{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,16]],"date-time":"2026-04-16T11:08:01Z","timestamp":1776337681271,"version":"3.51.2"},"reference-count":34,"publisher":"MDPI AG","issue":"22","license":[{"start":{"date-parts":[[2022,11,17]],"date-time":"2022-11-17T00:00:00Z","timestamp":1668643200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Ministerio de Ciencia, Innovaci\u00f3n y Universidades","award":["PID2019-107885GB-C31\/AEI\/10.13039\/501100011033"],"award-info":[{"award-number":["PID2019-107885GB-C31\/AEI\/10.13039\/501100011033"]}]},{"name":"Ministerio de Ciencia, Innovaci\u00f3n y Universidades","award":["PID2020-114070RB-I00"],"award-info":[{"award-number":["PID2020-114070RB-I00"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting smaller mechanical deformation and a higher stiffness with more release force than previously designed single diagonal beam suspensions. The two-anchor DDGs are designed in two different orientations, in-line and 90\u00b0-rotated. The membrane may include a window to minimize the coupling to the lower electrode. The devices are integrated in a coplanar-waveguide transmission structure and fabricated using an eight-mask surface-micro-machining process on high-resistivity silicon, with dielectric-free actuation electrodes, and including glass protective caps. The RF-MEMS switch behavior is assessed from measurements of the device S parameters in ON and OFF states. The fabricated devices feature a measured pull-in voltage of 76.5 V\/60 V for the windowed\/not-windowed two-anchor DDG membranes, and 54 V\/49.5 V for the windowed\/not-windowed three-anchor DDG membranes, with a good agreement with mechanical 3D simulations. The measured ON-state insertion loss is better than 0.7 dB\/0.8 dB and the isolation in the OFF state is better than 40 dB\/31 dB up to 20 GHz for the in-line\/90\u00b0-rotated devices, also in good agreement with 2.5D electromagnetic simulations.<\/jats:p>","DOI":"10.3390\/s22228893","type":"journal-article","created":{"date-parts":[[2022,11,18]],"date-time":"2022-11-18T06:11:34Z","timestamp":1668751894000},"page":"8893","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1368-3950","authenticated-orcid":false,"given":"Jasmina","family":"Casals-Terr\u00e9","sequence":"first","affiliation":[{"name":"Department Mechanical Engineering, Universitat Polit\u00e8cnica de Catalunya (UPC), C\/Colom 7\u201311, 08222 Terrassa, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4026-226X","authenticated-orcid":false,"given":"Llu\u00eds","family":"Pradell","sequence":"additional","affiliation":[{"name":"Department Signal Theory and Communications, Universitat Polit\u00e8cnica de Catalunya (UPC), C\/Jordi Girona 1\u20133, 08034 Barcelona, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Julio C\u00e9sar","family":"Heredia","sequence":"additional","affiliation":[{"name":"Department Signal Theory and Communications, Universitat Polit\u00e8cnica de Catalunya (UPC), C\/Jordi Girona 1\u20133, 08034 Barcelona, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6009-0103","authenticated-orcid":false,"given":"Flavio","family":"Giacomozzi","sequence":"additional","affiliation":[{"name":"Fondazione Bruno Kessler-FBK, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6462-4814","authenticated-orcid":false,"given":"Jacopo","family":"Iannacci","sequence":"additional","affiliation":[{"name":"Fondazione Bruno Kessler-FBK, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Adri\u00e1n","family":"Contreras","sequence":"additional","affiliation":[{"name":"Qorvo Inc., 1818 S Orange Blossom Trail, Apopka, FL 32703, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Miquel","family":"Rib\u00f3","sequence":"additional","affiliation":[{"name":"Electronics and Telecommunications Department, La Salle-Ramon Llull University (URL), C\/Sant Joan de La Salle, 42 08022 Barcelona, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,11,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"55428","DOI":"10.1109\/ACCESS.2022.3176348","article-title":"Review and Perspectives of Micro\/Nano Technologies as Key-Enablers of 6G","volume":"10","author":"Iannacci","year":"2022","journal-title":"IEEE Access"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"11891","DOI":"10.1109\/JIOT.2021.3063686","article-title":"Enabling massive IoT toward 6G: A comprehensive survey","volume":"8","author":"Guo","year":"2021","journal-title":"IEEE Internet Things J."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"359","DOI":"10.1109\/JIOT.2021.3103320","article-title":"6G Internet of Things: A comprehensive survey","volume":"9","author":"Nguyen","year":"2022","journal-title":"IEEE Internet Things J."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Cao, T., Hu, T., and Zhao, Y. 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