{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T11:54:17Z","timestamp":1777895657641,"version":"3.51.4"},"reference-count":53,"publisher":"MDPI AG","issue":"22","license":[{"start":{"date-parts":[[2022,11,8]],"date-time":"2022-11-08T00:00:00Z","timestamp":1667865600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite element method, coupled with spectral domain analysis (FEMSDA), allow us to independently access different properties of a SAW device and fully characterize its operation using the coupling-of-modes theory (COM). A set of chemical SAW sensors coated with parylene C layers of different thicknesses (1, 1.5, and 2 \u00b5m) and an uncoated sensor were used as test samples. The sensors represent dual-channel electroacoustic delay lines operating in the vicinity of 77 MHz. The IDTs consist of split aluminum electrodes deposited on a AT-cut quartz substrate. The thickness-dependent influence of the parylene C layer was observed on the operating frequency (SAW velocity), static capacitance, attenuation, crosstalk, and reflection coefficient. COM parameters were reported for the four cases considered; measured and simulated data show good agreement. The presented approach is suitable for the design, characterization, and validation of polymer film-coated SAW sensors.<\/jats:p>","DOI":"10.3390\/s22228611","type":"journal-article","created":{"date-parts":[[2022,11,8]],"date-time":"2022-11-08T09:02:42Z","timestamp":1667898162000},"page":"8611","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-3947-1278","authenticated-orcid":false,"given":"Nikolay","family":"Smagin","sequence":"first","affiliation":[{"name":"IEMN (Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie), UMR CNRS 8520, Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, 59313 Valenciennes, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3875-1355","authenticated-orcid":false,"given":"Meddy","family":"Vanotti","sequence":"additional","affiliation":[{"name":"FEMTO-ST (Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique\u2014Sciences et Technologies), D\u00e9partement Temps-Fr\u00e9quence, UMR CNRS 6174, Universit\u00e9 Bourgogne Franche-Comt\u00e9, 26 Chemin de l\u2019\u00c9pitaphe, 25030 Besan\u00e7on, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1520-5992","authenticated-orcid":false,"given":"Marc","family":"Duquennoy","sequence":"additional","affiliation":[{"name":"IEMN (Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie), UMR CNRS 8520, Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, 59313 Valenciennes, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3074-1865","authenticated-orcid":false,"given":"Lionel","family":"Rousseau","sequence":"additional","affiliation":[{"name":"ESYCOM Lab UMR, CNRS 9007, ESIEE-Paris, Univ. Gustave Eiffel, 77454 Marne-la-Vall\u00e9e, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hassan","family":"Alhousseini","sequence":"additional","affiliation":[{"name":"IEMN (Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie), UMR CNRS 8520, Univ. Polytechnique Hauts-de-France, CNRS, Univ. 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