{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,4]],"date-time":"2026-04-04T03:38:14Z","timestamp":1775273894311,"version":"3.50.1"},"reference-count":25,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2022,10,7]],"date-time":"2022-10-07T00:00:00Z","timestamp":1665100800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2019YFC1509602"],"award-info":[{"award-number":["2019YFC1509602"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["SKLGP2019Z012"],"award-info":[{"award-number":["SKLGP2019Z012"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2021YFG0377"],"award-info":[{"award-number":["2021YFG0377"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2021YFS0324"],"award-info":[{"award-number":["2021YFS0324"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"name":"the State Key Laboratory of Geohazard Prevention and Geoenvironment Protection Independent Research Project","award":["2019YFC1509602"],"award-info":[{"award-number":["2019YFC1509602"]}]},{"name":"the State Key Laboratory of Geohazard Prevention and Geoenvironment Protection Independent Research Project","award":["SKLGP2019Z012"],"award-info":[{"award-number":["SKLGP2019Z012"]}]},{"name":"the State Key Laboratory of Geohazard Prevention and Geoenvironment Protection Independent Research Project","award":["2021YFG0377"],"award-info":[{"award-number":["2021YFG0377"]}]},{"name":"the State Key Laboratory of Geohazard Prevention and Geoenvironment Protection Independent Research Project","award":["2021YFS0324"],"award-info":[{"award-number":["2021YFS0324"]}]},{"name":"Sichuan Science and Technology Program","award":["2019YFC1509602"],"award-info":[{"award-number":["2019YFC1509602"]}]},{"name":"Sichuan Science and Technology Program","award":["SKLGP2019Z012"],"award-info":[{"award-number":["SKLGP2019Z012"]}]},{"name":"Sichuan Science and Technology Program","award":["2021YFG0377"],"award-info":[{"award-number":["2021YFG0377"]}]},{"name":"Sichuan Science and Technology Program","award":["2021YFS0324"],"award-info":[{"award-number":["2021YFS0324"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 \u03bcV\/V\/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0\u2013200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting.<\/jats:p>","DOI":"10.3390\/s22197593","type":"journal-article","created":{"date-parts":[[2022,10,10]],"date-time":"2022-10-10T05:12:21Z","timestamp":1665378741000},"page":"7593","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":18,"title":["A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-9257-2820","authenticated-orcid":false,"given":"Honghui","family":"Wang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Geohazard Prevention and Geoenvironment Protection, Chengdu University of Technology, Chengdu 610059, China"},{"name":"College of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dingkang","family":"Zou","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Geohazard Prevention and Geoenvironment Protection, Chengdu University of Technology, Chengdu 610059, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Peng","sequence":"additional","affiliation":[{"name":"College of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guangle","family":"Yao","sequence":"additional","affiliation":[{"name":"College of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jizhou","family":"Ren","sequence":"additional","affiliation":[{"name":"College of Computer Science and Cyber Security, Chengdu University of Technology, Chengdu 610059, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,10,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2895","DOI":"10.1007\/s10346-021-01698-2","article-title":"Mechanism Analysis and Partition Characteristics of a Recent Highway Landslide in Southwest China Based on a 3D Multi-Point Deformation Monitoring System","volume":"18","author":"Li","year":"2021","journal-title":"Landslides"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"445","DOI":"10.1631\/jzus.A1100131","article-title":"Excavation-Induced Microseismicity: Microseismic Monitoring and Numerical Simulation","volume":"13","author":"Xu","year":"2012","journal-title":"J. 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