The lattice mismatch of this very thin film with Al0.75Sc0.25N is ~3.7%, providing excellent conditions for epitaxial growth. In contrast to earlier reports, the Al0.75Sc0.25N films prepared in the current study are Al-terminated. Low growth stress (&lt;100 MPa) allows films up to 3 \u00b5m thick to be deposited without loss of orientation or decrease in piezoelectric coefficient. An advantage of the proposed technique is that it is compatible with a variety of substrates commonly used for actuators or MEMS, as demonstrated here for both Si wafers and D263 borosilicate glass. Additionally, thicker films can potentially lead to increased piezoelectric stress\/strain by supporting application of higher voltage, but without increase in the magnitude of the electric field.<\/jats:p>","DOI":"10.3390\/s22187041","type":"journal-article","created":{"date-parts":[[2022,9,19]],"date-time":"2022-09-19T04:49:22Z","timestamp":1663562962000},"page":"7041","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["C-Axis Textured, 2\u20133 \u03bcm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN\/Ti Seeding Layers for MEMS Applications"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-9111-7778","authenticated-orcid":false,"given":"Asaf","family":"Cohen","sequence":"first","affiliation":[{"name":"Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Hagai","family":"Cohen","sequence":"additional","affiliation":[{"name":"Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Sidney R.","family":"Cohen","sequence":"additional","affiliation":[{"name":"Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Sergey","family":"Khodorov","sequence":"additional","affiliation":[{"name":"Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Yishay","family":"Feldman","sequence":"additional","affiliation":[{"name":"Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Anna","family":"Kossoy","sequence":"additional","affiliation":[{"name":"Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Ifat","family":"Kaplan-Ashiri","sequence":"additional","affiliation":[{"name":"Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Anatoly","family":"Frenkel","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, NY 11794, USA"}]},{"given":"Ellen","family":"Wachtel","sequence":"additional","affiliation":[{"name":"Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"Igor","family":"Lubomirsky","sequence":"additional","affiliation":[{"name":"Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel"}]},{"given":"David","family":"Ehre","sequence":"additional","affiliation":[{"name":"Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel"}]}],"member":"1968","published-online":{"date-parts":[[2022,9,17]]},"reference":[{"key":"ref_1","unstructured":"Aigner, R., Kaitila, J., Ella, J., Elbrecht, L., Nessler, W., Handtmann, M., Herzog, T.R., and Marksteiner, S. 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