{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T01:30:46Z","timestamp":1760232646069,"version":"build-2065373602"},"reference-count":32,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2022,11,23]],"date-time":"2022-11-23T00:00:00Z","timestamp":1669161600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Natural Science Foundation of China","award":["62175165","61905165","2021A1515011834","RCBS20200714114922296","JCYJ20210324120403009"],"award-info":[{"award-number":["62175165","61905165","2021A1515011834","RCBS20200714114922296","JCYJ20210324120403009"]}]},{"name":"Guangdong Basic and Applied Basic Research Foundation","award":["62175165","61905165","2021A1515011834","RCBS20200714114922296","JCYJ20210324120403009"],"award-info":[{"award-number":["62175165","61905165","2021A1515011834","RCBS20200714114922296","JCYJ20210324120403009"]}]},{"name":"Shenzhen Science and Technology Program","award":["62175165","61905165","2021A1515011834","RCBS20200714114922296","JCYJ20210324120403009"],"award-info":[{"award-number":["62175165","61905165","2021A1515011834","RCBS20200714114922296","JCYJ20210324120403009"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Nanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomechanical resonator for thermal stress sensing. The proposed resonator consists of a section of hollow core fiber (HCF) and a trampoline graphene\u2013Au membrane. An all-optical system that integrated optical excitation and optical detection was applied. Then, the resonance frequency of the resonator was obtained through this all-optical system. In addition, this system and the resonator were used to detect the membrane\u2019s built-in stress, which depended on the ambient temperature, by monitoring the resonance frequency shift. The results verified that the temperature-induced thermal effect had a significant impact on membrane stress. Temperature sensitivities of 2.2646 kHz\/\u00b0C and 2.3212 kHz\/\u00b0C were obtained when the temperature rose and fell, respectively. As such, we believe that this device will be beneficial for the quality monitoring of graphene mechanical resonators.<\/jats:p>","DOI":"10.3390\/s22239068","type":"journal-article","created":{"date-parts":[[2022,11,23]],"date-time":"2022-11-23T03:48:12Z","timestamp":1669175292000},"page":"9068","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing"],"prefix":"10.3390","volume":"22","author":[{"given":"Shen","family":"Liu","sequence":"first","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Hang","family":"Xiao","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Yanping","family":"Chen","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Peijing","family":"Chen","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Wenqi","family":"Yan","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Qiao","family":"Lin","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Bonan","family":"Liu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Xizhen","family":"Xu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7730-8906","authenticated-orcid":false,"given":"Yiping","family":"Wang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"},{"name":"Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Xiaoyu","family":"Weng","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"}]},{"given":"Liwei","family":"Liu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7833-4711","authenticated-orcid":false,"given":"Junle","family":"Qu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China"}]}],"member":"1968","published-online":{"date-parts":[[2022,11,23]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"024079","DOI":"10.1103\/PhysRevApplied.14.024079","article-title":"Force Sensing with an Optomechanical Self-Oscillator","volume":"14","author":"Guha","year":"2020","journal-title":"Phys. Rev. Appl."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"6711","DOI":"10.1021\/acs.nanolett.9b00082","article-title":"Accurate Mass Measurement of a Levitated Nanomechanical Resonator for Precision Force-Sensing","volume":"19","author":"Ricci","year":"2019","journal-title":"Nano Lett."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"107801","DOI":"10.1088\/1674-1056\/abaee0","article-title":"Room temperature nonlinear mass sensing based on a hybrid spin-nanoresonator system","volume":"29","author":"Yang","year":"2020","journal-title":"Chin. Phys. B"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"6987","DOI":"10.1021\/acs.nanolett.9b02351","article-title":"Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators","volume":"19","author":"Gruber","year":"2019","journal-title":"Nano Lett."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"4726","DOI":"10.1038\/s41467-019-12562-2","article-title":"A fast and sensitive room-temperature graphene nanomechanical bolometer","volume":"10","author":"Blaikie","year":"2019","journal-title":"Nat. Commun."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"165421","DOI":"10.1103\/PhysRevB.96.165421","article-title":"Optomechanics for thermal characterization of suspended graphene","volume":"96","author":"Dolleman","year":"2017","journal-title":"Phys. Rev. B"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2493","DOI":"10.1364\/OL.37.002493","article-title":"High-sensitivity fiber-tip pressure sensor with graphene diaphragm","volume":"37","author":"Ma","year":"2012","journal-title":"Opt. Lett."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"5313","DOI":"10.1021\/acs.nanolett.9b01770","article-title":"Sealing Graphene Nanodrums","volume":"19","author":"Lee","year":"2019","journal-title":"Nano Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1232","DOI":"10.1021\/nl1042227","article-title":"High, Size-Dependent Quality Factor in an Array of Graphene Mechanical Resonators","volume":"11","author":"Barton","year":"2011","journal-title":"Nano Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"2768","DOI":"10.1021\/acs.nanolett.6b00477","article-title":"Visualizing the Motion of Graphene Nanodrums","volume":"16","author":"Davidovikj","year":"2016","journal-title":"Nano Lett."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"4659","DOI":"10.1021\/acs.nanolett.0c01586","article-title":"Giant Tunable Mechanical Nonlinearity in Graphene-Silicon Nitride Hybrid Resonator","volume":"20","author":"Singh","year":"2020","journal-title":"Nano Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"861","DOI":"10.1038\/nnano.2009.267","article-title":"Performance of monolayer graphene nanomechanical resonators with electrical readout","volume":"4","author":"Chen","year":"2009","journal-title":"Nat. Nanotechnol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"517","DOI":"10.1002\/lpor.201500077","article-title":"Miniature optical fiber current sensor based on a graphene membrane","volume":"9","author":"Zheng","year":"2015","journal-title":"Laser Photonics Rev."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"490","DOI":"10.1126\/science.1136836","article-title":"Electromechanical resonators from graphene sheets","volume":"315","author":"Bunch","year":"2007","journal-title":"Science"},{"key":"ref_15","first-page":"1","article-title":"Research progress in graphene based thermal conductivity materials","volume":"49","author":"Li","year":"2021","journal-title":"Cailiao Gongcheng-J. Mater. Eng."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"3227","DOI":"10.1021\/nl201488g","article-title":"Negative Thermal Expansion Coefficient of Graphene Measured by Raman Spectroscopy","volume":"11","author":"Yoon","year":"2011","journal-title":"Nano Lett."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"She, Y.M., Li, C., Lan, T., Peng, X.B., Liu, Q.W., and Fan, S.C. (2016). The Effect of Viscous Air Damping on an Optically Actuated Multilayer MoS2 Nanomechanical Resonator Using Fabry-Perot Interference. Nanomaterials, 6.","DOI":"10.3390\/nano6090162"},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Shi, F.T., Fan, S.C., Li, C., and Li, Z.A. (2019). Opto-thermally Excited Fabry-Perot Resonance Frequency Behaviors of Clamped Circular Graphene Membrane. Nanomaterials, 9.","DOI":"10.3390\/nano9040563"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"272","DOI":"10.1016\/S0257-8972(99)00383-7","article-title":"The effects of bias voltage and annealing on the microstructure and residual stress of arc-evaporated Cr-N coatings","volume":"120","author":"Oden","year":"1999","journal-title":"Surf. Coat. Technol."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"132","DOI":"10.1016\/j.jallcom.2016.04.272","article-title":"Stress measurement for nonstoichiometric ceria films based on Raman spectroscopy","volume":"682","author":"Li","year":"2016","journal-title":"J. Alloy. Compd."},{"key":"ref_21","first-page":"1543","article-title":"Effects of thickness on the residual stress in Cu films","volume":"27","author":"Li","year":"2004","journal-title":"J. Hefei Polytech. Univ. Nat. Ed."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"4189","DOI":"10.1063\/1.373050","article-title":"Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures","volume":"87","author":"Tada","year":"2000","journal-title":"J. Appl. Phys."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"103697","DOI":"10.1016\/j.jmps.2019.103697","article-title":"The linear-dependence of adhesion strength and adhesion range on temperature in soft membranes","volume":"132","author":"Chang","year":"2019","journal-title":"J. Mech. Phys. Solids"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"044301","DOI":"10.1063\/1.3270425","article-title":"Van der Waals adhesion of graphene membranes","volume":"107","author":"Lu","year":"2010","journal-title":"J. Appl. Phys."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1586","DOI":"10.1021\/acsphotonics.1c01676","article-title":"Room-Temperature Fiber Tip Nanoscale Optomechanical Bolometer","volume":"9","author":"Liu","year":"2022","journal-title":"ACS Photonics"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1752","DOI":"10.1039\/D1LC00012H","article-title":"Fiber optic hydrogen sensor based on a Fabry-Perot interferometer with a fiber Bragg grating and a nanofilm","volume":"21","author":"Luo","year":"2021","journal-title":"Lab Chip"},{"key":"ref_27","first-page":"11","article-title":"Sputtering process research of multilayer metal thin film in MEMS devices","volume":"37","author":"Zhang","year":"2018","journal-title":"Transducer Microsyst. Technol."},{"key":"ref_28","unstructured":"Ma, J. (2014). Miniature Fiber-Tip Fabry-Perot Interferometric Sensors for Pressure and Acoustic Detection, The Hong Kong Polytechnic University."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"27494","DOI":"10.1364\/OE.23.027494","article-title":"Analyzing the temperature sensitivity of Fabry-Perot sensor using multilayer graphene diaphragm","volume":"23","author":"Li","year":"2015","journal-title":"Opt. Express"},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Kumar, V., Kumar, A., Lee, D.-J., and Park, S.-S. (2021). Estimation of Number of Graphene Layers Using Different Methods: A Focused Review. Materials, 14.","DOI":"10.3390\/ma14164590"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"4769","DOI":"10.1364\/OL.39.004769","article-title":"Fiber-optic ferrule-top nanomechanical resonator with multilayer graphene film","volume":"39","author":"Ma","year":"2014","journal-title":"Opt. Lett."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"505","DOI":"10.1109\/JSEN.2014.2361174","article-title":"Ultrahigh Sensitive Temperature Sensor Based on Fabry-Perot Interference Assisted by a Graphene Diaphragm","volume":"15","author":"Li","year":"2015","journal-title":"IEEE Sens. J."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/23\/9068\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T01:24:42Z","timestamp":1760145882000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/23\/9068"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,11,23]]},"references-count":32,"journal-issue":{"issue":"23","published-online":{"date-parts":[[2022,12]]}},"alternative-id":["s22239068"],"URL":"https:\/\/doi.org\/10.3390\/s22239068","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2022,11,23]]}}}