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The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance. With the aluminum nitride as the piezoelectric layer, the resonance frequency of the FBAR can reach 6.360 GHz, based on the finite element method. The product of the corresponding frequency and the quality factor, f \u00d7 Q is more than 2 \u00d7 1013. This design model provides a good solution for the high-frequency filters and high-sensitivity sensor designs.<\/jats:p>","DOI":"10.3390\/s22197439","type":"journal-article","created":{"date-parts":[[2022,10,10]],"date-time":"2022-10-10T03:07:28Z","timestamp":1665371248000},"page":"7439","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector"],"prefix":"10.3390","volume":"22","author":[{"given":"Yuxuan","family":"Hu","sequence":"first","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bo","family":"Dong","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Liang","family":"Lei","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhizhong","family":"Wang","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuangchen","family":"Ruan","sequence":"additional","affiliation":[{"name":"College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,9,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"497","DOI":"10.1109\/TUFFC.2006.1593390","article-title":"Effect of critical dimension variation on SAW correlator energy","volume":"53","author":"Skinner","year":"2006","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"531","DOI":"10.1109\/EDL.1987.26718","article-title":"A thin-film bulk-acoustic-wave resonator-controlled oscillator on silicon","volume":"8","author":"Burkland","year":"1987","journal-title":"IEEE Electron Device Lett."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"769","DOI":"10.1109\/22.915462","article-title":"Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films","volume":"49","author":"Su","year":"2001","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"741","DOI":"10.1109\/JMEMS.2020.3014584","article-title":"A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films","volume":"29","author":"Wang","year":"2020","journal-title":"J. Microelectromech. Syst."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"857","DOI":"10.1109\/TUFFC.2008.720","article-title":"Synthesis and bulk acoustic wave properties on the dual mode frequency shift of solidly mounted resonators","volume":"55","author":"Chung","year":"2008","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1535","DOI":"10.1109\/TUFFC.2022.3150076","article-title":"Wide Band BAW Filter Based on Single-Crystalline LiNbO\u2083; Thin Film With Insulating Bragg Reflector","volume":"69","author":"Lv","year":"2022","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Gu, X., Liu, J., Cai, Y., Liu, Y., Gao, C., Wen, Z., Guo, S., and Sun, C. (2021, January 25\u201329). Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5\u00b0 Z-cut LiNbO3. Proceedings of the 2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS), Xiamen, China.","DOI":"10.1109\/NEMS51815.2021.9451522"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"217","DOI":"10.1109\/JMEMS.2022.3143354","article-title":"Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators","volume":"31","author":"Yandrapalli","year":"2022","journal-title":"J. Microelectromech. Syst."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"179","DOI":"10.1016\/j.ultras.2015.07.009","article-title":"Liquid sensor based on a piezoelectric lateral electric field-excited resonator","volume":"63","author":"Zaitsev","year":"2015","journal-title":"Ultrasonics"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"341","DOI":"10.1016\/j.tsf.2006.03.005","article-title":"Shear mode coupling and properties dispersion in 8GHz range AlN thin film bulk acoustic wave (BAW) resonator","volume":"514","author":"Martin","year":"2006","journal-title":"Thin Solid Film."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"65","DOI":"10.1016\/j.tsf.2016.11.045","article-title":"Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD","volume":"623","author":"Chubarov","year":"2017","journal-title":"Thin Solid Film."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2767","DOI":"10.1007\/s12206-015-0605-0","article-title":"Energy trapping of thickness-extensional modes in thin film bulk acoustic wave resonators","volume":"29","author":"Zhao","year":"2015","journal-title":"J. Mech. Sci. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"015002","DOI":"10.1063\/1.4939695","article-title":"Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters","volume":"6","author":"Zhao","year":"2016","journal-title":"AIP Adv."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1406","DOI":"10.1109\/JMEMS.2006.886012","article-title":"Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators","volume":"15","author":"Piazza","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"778","DOI":"10.1109\/TUFFC.2016.2531744","article-title":"An Investigation of Lateral Modes in FBAR Resonators","volume":"63","author":"Jamneala","year":"2016","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"128336","DOI":"10.1016\/j.surfcoat.2022.128336","article-title":"Rayleigh and shear-horizontal surface acoustic waves simultaneously generated in inclined ZnO films for acoustofluidic lab-on-a-chip","volume":"442","author":"Pang","year":"2022","journal-title":"Surf. Coat. Technol."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"379","DOI":"10.1016\/j.sna.2010.11.008","article-title":"Solidly mounted resonators operated in thickness shear mode based on c-axis oriented AlN films","volume":"165","author":"Chen","year":"2011","journal-title":"Sens. Actuators A Phys."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"753","DOI":"10.1016\/j.jsv.2006.01.020","article-title":"Guided Lamb waves for identification of damage in composite structures: A review","volume":"295","author":"Su","year":"2006","journal-title":"J. Sound Vib."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"2095","DOI":"10.1109\/TUFFC.2006.149","article-title":"Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators","volume":"53","author":"Bjurstrom","year":"2006","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1109\/MMW.2003.1266067","article-title":"A review of thin-film resonator technology","volume":"4","author":"Lakin","year":"2003","journal-title":"IEEE Microw. Mag."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"867","DOI":"10.1142\/S0129156400000684","article-title":"Coupling-of-Mode Analysis of SAW Devices","volume":"10","author":"Koskela","year":"2000","journal-title":"Int. J. High Speed Electron. Syst."},{"key":"ref_22","unstructured":"Wright, P.V. (1989\u20132, January 31). Low-cost high-performance resonator and coupled-resonator design: NSPUDT and other innovative structures. Proceedings of the 43rd Annual Symposium on Frequency Control, Denver, CO, USA."},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Wang, J.S., and Lakin, K.M. (1982, January 27\u201329). Sputtered C-Axis Inclined ZnO Films for Shear Wave Resonators. Proceedings of the 1982 Ultrasonics Symposium, San Diego, CA, USA.","DOI":"10.1109\/ULTSYM.1982.197872"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"602","DOI":"10.1016\/j.aeue.2010.09.004","article-title":"Design, realization and test of a 2.1GHz ultra-low phase noise oscillator based on BAW resonator","volume":"65","author":"Li","year":"2011","journal-title":"AEU-Int. J. Electron. Commun."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"2556","DOI":"10.1016\/j.matpr.2022.04.769","article-title":"BVD and Mason\u2019s modelling of piezoelectric bulk acoustic resonators for high frequency applications","volume":"65","author":"Chaudhary","year":"2022","journal-title":"Mater. Today Proc."},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Tiersten, H.F. (1969). Linear Piezoelectric Plate Vibrations, Springer.","DOI":"10.1007\/978-1-4899-6453-3"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"S4-606","DOI":"10.1179\/1432891714Z.000000000753","article-title":"Electrode influence on effective electromechanical coupling coefficient of thin film bulk acoustic resonators","volume":"18","author":"Zhang","year":"2014","journal-title":"Mater. Res. Innov."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"170","DOI":"10.1016\/j.ijsolstr.2017.01.031","article-title":"Two-dimensional equations for piezoelectric thin-film acoustic wave resonators","volume":"110\u2013111","author":"Li","year":"2017","journal-title":"Int. J. Solids Struct."},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Liu, Z., Wu, H., Ren, W., and Ye, Z.-G. (2022). Piezoelectric and ferroelectric materials: Fundamentals, recent progress, and applications. Reference Module in Chemistry, Molecular Sciences and Chemical Engineering, Elsevier.","DOI":"10.1016\/B978-0-12-823144-9.00069-8"},{"key":"ref_30","unstructured":"Buschow, K.H.J., Cahn, R.W., Flemings, M.C., Ilschner, B., Kramer, E.J., Mahajan, S., and Veyssi\u00e8re, P. (2001). Piezoelectric Thin Films for MEMS. Encyclopedia of Materials: Science and Technology, Elsevier."},{"key":"ref_31","unstructured":"Olabi, A.-G. (2022). Fundamentals of Piezoelectrics. Encyclopedia of Smart Materials, Elsevier."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"105961","DOI":"10.1016\/j.ultras.2019.105961","article-title":"Excitation and detection of evanescent acoustic waves in piezoelectric plates: Theoretical and 2D FEM modeling","volume":"99","author":"Kuznetsova","year":"2019","journal-title":"Ultrasonics"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"92","DOI":"10.1016\/j.ultras.2018.11.014","article-title":"The impact of area on BAW resonator performance and an approach to device miniaturization","volume":"94","author":"Nguyen","year":"2019","journal-title":"Ultrasonics"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"e849","DOI":"10.1016\/j.ultras.2006.05.182","article-title":"Calculation of electromechanical coupling coefficient of Lamb waves in multilayered plates","volume":"44","author":"Fan","year":"2006","journal-title":"Ultrasonics"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1016\/j.sna.2014.01.033","article-title":"A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication","volume":"209","author":"Olsson","year":"2014","journal-title":"Sens. Actuators A Phys."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"377","DOI":"10.1016\/S0041-624X(01)00062-2","article-title":"Extraction of electromechanical coupling coefficient of piezoelectric thin films deposited on substrates","volume":"39","author":"Zhou","year":"2001","journal-title":"Ultrasonics"},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"1375","DOI":"10.1016\/S0003-682X(02)00016-6","article-title":"Modal coupling in acoustic waveguides: Planar discontinuities","volume":"63","author":"Muehleisen","year":"2002","journal-title":"Appl. Acoust."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"9510","DOI":"10.1038\/srep09510","article-title":"Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer","volume":"5","author":"Chen","year":"2015","journal-title":"Sci. Rep."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"535","DOI":"10.1109\/58.996574","article-title":"Thin film bulk acoustic wave filter","volume":"49","author":"Ylilammi","year":"2002","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"5262","DOI":"10.1016\/j.tsf.2007.07.105","article-title":"Deposition and structural properties of RF magnetron-sputtered ZnO thin films on Pt\/Ti\/SiNx\/Si substrate for FBAR device","volume":"516","author":"Lin","year":"2008","journal-title":"Thin Solid Film."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"162","DOI":"10.1016\/j.sna.2008.01.011","article-title":"Monolithic 1-Chip FBAR duplexer for W-CDMA handsets","volume":"143","author":"Nam","year":"2008","journal-title":"Sens. Actuators A Phys."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1109\/TUFFC.2004.1268466","article-title":"Estimating materials parameters in thin-film BAW resonators using measured dispersion curves","volume":"51","author":"Makkonen","year":"2004","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"129","DOI":"10.1016\/j.sna.2018.10.023","article-title":"Pt-wire bonding optimization for electroplated Pt films on \u03b3-Al2O3 for high temperature and harsh environment applications","volume":"284","author":"Brachmann","year":"2018","journal-title":"Sens. Actuators A Phys."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"4673","DOI":"10.1016\/j.tsf.2009.02.139","article-title":"AlN films sputtered on iridium electrodes for bulk acoustic wave resonators","volume":"517","author":"Clement","year":"2009","journal-title":"Thin Solid Film."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"2372","DOI":"10.1016\/j.mee.2011.02.080","article-title":"Aluminum Nitride piezo-MEMS on polyimide flexible substrates","volume":"88","author":"Petroni","year":"2011","journal-title":"Microelectron. Eng."},{"key":"ref_46","unstructured":"Stokes, G.G. (2007). On the Theories of the Internal Friction of Fluids in Motion, and of the Equilibrium and Motion of Elastic Solids, GeoScienceWorld."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/19\/7439\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T00:44:33Z","timestamp":1760143473000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/19\/7439"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,9,30]]},"references-count":46,"journal-issue":{"issue":"19","published-online":{"date-parts":[[2022,10]]}},"alternative-id":["s22197439"],"URL":"https:\/\/doi.org\/10.3390\/s22197439","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022,9,30]]}}}