{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,28]],"date-time":"2026-03-28T00:42:03Z","timestamp":1774658523153,"version":"3.50.1"},"reference-count":12,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2022,11,30]],"date-time":"2022-11-30T00:00:00Z","timestamp":1669766400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Polish National Science Center (NCN)","award":["2017\/25\/B\/ST7\/02465"],"award-info":[{"award-number":["2017\/25\/B\/ST7\/02465"]}]},{"name":"Polish National Science Center (NCN)","award":["RPMA 01.01.00-14-9873\/17"],"award-info":[{"award-number":["RPMA 01.01.00-14-9873\/17"]}]},{"name":"Research Agenda of the investment project co-financed from the Regional Operational Programme for Mazowieckie Voivodeship (RPOWM)","award":["2017\/25\/B\/ST7\/02465"],"award-info":[{"award-number":["2017\/25\/B\/ST7\/02465"]}]},{"name":"Research Agenda of the investment project co-financed from the Regional Operational Programme for Mazowieckie Voivodeship (RPOWM)","award":["RPMA 01.01.00-14-9873\/17"],"award-info":[{"award-number":["RPMA 01.01.00-14-9873\/17"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents the results of beam investigations on semiconductor IR lasers using novel detectors based on thermocouples. The work covers the design, the fabrication of detectors, and the experimental validation of their sensitivity to IR radiation. The principle of operation of the manufactured detectors is based on the Seebeck effect (the temperature difference between hot and cold junctions induced voltage appearance). The devices were composed of several thermocouples arranged in a linear array. The nano- and microscale thermocouples (the hot junctions) were fabricated using a typical Si-compatible MEMS process enhanced with focused ion beam (FIB) milling. The performance of the hot junctions was tested, focusing on their sensitivity to IR radiation covering the near-infrared (NIR) radiation (\u03bb = 976 nm). The output voltage was measured as a function of the detector position in the XY plane. The measurement results allowed for reconstructing the Gaussian-like intensity distribution of the incident light beam.<\/jats:p>","DOI":"10.3390\/s22239324","type":"journal-article","created":{"date-parts":[[2022,11,30]],"date-time":"2022-11-30T08:46:41Z","timestamp":1669798001000},"page":"9324","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["A New Approach for Sensitive Characterization of Semiconductor Laser Beams Using Metal-Semiconductor Thermocouples"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4375-5238","authenticated-orcid":false,"given":"Anna Katarzyna","family":"Piotrowska","sequence":"first","affiliation":[{"name":"\u0141ukasiewicz Research Network\u2013Institute of Microelectronics and Photonics, Al. Lotnik\u00f3w 32\/46, 02-668 Warsaw, Poland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9032-812X","authenticated-orcid":false,"given":"Adam","family":"\u0141aszcz","sequence":"additional","affiliation":[{"name":"\u0141ukasiewicz Research Network\u2013Institute of Microelectronics and Photonics, Al. Lotnik\u00f3w 32\/46, 02-668 Warsaw, Poland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8312-509X","authenticated-orcid":false,"given":"Micha\u0142","family":"Zaborowski","sequence":"additional","affiliation":[{"name":"\u0141ukasiewicz Research Network\u2013Institute of Microelectronics and Photonics, Al. Lotnik\u00f3w 32\/46, 02-668 Warsaw, Poland"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0172-5575","authenticated-orcid":false,"given":"Artur","family":"Broda","sequence":"additional","affiliation":[{"name":"\u0141ukasiewicz Research Network\u2013Institute of Microelectronics and Photonics, Al. Lotnik\u00f3w 32\/46, 02-668 Warsaw, Poland"}]},{"given":"Dariusz","family":"Szmigiel","sequence":"additional","affiliation":[{"name":"\u0141ukasiewicz Research Network\u2013Institute of Microelectronics and Photonics, Al. Lotnik\u00f3w 32\/46, 02-668 Warsaw, Poland"}]}],"member":"1968","published-online":{"date-parts":[[2022,11,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"197","DOI":"10.1016\/j.jphotobiol.2017.04.014","article-title":"Biological Effects and medical applications of infrared radiation","volume":"170","author":"Tsai","year":"2017","journal-title":"J. Photochem. Photobiol. B"},{"key":"ref_2","unstructured":"Schmieder, D. (2022, June 08). The History, Trends, and Future of Infrared Technology. Available online: https:\/\/dsiac.org\/articles\/the-history-trends-and-future-of-infrared-technology\/."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1533","DOI":"10.1038\/s41467-019-09590-3","article-title":"Mid-infrared gas spectroscopy using efficient fiber laser driven photonic chip-based supercontinuum","volume":"10","author":"Grassani","year":"2019","journal-title":"Nat. Commun."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"306","DOI":"10.1109\/LPT.2007.915635","article-title":"Emission and Propagation Properties of Midinfrared Quantum Cascade Lasers","volume":"20","author":"Krishnaswami","year":"2008","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1016\/S1350-4495(02)00140-8","article-title":"Infrared detectors: An overview","volume":"43","author":"Rogalski","year":"2002","journal-title":"Infrared Phys. Technol."},{"key":"ref_6","unstructured":"(2022, June 02). THORLABS Inc OEM Thermal Optical Power Detectors, Unmounted and Mounted. Available online: https:\/\/www.thorlabs.com\/newgrouppage9.cfm?objectgroup_id=11777."},{"key":"ref_7","unstructured":"Newport Corporation (2022, June 29). Thermopile Sensor Physics. Available online: https:\/\/www.newport.com\/n\/thermopile-physics."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"R59","DOI":"10.1088\/0957-0233\/18\/7\/R01","article-title":"Review of micromachined thermopiles for infrared detection","volume":"18","author":"Graf","year":"2007","journal-title":"Meas. Sci. Technol."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"064017","DOI":"10.1088\/0960-1317\/18\/6\/064017","article-title":"A thermopile detector array with scaled TE elements for use in an integrated IR micro spectrometer","volume":"18","author":"Wu","year":"2008","journal-title":"J. Micromech. 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Reliab."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/23\/9324\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T01:30:12Z","timestamp":1760146212000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/23\/9324"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,11,30]]},"references-count":12,"journal-issue":{"issue":"23","published-online":{"date-parts":[[2022,12]]}},"alternative-id":["s22239324"],"URL":"https:\/\/doi.org\/10.3390\/s22239324","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022,11,30]]}}}